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Supplier: Rigaku Corporation
Description: system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Optional Sweeping TXRF software enables mapping of the contaminant distribution over the
- Maximum Wafer / Part Size: 150.00000000000003 to 300.00000000000006 mm
- Measurements: Area Mapping, Particle Contamination
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: JST Manufacturing, Inc.
Description: JST's 300 CLV Cleaner and Stripping Tool is a completely self contained, dry to dry unit designed for cleaning and stripping wafers, optics, disk drives, flat panels and other delicate parts. Just place the product into the dry tank, process through either single or multiple chemical
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Supplier: Rigaku Corporation
Description: system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Integrated VPD capability enables automatic VPD preparation of one wafer while a TXRF
- Maximum Wafer / Part Size: 150.00000000000003 to 300.00000000000006 mm
- Measurements: Area Mapping, Particle Contamination
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: U.S. Plastic Corporation
Description: Praher K6 thermoplastic wafer check valves are available in sizes 2" though 8" with maximum operating pressure of 150 psi at 72 F, non-shock. The valve does not require a spacer for full disc opening performance in SCH 80 pipes. Valves have a single disc design suitable for horizontal
- Valve Size: 8 inch
- Valve Type: Check Valves
- Primary Material: PVC
- Features: Wafer / Split Disc Check Valves
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Supplier: 3X Ceramic Parts Company Limited
Description: system DOA equipment integrated wafer loading & unloading, unloading the wafers from the Ceramic boat to the cassette or loading the wafers from the cassette to the ceramic boat. Available for double back-to-back wafers in one slot which realize single side
- Density: 5.99999621323765 g/cc
- Thermal Conductivity: 2.5 W/m-K
- MOR / Flexural Strength: 116,029.4714857576 psi
- Compressive / Crushing Strength: 290,073.678714394 psi
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Supplier: 3X Ceramic Parts Company Limited
Description: φ150mm ) silicone wafer , thickness 675 um . They want this part in 99% alumina ceramic . We don’t have the standard wafer boats for customer wafer size , but we custom made it . Before this projects , we have made a 99% alumina horizontal wafer boat , it is for
- Material Type: Carbide Materials, Silicon Carbide
- Shape / Form: Fabricated / Custom Shape
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Supplier: Jiangyin Deli Laser Solutions Co., Ltd.
Description: Closed-loop water cooling X-axis cutting speed: ≤600mm/s Applicable wafer sizes: 2, 4, or 6 inches Cutting line width: <15μm@ 40μm grooving depth Dicing street width: ≥30μm Processing method: Automatic single-axis processing via front-side or backside cutting Imaging system: Coaxial
- Laser Output Power: 0 to 5 watts
- Type: Complete / Turnkey System
- Laser Operation: Laser Cutting
- Options / Components: Laser Head / Focusing Unit, Laser Optics / Beam Delivery, Laser System Enclosure, Monitoring Sensors / System
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Supplier: ASTM International
Description: wafers must be used as calibration wafers. The practice may also be extended to the calibration of SSISs intended to inspect other materials, such as gallium arsenide or other compound semiconducting compounds, in which case, clean, unpatterned, polished wafers of the
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Supplier: Wafer World, Inc.
Description: Characteristics Materials: Clean Room Diameter: 150.0 Type: Round Dopant: Single Wafer Shipper Orientation: lid/base/spring Thickness-actual: Holds 1 Wafer Grade: Clean Room Misc Info. Growth Method: ePak Lot Size: 10
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Supplier: ASTM International
Description: generation of excess carriers with a light pulse is determined by monitoring the microwave reflectivity of the wafer. Since no contact is made to the specimen, this test method is nondestructive. If wafer cleanness is maintained, wafers may be further processed following testing
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Supplier: ASTM International
Description: This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers the quantitative determination of elemental areal density on the surface of polished single crystal silicon substrates using total reflection X-ray fluorescence spectroscopy (TXRF) with a monochromatic
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Supplier: Technic, Inc.
