TABLE OF CONTENTS Coventor provides CoventorWare MEMS-specific software and a design methodology for MEMS device and system design. CoventorWare is effective at promoting first-pass manufacturing success, efficient for facilitating rapid convergence on an initial design, and provides an easy to use, seamless, integrated design environment that offers the most productive path to manufacturable MEMS. Its unique capabilities let designers explore MEMS design alternatives efficiently and converge on a device that has the highest probability of success without using computationally intensive FEM tools. Subsequently, CoventorWare can be used to perform FEM/BEM analysis on critical areas to fine-tune the MEMS device. The behavioural models, FEM/BEM analysis tools, and layout capabilities interface seamlessly.
CoventorWare is useful for MEMS experts and newcomers alike. Using CoventorWare, designers are guided to create a MEMS device quickly, then evaluate the MEMS device within the surrounding system to understand its behaviour, environmental effects, and the effects of control circuitry.
The four bundles that comprise CoventorWare are:
ARCHITECT
DESIGNER
ANALYZER , and
SYSTEM BUILDER
In the following subsections, we will present in more details these four tools.
ARCHITECT offers a schematic-driven system-level MEMS and microfluidics design environment plus the only simulator that includes fully coupled mechanical, optical, electronic, and fluidic simulation capabilities for evaluating the behaviour of a MEMS device within a surrounding system. Libraries of Coventor's proprietary parametric behavioural models of MEMS structures serve as building blocks to construct MEMS devices quickly in a...
