Integral Process Controller MEMS Processing Equipment

3 Results
Benchtop Plasma Cleaner -- PE-50 XL
from Plasma Etch, Inc.

As in all Plasma Etch systems a capacitive parallel plate design is used for the most effective plasma generation. Competitive units with glass/quartz barrel chambers cannot penetrate the vacuum containment vessel and therefore are restricted to inductive coupling using an RF coil wrapped around the... [See More]

  • Features: Controller; Capacitive Parallel Plate Design
  • Process: Plasma Etching and Cleaning
  • Type: Laboratory or Benchtop
  • Applications: MEMS; Photovoltaic or solar cell; Research / Surface Analysis; Semiconductors; Medical; Printed Circuit Boards
Precision Oscillating Head Polishing Machine -- LLCD Optical
from Precision Surfacing Solutions

To complement our extensive range of Single and dual face lapping and polishing machines Lapmaster has introduced a new line of precision oscillating head polishing machines. Designated the LLCD series they are, primarily, Microprocessor controlled pad polishing machines specially designed for... [See More]

  • Features: Controller; Automated loading or conveyor feeding (optional feature)
  • Process: Polishing, Lapping, Planarizing
  • Type: Batch; Continuous Web or Wire Coater; Inline or Semicontinuous
  • Applications: Flat Panel Display; MEMS; Optical Coatings; Semiconductors; Magnetic storage
High Vacuum MEMS Packaging Vacuum Furnace -- 3150
from Palomar Technologies, Inc

Overview. The SST 3150 is a high vacuum furnace that provides advanced packaging capabilities in vacuum levels as low as 10-7 Torr, and temperatures up to 500 °C (1000 °C optional). The clean-room compatible system may also be configured to allow for in situ separation of lid and package,... [See More]

  • Features: Controller
  • Process: Activating Getters, Sealing of Discrete MEMS Packages, and Brazing
  • Type: Free Standing System
  • Applications: MEMS