Products & Services
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Supplier: Park Systems, Inc.
Description: The XE-WAFER is a fully automated industrial AFM designed specifically to address surface roughness, trench width, depth, and angle measurements on 200mm & 300mm wafers in a production environment. The system provides superior accuracy and precision nanometrology over any other system
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Measurement Capability: Critical Dimension / Trench Geometry, Defects / ADC, Roughness / Waviness
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: Technic, Inc.
Description: Designer for laboratory testing and sampling, Technic’s portable tabletop wafer plating test cell features all the tools needed to simulate full scale production. Specifications 16” long, 12” wide, 14” deep constructed from
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Measurement Capability: Electrical Test - Wafer Sort / Functional
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Supplier: Hitachi High Technologies America, Inc.
Description: The wafer surface inspection system LS series can detect defects on unpatterned wafers with a mirror-finished surface. Applied technology of laser scattering achieves high sensitivity and high throughput detection of small contaminants and various types of defects on wafer
- Form Factor: Wafer Probing System
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: Palomar Technologies, Inc
Description: Overview The SST 1500 is a manually operated wafer aligner capable of aligning wafer sizes to 8-inch (200 mm) diameter. This clean-room compatible aligner includes two CCD cameras mounted on microscope zoom lenses and connected to a split-screen 17-inch LCD monitor. Fiber optic
- Form Factor: Other
- Maximum Wafer / Part Size: 100 to 200 mm
- Measurement Capability: Other
- Mounting / Loading: Other
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Supplier: Rigaku Corporation
Description: XY? sample stage system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Optional Sweeping TXRF software enables mapping of the contaminant distribution
- Applications: Semiconductor Wafers
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 150 to 300 mm
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Supplier: Rigaku Corporation
Description: Rigaku's WaferX 300 represents the culmination of 25 years of experience in the X-ray fluorescence analysis of thin films on silicon wafers. Specifically developed as an in-process metrology tool, the system incorporates "bridge tool" technology — servicing 6", 8", as well as the
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 150 to 300 mm
- Measurement Capability: Composition, Thickness - Film / Layer
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Supplier: Rigaku Corporation
Description: XY? sample stage system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Integrated VPD capability enables automatic VPD preparation of one wafer
- Applications: Semiconductor Wafers
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 150 to 300 mm
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Supplier: Nikon Metrology
Description: The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System, Other
- Maximum Wafer / Part Size: 200 mm
- Measurement Capability: Defects / ADC
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Supplier: MicroSense, LLC
Description: Automated Thickness measurement system IR interferometry probe technology. Single or dual probes. Manual Loading 0.5um accuracy. 0.1um resolution Wafer 4" to 12" (100 to 300mm) round or square Thickness range: 20um to 1mm Flexible recipe
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 100 to 300 mm
- Measurement Capability: Shape / Flatness, Thickness - Wafer / Disc (TTV)
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Supplier: MicroSense, LLC
Description: Automated Thickness measurement system Cassette to cassette or manual loading. Patented sensing technology with APBP (dual automated positioning backpressure probes). Manual Loading 20mm resolution Wafer 2" to 12" (50 to 300mm) round or square
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 50 to 300 mm
- Measurement Capability: Shape / Flatness, Thickness - Wafer / Disc (TTV)
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Supplier: MicroSense, LLC
Description: Automated Wafer Thickness Measurement System Cassette to cassette or manual loading. Exclusive sensing technology with dual White light chromatic coding probes (10nm resolution) Wafer 4” to 12” (100 to 300mm) Thickness range: 50um to 3mm
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 100 to 300 mm
- Measurement Capability: Roughness / Waviness, Thickness - Wafer / Disc (TTV)
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Supplier: MicroSense, LLC
Description: The SigmaTech UltraMap-TSV system is the world’s first fully automated TSV and deep trench metrology system capable of characterizing TSV and deep trench features from both the front and back sides of the wafer—up to 300mm in diameter. The UltraMap-TSV system can be offered in
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Measurement Capability: Critical Dimension / Trench Geometry, Other
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: Filmetrics, Inc.
Description: Product-Wafer Metrology Made Affordable Process engineers want film thickness measurements fast and without a lot of hassle. Our innovative Thickness Imaging™ technology allows Filmetrics to offer easy recipe set up and industry-leading throughput, at a mere fraction of the cost
- Applications: Semiconductor Wafers, CVD / PVD Films
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Mounting / Loading: In-situ / System Mounted
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Supplier: G.I.E. Inc.
