Thickness Interferometers
from Micro-Epsilon Group
The IMS5420-TH absolute interferometer opens up new perspectives in the industrial thickness measurement of monocrystalline silicon wafers and silicon carbide wafers and comparable materials that are transparent for a wavelength range of 1,100 nm. Due to its broadband superluminescent diode, the... [See More]
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Optical Configuration: NIR-SLED interferometer
- Resolution: 1.00
- User Interface: Analog Control; Digital
from Micro-Epsilon Group
The IMS5420IP67-TH absolute interferometer is designed for industrial wafer thickness measurement in challenging environmental conditions such as wafer lapping. The IP67 controller with stainless steel housing provides stable signal quality for inline measurements of silicon wafers and air gaps. [See More]
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Optical Configuration: NIR-SLED interferometer
- Resolution: 1.00
- User Interface: Digital
from Micro-Epsilon Group
The IMP TH45 is a thickness sensor for interferometer measurements with a 45 mm ±3.5 mm working distance and a thickness measuring range of 0.035 to 1.4 mm. It provides a 10 µm light spot and is suitable for flat glass, films and thin layers. [See More]
- Measurement Capability: Thickness; Specialty / Other; Thickness
- Operating Temperature: 41 to 158
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMP TH70 is a thickness sensor for interferometer measurements with a 70 mm ±2.1 mm working distance and a thickness measuring range of 0.035 to 1.4 mm. It provides a 5 µm light spot and is intended for measurements from a large offset distance. [See More]
- Measurement Capability: Thickness; Specialty / Other; Thickness
- Operating Temperature: 41 to 158
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMP-NIR-TH24 is a wafer thickness sensor with a 24 mm ±3.0 mm working distance, a 21 to 27 mm operating range and a measuring range of 50 µm to 1.05 mm for silicon and 0.2 to 4 mm for air gaps. It provides a 15 µm light spot for precise inline wafer measurements. [See More]
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Operating Temperature: 50 to 122
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMP-NIR-TH3/90/IP68 is a compact right-angle wafer thickness sensor with a 3 mm working distance, a 1 to 6 mm operating range and IP68 protection. The sensor integrates a 4 m optical fiber and an air purge system for stable inline wafer measurements. [See More]
- Measurement Capability: Thickness; Specialty / Other; Wafer thickness
- Operating Temperature: 50 to 122
- Optical Configuration: NIR-SLED interferometer
from Micro-Epsilon Group
The IMS5400-TH absolute interferometer opens up new perspectives in industrial thickness measurements. The interferometer is used for highly accurate thickness measurements from a relatively large distance. The large thickness measuring range allows the measurement of thin layers, flat glass and... [See More]
- Measurement Capability: Thickness; Specialty / Other; Thickness
- Optical Configuration: NIR-SLED interferometer
- Resolution: 1.00
- User Interface: Analog Control; Digital
from Micro-Epsilon Group
The innovative IMS5200-TH white light interferometer from Micro-Epsilon opens up new perspectives for fast and reliable thickness measurements of thin layers from 1 µm to 100 µm. The interferometers are used for high-precision thickness measurement of transparent single layers and multilayer... [See More]
- Measurement Capability: Thickness; Specialty / Other; Thin layer thickness
- Optical Configuration: White LED interferometer
- Resolution: 1.00
- User Interface: Analog Control; Digital