Batch System (Single Chamber / Multiple Wafers) MEMS Processing Equipment

To complement our extensive range of Single and dual face lapping and polishing machines Lapmaster has introduced a new line of precision oscillating head polishing machines. Designated the LLCD series they are, primarily, Microprocessor controlled pad polishing machines specially designed for... [See More]

• Type: Batch; Continuous Web or Wire Coater; Inline or Semicontinuous
• Applications: Flat Panel Display; MEMS; Optical Coatings; Semiconductors; Magnetic storage

• Process: Polishing, Lapping, Planarizing
• Materials Processed: Metal; Silicon; Dielectric or Ceramic; Oxides; Glass Substrates