Description: Low cost wet bench design for R&D and low volume applications. Same basic cell and wafer holder design as used on our highly successful SEMCON 1500 and 2000 series. Tool features a single plating cell and dragout rinse cell. Plating and electroforming of wafers or discrete
- Process / Technology: Electroplating
- Machinery Type: Laboratory / Pilot System
- Application / Industry: Semiconductor / Wafer
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Supplier: Rigaku Corporation
Description: system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Optional Sweeping TXRF software enables mapping of the contaminant distribution over the
- Maximum Wafer / Part Size: 200 mm
- Measurements: Area Mapping, Particle Contamination
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: Rigaku Corporation
Description: The Rigaku MFM65 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to
- Maximum Wafer / Part Size: 200 to 300.00000000000006 mm
- Measurements: Composition, Particle Contamination, Roughness / Waviness, Thickness - Film / Layer
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: Gems Sensors & Controls
Description: Low Particle Generation-One piece Molded Design Corrosion Resistant 1 to 4 Actuation Levels in a Single Unit Lengths to 24" (610 mm) Applications: Semiconductor Process Equipment Pure Chemical Delivery System Wafer Cleaning and Etching Systems Cabinet Leak Sensing
- Number of Switch Points: 1 to 4 (#)
- Maximum Operating Pressure: 50 psi
- Material Temperature Range: -40 to 250 F
- Features: Electromechanical Switch, Normally Closed (NC), Normally Open (NO), Single Pole, Single Throw (SPST)
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Supplier: Technic, Inc.
Description: Technic Predip 470 is a single additive pre-treatment process which minimizes silver immersion deposits on copper/copper alloy substrates prior to silver plating.
- Type: Pretreatment / Conditioner, Surface Treatment
- Industry Applications: Semiconductor Wafer / Cleanroom
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Supplier: Technic, Inc.
Description: processes, which handle a single cassette of (25) wafers at a time up to 200mm diameter. The tool handles cassettes “dry in” and “dry out”. The wafer cassettes are manually presented and removed to the tool loading / unloading port. Each cassette is loaded into a sliding drawer
- Machinery Type: Automated System
- Process / Technology: Electroplating
- Application / Industry: Semiconductor / Wafer, Solar / Photovoltaic
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Supplier: CoorsTek
Description: Focus/edge rings are designed to improve etch uniformity around the wafer edge or perimeter. When used with an electrostatic chuck (e-chuck), the wafer rests on the edge focus ring - held in place by the electrostatic charge. ADVANCED CERAMIC COMPONENTS CoorsTek advanced, high-purity
- Features: Alumina / Aluminum Oxide, Carbide Materials, Specialty Ceramic
- Specialty Ceramic Type: Aluminum Nitride, Silicon Carbide, Yttria
- Applications: Chemical / Materials Processing
- Shape / Form: Fabricated / Custom Shape
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Supplier: Fastener SuperStore, Inc.
Description: 12 X 1 Self-Drilling Screws / Phillips / Wafer Head / #3 Point / Steel / Zinc Type BSD: A tapping screw with spaced threads and a drill point which drills its own hole. Type CSD: A wafer head thread forming screw with machine screw thread pitch and a drill point which drills its own
- Length: 1 inch
- Inch: # 12
- Features: Other
- Standard Drives: Philips / Frearson
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Supplier: TSI Incorporated
Description: of substrates to be deposited including 150 mm, 200 mm, and 300 mm wafers, supporting of all of your wafer metrology applications and improving product yield. The Model 2300G3M Particle Deposition System offers best-in-class performance for deposition of particle size standards
- Waveform: Other Predefined
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Supplier: TSI Incorporated
Description: of substrates to be deposited including 150 mm, 200 mm, and 300 mm wafers, supporting of all of your wafer metrology applications and improving product yield. The Model 2300G3M Particle Deposition System offers best-in-class performance for deposition of particle size standards
- Waveform: Other Predefined
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Supplier: HORIBA Instruments, Inc.
Description: The CS-137 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use BHF solution to etch silicon oxide and remove particles from the wafer surface. The CS-137 continually monitors each
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Supplier: Rubicon Technology
Description: Rubicon’s sapphire epi-polished wafers are ultra-flat, super clean, stress-free large diameter substrates, offered with precision orientations and offsets and wafer-to-wafer uniformity, with one or both surfaces finished. These sapphire wafers are custom designed
- Width / O.D.: 7.87402 inch
- Features: Dielectric Ceramic, Electroceramics (Electrical and Electronic Ceramics), Optics / Optical Grade
- Material Type: Sapphire
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Supplier: HORIBA Instruments, Inc.
Description: The CS-153 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use FPM solution to etch silicon oxide and remove particles from the wafer surface. The CS-153 continually monitors each
- Process Media Temperature: 68 to 176 F
- Operating Temperature: 68 to 77 F
- Electrical Output: Analog Current Output, Switch / Alarm Relay Output
- Display Type: Digital Display
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Supplier: HORIBA Instruments, Inc.
