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Supplier: JST Manufacturing, Inc.
Description: JST's Spinner and Hot Plate workstations are designed for ease of use and service. Spinner modules and/or Hot Plate modules are mounted in a sealed deck area with easily accessible storage and maintenance thru hinged doors. A stainless steel enclosure is nitrogen purged
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Supplier: Raymond Machinery Co., Ltd.
Description: ; Compound Foundry Process; Vacuum Process Casting Heat Treatment: Normalizing; Tempering, Q+T; Quenching; Carburizing; Nitriding Machining Equipment: 6 sets of 4-axis Machining Centre (Max SPEC:1300mm * Dia750mm); 6 sets of Oblique Guide CNC (Max SPEC:Dia500mm); 2 sets of Automatic
- Applications: Abrasive / Erosive Wear Protection, Alternative / Renewable Energy, Automotive / Vehicular, Chemical / Materials Processing, Construction & Building / Architectural, Marine, Mining, Oil and Gas, Resistance Alloy / Heating, Structural, Wear Parts / Tooling, Other
- Ferrous / Iron Based: Ferrous / Iron Based - Any Type, Carbon Steel (UNS G), Alloy Steel (UNS G), Stainless Steel (UNS S), Tool Steel (UNS T)
- Finish: Coated / Painted, Galvanized, Ground / Machined, Polished, Other
- Performance Features: Specialty / Other, Austenitic
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Supplier: Raymond Machinery Co., Ltd.
Description: ; Compound Foundry Process; Vacuum Process Casting Heat Treatment: Normalizing; Tempering, Q+T; Quenching; Carburizing; Nitriding Machining Equipment: 6 sets of 4-axis Machining Centre (Max SPEC:1300mm * Dia750mm); 6 sets of Oblique Guide CNC (Max SPEC:Dia500mm); 2 sets of Automatic
- Applications: Abrasive / Erosive Wear Protection, Alternative / Renewable Energy, Automotive / Vehicular, Chemical / Materials Processing, Construction & Building / Architectural, Marine, Mining, Oil and Gas, Resistance Alloy / Heating, Structural, Wear Parts / Tooling, Other
- Ferrous / Iron Based: Ferrous / Iron Based - Any Type, Carbon Steel (UNS G), Alloy Steel (UNS G), Stainless Steel (UNS S), Tool Steel (UNS T)
- Finish: Coated / Painted, Galvanized, Ground / Machined, Polished, Other
- Performance Features: Specialty / Other, Austenitic
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Supplier: Raymond Machinery Co., Ltd.
Description: ; Compound Foundry Process; Vacuum Process Casting Heat Treatment: Normalizing; Tempering, Q+T; Quenching; Carburizing; Nitriding Machining Equipment: 6 sets of 4-axis Machining Centre (Max SPEC:1300mm * Dia750mm); 6 sets of Oblique Guide CNC (Max SPEC:Dia500mm); 2 sets of Automatic
- Applications: Abrasive / Erosive Wear Protection, Alternative / Renewable Energy, Automotive / Vehicular, Chemical / Materials Processing, Construction & Building / Architectural, Marine, Mining, Oil and Gas, Resistance Alloy / Heating, Structural, Wear Parts / Tooling, Other
- Ferrous / Iron Based: Ferrous / Iron Based - Any Type, Carbon Steel (UNS G), Alloy Steel (UNS G), Stainless Steel (UNS S), Tool Steel (UNS T)
- Finish: Coated / Painted, Galvanized, Ground / Machined, Polished, Other
- Performance Features: Specialty / Other, Austenitic, Heat Resistant / Hot Work
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Supplier: Raymond Machinery Co., Ltd.
