Factory / Free Standing MEMS Processing Equipment
from Palomar Technologies, Inc
Overview. The SST 3150 is a high vacuum furnace that provides advanced packaging capabilities in vacuum levels as low as 10-7 Torr, and temperatures up to 500 °C (1000 °C optional). The clean-room compatible system may also be configured to allow for in situ separation of lid and package,... [See More]
- Type: Free Standing System
- Applications: MEMS
- Process: Activating Getters, Sealing of Discrete MEMS Packages, and Brazing
- Chamber Size: Thermal Work Zone: 25 in2 (160 cm2); Work Surface Height: 37 in (95 cm) adjustable
from TSI Incorporated
This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer handling... [See More]
- Type: Free Standing System
- Applications: MEMS; Semiconductors
- Process: Chemical Vapor Deposition; Physical Vapor Deposition
from TSI Incorporated
This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom wafer calibration standards. Manual loading allows a wide range... [See More]
- Type: Free Standing System
- Applications: MEMS; Semiconductors
- Process: Chemical Vapor Deposition; Physical Vapor Deposition