Description: The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an
- Number of Digits: 4
- Width: 96 mm
- Height: 96 mm
- Depth: 115 mm
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Supplier: HORIBA Instruments, Inc.
Description: The CS-153N is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use HF/HNO3 solution to etch silicon oxide and remove particles from the wafer surface. The CS-153N continually monitors each
- Process Media Temperature: 68 to 176 F
- Operating Temperature: 68 to 77 F
- Electrical Output: Analog Current Output, Switch / Alarm Relay Output
- Display Type: Digital Display
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Supplier: Quantum Devices, Inc.
Description: Quantum Devices offers the ability to customize a planar silicon photodiode with either single or multiple diode structures on a single chip. This configuration is a p-on-n structure and can be used to detect the presence and absence of minute quantities of light. The linearity of this
- Photodiode Type: PN Photodiode
- Photodiode Material: Silicon
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Supplier: Valcor Engineering Corporation
Description: direction of flow for bubble tight sealing. Applications The SV11, SV12 series are suitable for a broad range of light industrial applications. Typical applications include: Vacuum pumps Water analysis Wafer cleaning for semiconductor industries Waste/drain valve Features Direct acting,
- Valve Size: 0.25 inch
- Pressure Rating: 1,000 psi
- Number of Ports/Ways: 2
- Power: 10 to 15 volts
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Supplier: ASTM International
Description: 1.1 This test method covers the determination of total sodium, aluminum, and potassium on the surface of mirror-polished single crystal silicon and silicon epi substrates using secondary ion mass spectrometry (SIMS). This test method measures the total amount of each metal, because this test
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: environment. This integration ensures that chemicals remain in a controlled, ultra-clean state from the moment they enter the facility until they reach the wafer. The result is a highly reliable manufacturing process that prioritizes purity, repeatability, and environmental safety.
- Body Material: Stainless Steel
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: Precision Stainless Steel Valve Manifold Panel for Inert Gas Distribution in Cleanroom Manufacturing Environments The Precision Stainless Steel Valve Manifold Panel (VMP) is a specialized solution designed for the efficient and clean distribution of inert gases within high-tech manufacturing
- Application: Gas
- Body Material: Stainless Steel
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: changeovers between supply barrels to ensure the manufacturing process never runs dry. Chemical Delivery/Dilution (CDM) Before reaching the wafer, many organic chemicals require precise mixing. The CDM automates this by blending concentrated solvents with DI water or other additives. By using
- Body Material: Stainless Steel
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: Manifold Boxes (VMB), Chemical Dispensing Units (CDU), and specialized Filling Equipment, all working together to ensure a safe, contamination-free environment. Valve Manifold Boxes (VMB) The VMB acts as the central traffic controller for chemical distribution. It takes a single supply line
- Body Material: Stainless Steel
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Featured Products Top
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Product Overview Used in plasma etch chambers, CVD systems, and ion implantation equipment for wafer clamping and lift-pin support during processing. Fountyl silicon carbide wafer pin chucks integrate the clamping surface and lift pins into a single high-purity sintered (read more)
Browse Wafer Chucks Datasheets for Fountyl Technologies Pte. Ltd. -
3. Easy to clean 4. Strong impact resistance 5. Slip Free Different Models of ceramic wafer boat : The semiconductor manufacturing industry typically (read more)
Browse Silicon Carbide and Silicon Carbide Ceramics Datasheets for 3X Ceramic Parts Company Limited -
Product Overview Used in plasma etch chambers, CVD systems, and PVD equipment for wafer clamping and backside gas cooling. Fountyl high-precision ring groove ceramic chucks feature machined concentric groove patterns on the wafer-facing surface. These grooves distribute (read more)
Browse Wafer Chucks Datasheets for Fountyl Technologies Pte. Ltd. -
Every wafer in a semiconductor fab is handled — picked, placed, transferred — by a robot end effector. It is the single point of contact between the automation system and the product. For decades, aluminum has been the standard material. But as wafer sizes grew and critical (read more)
Browse Industrial Ceramic Materials Datasheets for Fountyl Technologies Pte. Ltd. -
Semiconductor manufacturing demands extreme precision, cleanliness, and reliability at every stage of production. In these ultra-clean environments, even microscopic contamination can lead to costly defects and reduced yield. Douglas Electrical Components provides advanced hermetic electrical (read more)
Browse Feedthroughs Datasheets for Douglas Electrical Components -
Introduction Multi-cartridge filter housings are critical components in semiconductor manufacturing, designed to accommodate multiple filter cartridges within a single vessel for high-purity liquid (read more)
Browse Filter Housings Datasheets for Harbory Filtration -
Unique single-module 3-axis precision motion platform PI (Physik Instrumente), a leader in precision motion control, has introduced the A-361 air-bearing XY-rotation stage, a compact nanopositioning platform engineered for ultra-high precision and stability in demanding research and (read more)
Browse Rotary Tables Datasheets for PI (Physik Instrumente) L.P.