Description: ; Compound Foundry Process; Vacuum Process Casting Heat Treatment: Normalizing; Tempering, Q+T; Quenching; Carburizing; Nitriding Machining Equipment: 6 sets of 4-axis Machining Centre (Max SPEC:1300mm * Dia750mm); 6 sets of Oblique Guide CNC (Max SPEC:Dia500mm); 2 sets of Automatic
- Applications: Abrasive / Erosive Wear Protection, Alternative / Renewable Energy, Automotive / Vehicular, Chemical / Materials Processing, Construction & Building / Architectural, Marine, Mining, Oil and Gas, Resistance Alloy / Heating, Structural, Wear Parts / Tooling, Other
- Ferrous / Iron Based: Ferrous / Iron Based - Any Type, Carbon Steel (UNS G), Alloy Steel (UNS G), Stainless Steel (UNS S), Tool Steel (UNS T)
- Finish: Coated / Painted, Galvanized, Ground / Machined, Polished, Other
- Performance Features: Wear Resistant / High Speed, Specialty / Other, Austenitic
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Supplier: Gilson Company, Inc.
Description: Extractor with 3,000g capacity has superior design features for quantitative determination of bitumen in hot-mixed paving mixtures using the vacuum method. Extractor base is a 16in (407mm) dia. x 8in (203mm) high stainless steel extract collection tank with carrying handles, a
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Description: pressed ALN ceramic components purity is 99.5% aluminum nitride and its density is about 3.3g/cm3. The thermal conductivity is 140-170 W/(m·k). The forming way of hot-pressed aluminum nitride ceramics is vacuum hot pressing sintering. After high temperature and high pressure,
- Applications: Other
- Material Type: Aluminum Nitride, Specialty Ceramic
- Performance Features: Metallized / Silvered
- Shape / Form: Plate / Board (e.g., Fiberboard)
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Supplier: Schmalz Inc.
Description: Round suction plate for handling of very hot workpieces Removing of hot cathode ray tubes from molds Handling of hot glass
- Diameter / Maximum Dimension: 90 mm
- Material: Other
- Stroke (if Applicable): 16.5 mm
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Supplier: Schmalz Inc.
Description: Round suction plate for handling of very hot workpieces Removing of hot cathode ray tubes from molds Handling of hot glass
- Diameter / Maximum Dimension: 190 mm
- Material: Other
- Stroke (if Applicable): 8 mm
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Supplier: Schmalz Inc.
Description: Round suction plate for handling of very hot workpieces Removing of hot cathode ray tubes from molds Handling of hot glass
- Diameter / Maximum Dimension: 120 mm
- Material: Other
- Stroke (if Applicable): 25 mm
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Supplier: Schmalz Inc.
Description: Round suction plate for handling of workpieces with smooth surfaces Usage in manufacturing of float glass or in tempering processes in the glass industry Hot forming in the metal industry
- Diameter / Maximum Dimension: 6 mm
- Material: Other
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Description: Superconducting aluminum temperature plate Superconducting aluminum uniform temperature plate, which is quickly and evenly distributed to the low temperature condensation by the heat of evaporation of the thermal superconducting medium in the vacuum chamber, and then the
- Device: Cold Plate
- Heat Sink Fin Style: Machined Plate
- Height: 1 to 6 mm
- Length: 100 to 3000 mm
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Supplier: Tooling Technology
Description: /rear sheet clamps pinch off and isolate hot plastic sheet, preventing distortion by holding sheets flat prior to plastic displacement by molds or plugs Two 1 1/2" NPT vacuum ports provide maximum air evacuation and guarantee sharp part production Simple adjustability to required index
- Tooling Plate / Clamping Column Type: Platen / Mold Plate
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Supplier: APV, An SPX Brand
Description: capacity/m²) High turn down ratio (down to 25% of nominal capacity) Independent of water inlet temperature No rings and plates inside vacuum tanks Deaerated water is pasteurised Fully CIP-cleanable
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Supplier: ATV Technologie GmbH
Description: individual Process Chambers) Weight: 1.000kg (1 Process Chamber) up to 1.500kg (3 Process Chambers) Hot Plate: 410 x 440mm (1 Hot Plate/Process Chamber) ?IR Heating: Assy of 18 IR lamps (1KVA each) ?Power connection
- Configuration: Bench / Cabinet
- Temperature Range: 450 F
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Description: , microwave tubes, transistors, diodes, inter-grated circuits and has been used for the flat pack and the dual-in-line package. DESCRIPTION Alloy 29-17 (Kovar®) is a vacuum melted, iron-nickel-cobalt, low expansion alloy whose chemical composition is controlled within narrow limits to
