Semiconductor Manufacturing Handbook
Written by international experts, this book will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations.
TABLE OF CONTENTS Semiconductor Manufacturing Handbook
ACKNOWLEDGMENTS
Semiconductor Manufacturing Handbook is a collective representation of an international community of scientists and professionals. Fifty-nine authors have contributed to this book. Many others from both industry and academia offered their suggestions and advice while I prepared and organized the book. I would like to thank the contributors who took time from their busy schedules and personal lives to share their wisdom and valuable experiences. Special thanks and appreciation go to the following individuals, organizations, and institutes for their advice, support, contributions, and/or for granting permission for the use of copyright materials:
| Dr. David N.K. Wang | Applied Materials |
| Dr. Nathan Cheung | UC-Berkeley |
| Dr. Yihlin Chan | OSHA |
| Dr. M. David Levenson | PennWell Publishing |
| Dr. Chris Mack | KLA-Tencor |
| Dr. Florian Solzbacher | University of Utah |
| Mr. Don Blair and his team | Agilent Technologies |
| Dr. Dietrich Toennies | SUSS MicroTech |
| Dr. Zhonglin Wang | Georgia Institute of Technology |
| Dr. Richard Paviotsky | Paviotsky and Associates |
| Dr. Bo Li | Intel Corporation Associates |
| SEMI | |
| SEMATECH | |
| Mr. Steve Chapman | McGraw-Hill |
| Pamela Pelton | McGraw-Hill |
| Carol Levine | McGraw-Hill |
Copyright The McGraw-Hill Companies, Inc. 2005 under license agreement with Books24x7
