Computer Interface Interferometers
from Zygo Corporation
The new ZYGO DynaFiz ® dynamic laser interferometer is a highly optimized optical instrument designed specifically for performing accurate metrology of optics in the presence of air turbulence and extreme vibrations. The high light efficiency of the DynaFiz ® interferometer's optical system,... [See More]
- Remote Interface: Computer Interface
- Repeatability: RMS Simple Repeatability < 0.06 nm; RMS Wavefront Repeatability < 0.35 nm
- Zoom: 1 to 50
- Measurement Capability: Specialty / Other; Designed Specifically for Performing Accurate Metrology of Optics in the Presence of Air Turbulence and Extreme Vibrations
from Micro-Epsilon Group
The IMS5400-DS absolute interferometer opens up new perspectives in industrial distance measurements. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer resolution at a relatively large offset distance. Compared to other absolute measuring optical... [See More]
- Remote Interface: Computer Interface
- Measurement Capability: Displacement / Position; Specialty / Other; Distance
- Resolution: 1.00
- Optical Configuration: NIR-SLED interferometer
from Zygo Corporation
ZYGO's Verifire ™ HD interferometer system provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront measurement of optical components and assemblies. The interferometric cavity length is precisely modulated while a high-speed camera captures several... [See More]
- Remote Interface: Computer Interface
- Repeatability: RMS Simple Repeatability < 0.06 nm; RMS Wavefront Repeatability < 0.35 nm
- Zoom: 1 to 50
- Measurement Capability: Profiles / Topography
from Micro-Epsilon Group
The IMS5600-DS absolute interferometer is used for distance measurements with maximum precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest... [See More]
- Remote Interface: Computer Interface
- Measurement Capability: Displacement / Position; Specialty / Other; Distance
- Resolution: 0.03
- Optical Configuration: NIR-SLED interferometer
from Zygo Corporation
The Verifire ™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks. This fully integrated... [See More]
- Remote Interface: Computer Interface
- Aperture Size: 300
- Zoom: 1 to 50
- Optical Configuration: Fizeau
from Micro-Epsilon Group
The IMS5420-TH absolute interferometer opens up new perspectives in the industrial thickness measurement of monocrystalline silicon wafers and silicon carbide wafers and comparable materials that are transparent for a wavelength range of 1,100 nm. Due to its broadband superluminescent diode, the... [See More]
- Remote Interface: Computer Interface
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Resolution: 1.00
- Optical Configuration: NIR-SLED interferometer
from Zygo Corporation
Precise vibration-robust interferometer system is easy to own, easy to use. ZYGO's Verifire ™ interferometer system provides fast high-precision measurements of plano or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Measure glass or plastic optical components... [See More]
- Remote Interface: Computer Interface
- Aperture Size: 102 to 152
- Zoom: 1 to 6
- Repeatability: RMS Simple Repeatability < 0.06 nm; RMS Wavefront Repeatability < 0.35 nm
from Micro-Epsilon Group
The IMS5420IP67-TH absolute interferometer is designed for industrial wafer thickness measurement in challenging environmental conditions such as wafer lapping. The IP67 controller with stainless steel housing provides stable signal quality for inline measurements of silicon wafers and air gaps. [See More]
- Remote Interface: Computer Interface
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Resolution: 1.00
- Optical Configuration: NIR-SLED interferometer
from Zygo Corporation
Aspheric optics enable significant benefits in the design and implementation of imaging, sensing and laser systems used in industries from defense & aerospace, semiconductor exposure and inspection systems and medical imaging systems. Production of aspheres that support these applications is... [See More]
- Remote Interface: Computer Interface
- Optical Configuration: Fizeau
- Measurement Capability: Aspheric Surfaces
from Micro-Epsilon Group
The innovative IMS5200-TH white light interferometer from Micro-Epsilon opens up new perspectives for fast and reliable thickness measurements of thin layers from 1 µm to 100 µm. The interferometers are used for high-precision thickness measurement of transparent single layers and multilayer... [See More]
- Remote Interface: Computer Interface
- Measurement Capability: Thickness; Specialty / Other; Thin layer thickness
- Resolution: 1.00
- Optical Configuration: White LED interferometer
from Piezosystem Jena, Inc.
Our Series SP-D double plane mirror interferometers are designed for incorporation into customer supplied systems, and are used for simultaneously making pairs of nanoprecision length measurements. The differences in these pairs of length measurements, and the separations between their two beams,... [See More]
- Remote Interface: Computer Interface
- Laser Type: HeNe
- Resolution: 1.00
- Laser Wavelength: 633
from Piezosystem Jena, Inc.
Our SP-Series miniature plane-mirror interferometers are precision length-measurement instruments designed for incorporation into customer-supplied systems, and are readily adapted to suit a wide variety of experimental setups and tasks. Their miniaturized sensor head allows their employment as... [See More]
- Remote Interface: Computer Interface
- Laser Type: HeNe
- Resolution: 1.00
- Laser Wavelength: 633
from Piezosystem Jena, Inc.
Our MI-Series miniature interferometers, equipped with triple-faceted retroreflectors, are precision length measurement instruments designed for incorporation into customer supplied systems, and are readily adapted to suit a wide variety of experimental setups and tasks. Their miniaturized sensor... [See More]
- Remote Interface: Computer Interface
- Laser Type: HeNe
- Resolution: 1.00
- Laser Wavelength: 633
from Piezosystem Jena, Inc.
Our triple-beam interferometers, which combine three interferometers in a single unit, and thus allow making simultaneous, nanometer precision, triaxial, length measurements, are intended for incorporation into customer supplied systems. Angles may be determined with high precision from the... [See More]
- Remote Interface: Computer Interface
- Laser Type: HeNe
- Resolution: 1.00
- Laser Wavelength: 633