- Alloy: Yes
- Applications: Electrical / HV Parts, Electronics / RF-Microwave, Other
- Elongation: 42 %
- Ferrous / Iron Based: Ferrous / Iron Based - Any Type, Specialty / Other Ferrous (UNS K)
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Description: Applications High-temperature furnace setter plates Molten glass and metal crucibles High-temperature and high-voltage electrical insulators Vacuum feedthroughs Fittings and the lining of the plasma chamber Nonferrous metal and alloy
- Material Type: Boron Nitride
- Shape / Form: Tube / Sheath - Immersion (Closed End)
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Supplier: ASTM International
Description: 1.1 This test method covers the achievement and measurement of steady-state heat flux through flat-slab specimens using a guarded-hot-plate apparatus. The method encompasses both the single-sided and the double-sided mode of measurement. Both distributed and line source guarded heating
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Supplier: U.S. Plastic Corporation
Description: Perfect for mixing, pumping and storing nearly any liquid, powder or paste, such as inks, chemicals, adhesives, greases, paints, coatings, silicones and food, meets FDA standards. Seamless, vacuum-formed inserts have a contoured lip that snaps over a pails top bead to prevent leakage between
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Supplier: ASTM International
Description: shall be consolidated employing either the powder metallurgy or vacuum-arc-casting process. The materials shall conform to the required chemical composition for carbon, oxygen, nitrogen, iron, nickel, and silicon. Plate, sheet, and foil shall be furnished in the following metallurgical
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Supplier: ASTM International
Description: This specification covers the standard requirements for two grades of wrought hafnium and hafnium alloy strip, sheet, and plate: Grade R1 for nuclear applications and Grade R3 for commercial applications. The materials shall be made from ingots that are produced in a furnace by vacuum
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Description: 's adaptability. Macor has no pores and won't outgas when baked out properly. Unlike high temperature polymers, it is tough and rigid and won't creep or deform. Radiation resistance also applies to Macor machinable glass ceramic. According to your specifications, we provide Macor Rods, Macor
- Density: 2.6 g/cc
- Dielectric Strength: 4.00E7 V/m
- Max Use Temperature: 1000 C
- Shape / Form: Plate / Board (e.g., Fiberboard)
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Description: Cerium Boride is a ceramic material that is also known as Cerium Hexaboride or CeB6. A hot cathode formed of Cerium Hexaboride crystals is the primary application for Cerium Hexaboride. Applications Thermoelectric emission (cathode) Plasma generator for plasma
- Density: 4.3 g/cc
- Shape / Form: Plate / Board (e.g., Fiberboard)
- Thermal Conductivity: 11.8 W/m-K
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Supplier: ASTM International
Description: This specification covers hot- and cold-rolled zirconium and zirconium alloy sheet, strip, and plate. One unalloyed and three alloys for use in nuclear applications are described. Materials covered by this specification shall be produced by multiple vacuum melting in arc
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Supplier: Season Group
Description: Season's summary of capabilities: Class 10,000 and Class 100,000 Clean Rooms Vertical injection molding Insert molding Gas assist molding In mold decoration (IMD) Structural foam molding Ultrasonic and hot plate welding
- Capabilities: Thin Gauge Thermoforming, Heavy Gauge Thermoforming
- Location: North America, United States Only, Northeast US Only, Southern US Only, Southwest US Only, Northwest US Only, Midwest US Only, Canada Only, South / Central America Only, South Asia Only, Near East Only, East Asia / Pacific Only
- Material Thickness: 0.0059 to 0.3937 inch
- Part Size: 59.06 inch
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Description: Tantalum Shaped, Flat, Square, Round, Fine Wire, Plated and Un-plated ASTM B 365, ASTM B708, ASTM F 560 R05200: Electron beam or vacuum-arc cast tantalum R05400: Sintered tantalum TANTALUM WIRE DESCRIPTION Tantalum Alloy Description
- Alloy: Yes
- Applications: Biocompatible / Biomaterial, Chemical / Materials Processing, Electronics / RF-Microwave, Other
- Coil Stock: Yes
- Features: Corrosion Resistant, Cold Work (Die / Mold), Heat Resistant / Hot Work, Vacuum Arc Melted (E, VAR, etc.)
