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  • Advancements in linear piezoelectric actuator mechanisms
    Fig.7 Slow speed mode of Nexline® actuator N-214: trace1= 5µm slope within 5s, trace 2= position error from straight line 10nm/DIV Linear piezoelectric actuator mechanisms can be designed for high and ultra high vacuum conditions.
  • Nanoscale Synthesis and Characterization Laboratory Annual Report 2005
    This project developed two high bandwidth short-stroke rotary fast tool servos and a hybrid rotary/ linear electromagnetic actuator that one of them uses. .... A fast tool servo (FTS) is a high- speed auxiliary servo axis that is added to a diamond turning machine ( ultra -precision lathe) to allow generating free-form non-axisymmetric or textured surfaces on a workpiece.
  • Journal of Propulsion and Power > Combined Wake and Pulsed-Jet Effects on Separation on a Turbine Airfoil
    [15] Zhang, X. F., and Hodson, H. P., “Effects of Reynolds Number and Freestream Turbulence Intensity on the Unsteady Boundary Layer Development on an Ultra - High -Lift Low Pressure Turbine Airfoil … ance of a LP Turbine Linear Cascade with Variable Solidity … X. F., Vera, M., Hodson, H., and Harvey, N., “Separation and Transition Control on an Aft-Loaded Ultra-High-Lift LP Turbine Blade at Low Reynolds Numbers: Low- Speed Investigation,” Journal of … and Thomas, F., “Plasma Actuators for Separation Control on…
  • In-plane deeply-etched optical MEMS notch filter with high-speed tunability
    …and Turner K L 2002 Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor Sensors Actuators A 102 139–50 [15 … Stewart J B 2005 High - speed wavefront control using MEMS … al 2013 High-speed ultra -broad tuning MEMS- VCSELs .... 8763 87630H [18] Younis M I 2011 MEMS Linear and Nonlinear Statics and Dynamics vol 20 (Berlin…
  • Ultra-Compact, Zero-Power Latching Linear Motor with Integrated Position Sensor for Portable Electronics
    In this paper, we report the design, fabrication and characterization of an ultra -compact, large- stroke with high -precision and fast- speed , zero- power magnetic latching piezoelectrically actuated linear motor as shown in Fig. 1(a). .... etc. Fig. 1(b) shows a typical camera module adopting the proposed linear actuator for the cellular…
  • Model predictive control of precision stages with nonlinear friction
    Abstract— In the manufacturing industry especially in the semiconductor, the requirement for high- speed , fast-response and high -precision performances is critical. .... In this paper, the model predictive control is introduced to the positioning control of ultra -precision stage driven by a linear actuator .
  • Predictive control of piezoelectric actuators with friction drive mechanism
    Computing speed of hardware is now so fast that the control can be introduced to the system with high -control bandwidth such as the automobile industry and the manufacturing industry. .... In this paper, the model-based control strategy is intro- duced to the positioning control of ultra -precision stage driven by a piezoelectric linear actuator .
  • Renishaw Mini Readhead Fits into the Tightest Spots
    The new RGH34 readhead measures just 0.63x0.63x0.35 in. (15x15x8.8 mm), yet delivers state-of-the-art performance, operating at speeds up to 48 ft (15 m)/second with resolutions as high as 0.2µ. .... Typical applications include size-sensitive, high-precision linear motion applications such as microstages, microscopes, and ultra -small linear actuators .
  • OSA | Coupled-cavity ring-down spectroscopy technique
    ○ Measurement of angular deviation in ultra - linear mirror actuators for scanning high finesse resonators. .... ○ Diode-Laser-Based Sum and Difference Frequency Generation for High- Speed UV and MIR Absorption Spectroscopy .
  • OSA | Real-time FPGA data collection of pulsed-laser cavity ringdown signals
    ○ Measurement of angular deviation in ultra - linear mirror actuators for scanning high finesse resonators. .... ○ Diode-Laser-Based Sum and Difference Frequency Generation for High- Speed UV and MIR Absorption Spectroscopy .