Conduct Research Top
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
must go to Xerox, but license can be terminated SEZ, Samsung to develop 300-mm single-wafer etch, cleaning Vitesse's 6-inch GaAs wafer fab receives ISO 9000 certification Trillian makes headway on Linux for Intel's Merced David Lam joins board of
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
Commentary & analysis of week's chip news Japan's Ulvac rolls out wafer cleaning system METHUEN, Mass. -- Ulvac Technologies Inc. here has expanded its semiconductor equipment portfolio, announcing a new, low-cost cleaning system for 6- and 8-inch wafer fab applications. The new system, dubbed
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
that Paul Jacobs and Steven Altman have officially assumed their roles as the company's chief executive and president, respectively. Applied completes acquisition of single-wafer immersion technology Applied Materials has completed the acquisition of single-wafer immersion technology and Marangoni
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
the acquisition of single-wafer immersion technology and Marangoni clean/dry intellectual property from SCP Global Technology. Two class action suits filed against Intel, according to report Two owners of computers with Intel Corp. microprocessors have filed separate class action suits against the chip
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An Innovative Cabling Concept Improves Reliability for Multi-Axis Stage Systems
up to 4 separate cables (with diameters of 8 to 14 mm). And up to 27 electrical wires must be connected. Wafer inspection systems in the semiconductor industry typically consist of a stack of XYZ linear stages plus a theta rotary unit. So there can easily be perhaps 16 connectors at the final
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A Microfluidic System for Biological Particle Enrichment Using Contactless Dielectrophoresis
that demonstrates the enrichment. abilities and rapid fabrication advantages of the cDEP. technique. A microfluidic device was fabricated by creating. a polydimethylsiloxane (PDMS) mold of a silicon master. produced by a single-mask photolithographic process. This. device has shown the ability of cDEP
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Designing Atmospheric-Pressure Plasma Sources for Surface Engineering of Nanomaterials
the silicon. wafer and cured for 45 min at 1001C. Upon cooling, the. PDMS mold was peeled from the master stamp, fluidic. connections were punched using 1.5 mm hole punchers. (Harris Uni-Core, Ted Pella, Redding, CA, USA) and excess. PDMS was cut off. The PDMS mold was then bonded to. cleaned 3 3 cm
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MSilica Nanoparticles Treated by Cold Atmospheric-Pressure Plasmas Improve the Dielectric Performance of Organic-Inorganic Nanocomposites
Fabrication. Experimental devices were fabricated using standard soft. lithography techniques [45]. First, AZ 9260 (AZ Electronic. Materials, Somerville, NJ, USA) photoresist was spun onto a. clean /100S silicon substrate. The wafer was exposed to UV. light for 60 s through a mask patterned
More Information Top
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Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications Complete Document
The biggest change has occurred since 2000; single wafer cleaning gradually replac- ing batch tools for critical applications.
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Microelectronic Applications of Chemical Mechanical Planarization
16.2.2 Single Wafer Cleanings , 469 .
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Reliability improvement of Cu/low-k interconnects by integrating novel single pass single wafer wet clean
Abstract – A novel solvent-based single wafer clean process with megasonic feature and single pass fresh solvent spray has been developed.
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A high performance drying method enabling clustered single wafer wet cleaning
Clustered single wafer cleaning eliminates timing variations, thereby reducing the standard deviation of the process control parameters.
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Chemistry in Microelectronics
Single wafer cleaning chamber with shield plate to provide purged environment near wafer surface [IMA 09] .
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Influence of Ammonia Gas Ambient in IPA Drying Process of the Single Wafer Cleaning System
• Influence of Ammonia Gas Ambient in IPA Drying Process of the Single Wafer Cleaning System p.231 .
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Defects of Silicon Substrates Caused by Electro-Static Discharge in Single Wafer Cleaning Process
• Defects of Silicon Substrates Caused by Electro-Static Discharge in Single Wafer Cleaning Process p.185 .
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Application of Single-Wafer Wet Cleaning Prior to Epitaxial SiGe Process
• Defects of Silicon Substrates Caused by Electro-Static Discharge in Single Wafer Cleaning Process p.185 .
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