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Supplier: Season Group
Description: Season's summary of capabilities: Class 10,000 and Class 100,000 Clean Rooms Vertical injection molding Insert molding Gas assist molding In mold decoration (IMD) Structural foam molding Ultrasonic and hot plate welding
- Industry: Automotive, Consumer, Electrical / Electronics, General Industrial, Medical, Military / Law Enforcement, Telecommunications
- Location: North America, United States Only, Northeast US Only, Southern US Only, Southwest US Only, Northwest US Only, Midwest US Only, Canada Only, South / Central America Only, South Asia Only, Near East Only, East Asia / Pacific Only
- Molding Type: Film Insert Molding (FIM), Gas Injection Molding (GIM), Structural Foam Molding, Thermoplastic Injection Molding, Thermoforming (Vacuum or Pressure), Vacuum Forming
- Services Offered: Clean Room Molding, Insert Molding / Overmolding, Large Part Molding, Micro Molding, Two-shot Injection Molding, Prototype / Market Entry Molding, Low Volume Production (Short Runs), High Volume Production (Long Runs), Assembly Services, Tool / Mold Making, Bonding, Design Assistance, Graphics,
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Supplier: ZIRCAR Refractory Composites, Inc.
Description: well suited for use in high vacuum and reducing environments where silica cannot be tolerated, such as power metal and MIM furnaces with H2 atmospheres. They also have high electrical resistivity at elevated temperatures allowing them to be used in direct contact with resistance heating
- Applications: Electrical / HV Parts, Other
- Coeff. of Thermal Expansion (CTE): 7.00E-6 µm/m-C
- Density: 0.7200 g/cc
- Length: 24 inch
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Supplier: ZIRCAR Refractory Composites, Inc.
Description: well suited for use in high vacuum and reducing environments where silica cannot be tolerated, such as power metal and MIM furnaces with H2 atmospheres. They also have high electrical resistivity at elevated temperatures allowing them to be used in direct contact with resistance heating
- Applications: Electrical / HV Parts, Other
- Coeff. of Thermal Expansion (CTE): 7.00E-6 µm/m-C
- Density: 1 g/cc
- Length: 24 inch
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Supplier: Acrolab Ltd.
Description: Stoner E342 Zero Stick Paintable Mold Release, is a unique, extremely versatile release agent which is generally acceptable for applications where a food grade release is required. Zero Stick allows molded parts to be painted, plated, hot stamped , adhesive bonded, labeled, or
- Features: Aerosol / Spray
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Supplier: SAE International
Description: design is a key for achieving the required performance levels. Several medium carbon steels containing 0.07 wt pct P, 0.06 wt pct S and various amounts of Mn, Si, V, and N were produced by vacuum induction melting laboratory heats and hot working the cast ingots into plates. The
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Description: Boron Nitride is a high-temperature ceramic that has a structure similar to graphite. Our portfolio of hot-pressed solid materials includes pure Hexagonal Boron Nitride as well as composites suitable for applications requiring excellent thermal properties combined with electrical isolation
- Material Type: Aluminum Nitride, Boron Nitride
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Supplier: Acrolab Ltd.
