Digital Interface Interferometers
from Micro-Epsilon Group
The IMS5400-DS absolute interferometer opens up new perspectives in industrial distance measurements. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer resolution at a relatively large offset distance. Compared to other absolute measuring optical... [See More]
- User Interface: Analog Control; Digital
- Measurement Capability: Displacement / Position; Specialty / Other; Distance
- Resolution: 1.00
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMS5600-DS absolute interferometer is used for distance measurements with maximum precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest... [See More]
- User Interface: Analog Control; Digital
- Measurement Capability: Displacement / Position; Specialty / Other; Distance
- Resolution: 0.03
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMS5420-TH absolute interferometer opens up new perspectives in the industrial thickness measurement of monocrystalline silicon wafers and silicon carbide wafers and comparable materials that are transparent for a wavelength range of 1,100 nm. Due to its broadband superluminescent diode, the... [See More]
- User Interface: Analog Control; Digital
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Resolution: 1.00
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMS5420IP67-TH absolute interferometer is designed for industrial wafer thickness measurement in challenging environmental conditions such as wafer lapping. The IP67 controller with stainless steel housing provides stable signal quality for inline measurements of silicon wafers and air gaps. [See More]
- User Interface: Digital
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Resolution: 1.00
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The innovative IMS5200-TH white light interferometer from Micro-Epsilon opens up new perspectives for fast and reliable thickness measurements of thin layers from 1 µm to 100 µm. The interferometers are used for high-precision thickness measurement of transparent single layers and multilayer... [See More]
- User Interface: Analog Control; Digital
- Measurement Capability: Thickness; Specialty / Other; Thin layer thickness
- Resolution: 1.00
- Optical Configuration: White LED interferometer