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  • Thermography of Microsystems
    cryogenic actuators; 4) characterization of temperature distribution on semiconductor gas sensors.
  • Trace Impurities in Ultra-High-Purity and Specialty Gases
    Many applications require very high purity, inert gases to blanket hazardous chemicals or as protective atmospheres. The electronics and semiconductor industries use ultra-high purity specialty gases as part of the production process for each of these applications, there are several contaminants
  • How Does a Flow Meter Work?
    A flow meter works by measuring the amount of a gas, liquid or steam that passes through or around the flow meter sensors. While flow meter sensors work in many different ways, the end goal is the same: Deliver the most accurate and repeatable flow measurements for the specific application, whether
  • Hydrogen Monitoring of CVD Process Tools
    Hydrogen and the hazards of hydrogen leaks are present in many areas of semiconductor manufacturing facilities. While the basic need to continuously monitor hydrogen leaks is clear, the proper selection and placement of hydrogen sensors requires careful consideration. Hydrogen, the lightest
  • A Modular Approach to Process Analysis
    by the successful use of modular sampling systems and manifolds for the analysis of ultra-pure gases in the semiconductor industry, have launched a major effort to define and adopt a new generation of modular process analyzer sampling systems, sensors, connectivity (communication between the sensor
  • Understanding Capillary Tube Thermal Mass Flow Meters & Controllers:
    market. The advantages of accuracy, compactness, reliability, and cost-effectiveness continue to make capillary tube thermal instruments the choice for monitoring and controlling smaller mass flow rates of clean gases in general industry and in the fabrication of semiconductor devices. The primary

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