Description: Stoner W 313 Release & Paint is specially formulated as a paintable release agent and anti - stick lubricant for molded materials such as plastics, rubber, waxes, and similar materials. Allows molded parts to be painted, plated, hot stamped , adhesive bonded, labeled, or otherwise
- Type: Aerosol / Contact Cleaner, Specialty / Other
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Supplier: Acrolab Ltd.
Description: similar materials. Rocket Release allows molded parts to be painted, plated, hot stamped, adhesive bonded, labelled, or otherwise decorated in most applications. Provides a long lasting anti - stick film for fast, easy part removal from molds and multiple part releases per application.
- Type: Aerosol / Contact Cleaner, Specialty / Other
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Supplier: APV, An SPX Brand
Description: high turn down Independent of water inlet temperature (optional) Variable deaeration levels No rings and plates inside vacuum tanks Fully CIP-cleanable
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Description: structure and material, Metal U-rings can be used in working conditions such as high temperature (up to 800°C), cryogenic (low to -270°C), high pressure (up to 1500kgf/cm2), high vacuum (up to 1E-9 mmHg) and other extreme working conditions of static sealing. Applications
- Application / Industry: Aerospace, Chemical & Processing, Piping and Valves, Power Generation, Oil & Gas, MIL-SPEC, Nuclear, Specialized
- Cryogenic Application: Yes
- Material: Aluminum, Copper, Nickel / Nickel-Based Alloy, Stainless Steel, Steel, Titanium, Specialized or Other
- Material Features: Heat-Treated, Plated / Coated
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Description: and have good spring back. Due to its special structure and material, Spring Energized Metal C-rings can be used in working conditions such as high temperature (up to 800°C), cryogenic (low to -270°C), high pressure (up to 1500kgf/cm2), high vacuum (up to 1E-9 mmHg) and other extreme working
- Application / Industry: Aerospace, Chemical & Processing, Power Generation, Oil & Gas, MIL-SPEC, Nuclear, Semiconductor, Specialized
- Cryogenic Application: Yes
- Material: Aluminum, Copper, Nickel / Nickel-Based Alloy, Stainless Steel, Steel, Titanium, Specialized or Other
- Material Features: Heat-Treated, Plated / Coated
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Description: , Nuclear instruments, Heat exchangers, Reactors, Hot Runners, Oil & Gas, Flow meters, Chemical fibers, Food & Medicine equipment etc. Specifications: Working temperature: -270°C ~ +800°C Working Pressure: Ultra-vacuum ~ +1500 bar
- Application / Industry: Aerospace, Chemical & Processing, Piping and Valves, Power Generation, Oil & Gas, MIL-SPEC, Nuclear, Specialized
- Cryogenic Application: Yes
- Material: Aluminum, Copper, Nickel / Nickel-Based Alloy, Stainless Steel, Steel, Titanium, Specialized or Other
- Material Features: Heat-Treated, Plated / Coated
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Description: its special structure and material, Metal C-rings can be used in working conditions such as high temperature (up to 800°C), cryogenic (low to -270°C), high pressure (up to 1500kgf/cm2), high vacuum (up to 1E-9 mmHg) and other extreme working conditions of static sealing
- Application / Industry: Aerospace, Chemical & Processing, Power Generation, Oil & Gas, MIL-SPEC, Nuclear, Semiconductor, Specialized
- Cryogenic Application: Yes
- Material: Aluminum, Copper, Nickel / Nickel-Based Alloy, Stainless Steel, Steel, Titanium, Specialized or Other
- Material Features: Heat-Treated, Plated / Coated
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Supplier: JETSEAL, Inc.
Description: -Seals are also available as Multi-Convolution Seals. JE series E-Seals are intended for sealing hot combustion gas and aggressive acid or base liquids. JH series E-Seals require higher loads to compress than JE series seals. JH series E-Seals generate higher sealing contact stresses allowing
- Application / Industry: Aerospace, Chemical & Processing, Piping and Valves, Power Generation, Oil & Gas, MIL-SPEC, Nuclear, Semiconductor, Specialized
- Cryogenic Application: Yes
- Material: Nickel / Nickel-Based Alloy, Stainless Steel, Specialized or Other
- Material Features: Heat-Treated, Plated / Coated
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Supplier: JTEKT North America, Inc.
