Semiconductor Manufacturing Handbook

SEMICONDUCTOR MANUFACTURING HANDBOOK

Hwaiyu Geng, CMFGE, PE Editor in Chief

Project Manager, Hewlett-Packard Company
Palo Alto, California

McGRAW-HILL
New York
Chicago
San Francisco
Lisbon
London
Madrid

Mexico City
Milan
New Delhi
San Juan
Seoul

Singapore
Sydney
Toronto

Cataloging-in-Publication Data is on File with the Library of Congress.

Copyright 2005 by The McGraw-Hill Companies, Inc.

All rights reserved. Printed in the
United States of America. Except as permitted under the United States Copyright Act of
1976, no part of this publication may be reproduced or distributed in any form or by any
means, or stored in a data base or retrieval system, without the prior written permission of the
publisher.

1 2 3 4 5 6 7 8 9 0 DOC/DOC 0 1 0 9 8 7 6 5

ISBN 0-07-144559-5

The sponsoring editor for this book was Stephen S. Chapman and the production supervisor
was Pamela Pelton. The art director for the cover was Anthony Landi. It was set in HBI
Design in Times Roman by International Typesetting and Composition.

McGraw-Hill books are available at special quantity discounts to use as premiums and sales
promotions, or for use in corporate training programs. For more information, please write
to the Director of Special Sales, Professional Publishing, McGraw-Hill, Two Penn Plaza,
New York, NY 10121-2298. Or contact your local bookstore.

Information contained in this work has been obtained by The McGraw-Hill Companies, Inc. ( McGraw-Hill ) from sources believed to be reliable. However, neither McGraw-Hill nor its authors guarantee the accuracy or completeness of any...

UNLIMITED FREE
ACCESS
TO THE WORLD'S BEST IDEAS

SUBMIT
Already a GlobalSpec user? Log in.

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

Customize Your GlobalSpec Experience

Category: Diaphragm Valves
Finish!
Privacy Policy

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.