Description: . Bearing for spattering equipment For the hot vacuum section of the spattering equipment, a bearing of the hot clean pro specification is adopted. Bearing for CMP equipment The bearing of the CMP equipment is used in the environment exposed to the abrasive and
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Supplier: TMP Pro Distribution
Description: Designed for speed and transparency, the Stage Two vacuum tube microphone's transformerless, Class A discrete tube amplifier circuit delivers low noise, superb transient response and utilizes a single hand-selected ECC88 vacuum tube. Like the Bottle, the Stage Two has the ability to
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Supplier: APV, An SPX Brand
Description: evacuated to -0,93 bar by the seawater-driven ejector. At this pressure, the seawater to be distilled enters the evaporator where it evaporates at approx. 44°C - 49°C when passing the plates heated by the heating medium - typically hot water (engine jacket water) at 75°C - 90°C.
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Supplier: CSA Group
Description: ISO 17096:2015 specifies safety requirements for the following non-fixed load lifting attachments for cranes, hoists, and manually controlled load manipulating devices as defined in Clause 3: - plate clamps; - vacuum lifters; - self priming, - non-self-priming (pump
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Supplier: FX PCB Co., Ltd.
Description: will consequently not be consistent as a result of this. As a result, heat sinks frequently get hotter closer to the source and cooler farther away. The heat sink experiences heat loss This procedure depends on the heat sink’s temperature gradient and working fluid, which
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Supplier: FX PCB Co., Ltd.
Description: . Inverter, solid-state relay, rectifier bridge, etc How to Keep your Aluminum Circuit Boards? Keep your Aluminum PCB in a dry and dark place. You should use your PCBs within 48hours once you open the vacuum package MAJOR Aluminum PCB MATERIAL SUPPLIER for FX PCB
- Materials of Construction: Aluminum Foil / Cladding, Copper Foil / Cladding, Specialty / Other
- Thickness: 0.0197 to 0.1969 inches
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Vacuum Brazed Liquid Cooling Plate Series This advanced cooling solution is designed to offer exceptional heat management for industrial applications. Utilizing a phase-change cooling process, it ensures superior thermal performance while maintaining a compact and durable (read more)
Browse Heat Pipes Datasheets for ToneCooling Technology Co., Ltd -
controlled shrouds and thermo-radiative heat plates. At E-Labs, Inc., we support thermal cycling and thermal bakeout vacuum testing requirements. During thermal cycling, the unit experiences repeated heating and cooling as it would when exposed to the harsh environment of space. During thermal (read more)
Browse Environmental Exposure (Climatics) Testing Services Datasheets for E-Labs, Inc. -
/night cycles of its planned orbit. Outgassing & Contamination Test: Often a dedicated phase where the test article is baked at an elevated temperature under high vacuum. Condensation plates cooled (read more)
Browse Environmental Test Chambers and Rooms Datasheets for Guangdong Atmars Industry Co., Limited -
Inductotherm Group companies manufacture Consarc aluminium brazing furnaces, featuring advanced vacuum pumping systems, temperature uniformity control, handling systems, forced cooling, and hot water systems. Applications Include: Aerospace heat (read more)
Browse Vacuum Furnaces Datasheets for Inductotherm Group -
cycles of extreme heat and cold, pressure extremes, solar radiation levels, and the airless conditions of space. Our thermal vacuum chambers range in size from 16 to 66 cubic feet and contain thermally controlled shrouds and thermo-radiative heat plates. At E-Labs, Inc., we support (read more)
Browse Environmental Exposure (Climatics) Testing Services Datasheets for E-Labs, Inc. -
In the field of high temperature furnaces, they includes: vacuum furnaces, hot pressing sintering furnaces, hot isostatic furnaces, Innovacera can provide a series of boron nitride precision machined components such as boron nitride sleeves, BN bushings, BN tubes, BN (read more)
Browse Industrial Ceramic Materials Datasheets for Xiamen Innovacera Advanced Materials Co., Ltd. -
BN without any binder added. This material offers extreme high temperature resistance in vacuum furnace, superior thermal shock resistance and exceptional thermal conductivity, it’s suitable for high temperature ceramic manufacturing, particularly for crucibles, sintering setter plate of (read more)
Browse Industrial Ceramic Materials Datasheets for Xiamen Unipretec Ceramic Technology Co., Ltd. -
hardness shall be high enough so that the sliding motion of the seal and shaft does not deteriorate either of them. In addition, we advise to silver plate Comma Ring for better tightness, reduced friction and wear. (read more)
Browse Metal Ring Seals Datasheets for Sonkit (Shanghai) Industry Technology Co., Ltd. -
. Good surface roughness and can be polished to achieve mirror-like effect; Fast delivery, cost-effective, and the performance is stable; Fast heat dissipation, no hot spots left on the board device; No warping or bending in hot (read more)
Browse Industrial Ceramic Materials Datasheets for Xiamen Unipretec Ceramic Technology Co., Ltd. -
nicklel-plated copper or alloy conductor materials: Nickel-plated copper is often used in high-temperature applications and withstands up to 450°C. Nickel plating also offers corrosion and wear resistance (read more)
Browse Control and Instrumentation Cables Datasheets for Northwire, Inc.
Conduct Research Top
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Designing Atmospheric-Pressure Plasma Sources for Surface Engineering of Nanomaterials
necessary for DEP. This technique. eliminates cell-electrode contact, minimizing contamination. of the biological sample, joule heating, bubble formation, as. well as electrochemical effects [29, 30]. As with iDEP, cDEP. lends itself to mass fabrication techniques such as hot. embossing and injection
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Study of Sub-0.5 um SOI-with-Active-Substrate
(SOIAS) Technology for Ultra-Low Power
Applications
The HMDS was spun on at 4.5 krpm for 20 seconds and then baked at 110 "C for 2 minutes on a vacuum hot plate .
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Enhancement of electro-optic properties and temperature stability in sol-gel polymer thin films
• 200 °C ( vacuum hot plate ) .
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How to minimize CD variation and overlay degradation induced by film stress
Vacuum hot plate provides a function of minimizing a gap between hot plate and wafer with vacuum.
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New sensing wafer technique for artifact-free transient temperature measurements in PEB processes
The within wafer temperature ranges obtained using the lab vacuum hot plate are listed in Table 1.
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Chemistry and Lithography
Figures 11.14(a)–(d) show the mechanisms of different physical processes taking place during the first 10 seconds of soft baking a typical resist on a vacuum hot plate .78 Figure 11.14(a) shows that the temperature of the…
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Arylmethyl sulfones: A new class of photoacid generators
The wafers were subsequently baked at 105k 2°Cfor 2 min on a vacuum hot plate .
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Single-component chemically amplified resist materials for electron-beam and x-ray lithography
The resist films were baked after coating at 105 °C for 2 mm. on a Machine Technology Incorporated (MTI) vacuum hot plate or on a vacuum hot plate which is part of a Silicon Valley Group (SVG) system 88 wafer track.
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Process latitude measurements on chemically amplified resists exposed to synchrotron radiation
All resist baking steps were done on a vacuum hot plate controlled to within .
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Deep-UV resists based on methacrylamide copolymers
The resists were spin coated onto hexamethyl disilazane (HMDS) primed silicon wafers and prebaked on a vacuum hot plate .
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Development of DUV resist formulations with excellent performance on metal substrates
These films were softbaked at 130°C for 60 seconds on a vacuum hot plate and exposed on a GCA XLS 7800 KrF 0.53 NA excimer laser stepper.
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