Description: FEATURES1. Face to Face dimensions as per as perANSI B16.10150# Narrow / EN558-2 Series 20.2. Suitable for mounting betweenANSI B16.5 150#flanges3. Testing as perAPI 598 / EN12266-14. Stem connection and integrated actuator mountingflange as perISO5211.5. Spring loaded stem seal.6.
- Actuation: Manual / Hand, Pneumatic
- Media: Water
- Number of Ports/Ways: 2
- Primary Material of Construction: Cast Iron
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Supplier: Accuris
Description: Rotary Wafer Switches (Low Current Rating) Part 6: Rotary Wafer Switches with Printed Wafers; Maximum 12 Positions; Maximum Mounting Dimension 45 mm
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Supplier: Accuris
Description: Rotary Wafer Switches (Low Current Rating) Part 3: Rotary Wafer Switches with Two-Hole Mounting (Supplement A-1965)
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Supplier: Accuris
Description: Rotary Wafer Switches (Low Current Rating) Part 2: Rotary Wafer Switches with Central Mounting (Supplement A-1965)
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Supplier: Watts
Description: Series DBF-04 Wafer Style Butterfly Valves are used in HVAC, irrigation, OEM, commercial, and institutional applications and wherever positive shutoff is required to control the flow of liquids, gases, and slurries. It features cast iron body construction, stainless steel shaft,
- Media: Water
- Valve Size: 2 to 12 inch
- Valve Type: Butterfly Valves
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Supplier: Watts
Description: Series BF-04 Wafer Style Butterfly Valves are used in HVAC, irrigation, OEM, commercial, and institutional applications and wherever positive shutoff is required to control the flow of liquids, gases, and slurries. It features cast iron body construction, stainless steel shaft,
- Media: Water
- Valve Size: 2 to 12 inch
- Valve Type: Butterfly Valves
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Supplier: Advanced Energy Industries, Inc.
Description: A field-proven solution for any dual-magnetron sputtering application with additional capabilities facilitating advanced process innovation. Achieve higher deposition rates with a more stable process through advanced ARC management Tune your process with variable frequency and duty cycle Tailor to
- Applications: Semiconductor Wafers, Other
- Form Factor: Controller
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: Filmetrics, Inc.
Description: -board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling. The different F60-t instruments are distinguished primarily by thickness and wavelength range. Generally
- Applications: Semiconductor Wafers, CVD / PVD Films
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Mounting / Loading: In-situ / System Mounted
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Supplier: Filmetrics, Inc.
Description: include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling. The different F60-c instruments are distinguished primarily by
- Applications: Semiconductor Wafers, CVD / PVD Films
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Mounting / Loading: In-situ / System Mounted
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Supplier: Cascade Microtech, Inc.
Description: Sub-micron resolution, precise motion control, and 8-inch travel
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 200 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: Cascade Microtech, Inc.
Description: Built-in anti-vibration support
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 300 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: Cascade Microtech, Inc.
Description: Sub-micron resolution, precise motion control, and 8-inch travel
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 200 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: Accuris
Description: Rotary Wafer Switches (Low Current Rating) Part 4: Rotary Wafer Switches with Central Mounting; Maximum 12 Positions; Maximum Diameter 40 mm
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Supplier: U.S. Plastic Corporation
Description: Praher K6 thermoplastic wafer check valves are available in sizes 2" though 8" with maximum operating pressure of 150 psi at 72 F, non-shock. The valve does not require a spacer for full disc opening performance in SCH 80 pipes. Valves have a single disc design suitable for horizontal and
- Material of Construction: PVC
- Valve Size: 6 inch
- Valve Type: Wafer / Split Disc Check Valves
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Supplier: Precision Surfacing Solutions
Description: 4” - 12” Wafer Diameter Capacity. Process up to two (2) wafers simultaneously or choose insitu pad conditioning. Compact, space-efficient systems. True CMP processing without a CMP system price. Can be used on Semiconductor, Compound
- Applications / Materials Abraded: Plastics / Composites, Semiconductors / Electronics
- Automation: Automatic / Indexing, PLC
- Mounting: Floor Mounted / Stationary (Machine Tools)
- Spindle Orientation / Options: Vertical
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Supplier: Precision Surfacing Solutions
Description: 4” - 12” Wafer Diameter Capacity. Process up to two (2) wafers simultaneously or choose insitu pad conditioning. Compact, space-efficient systems. True CMP processing without a CMP system price. Can be used on Semiconductor, Compound
- Applications / Materials Abraded: Plastics / Composites, Semiconductors / Electronics
- Automation: Automatic / Indexing, PLC
- Mounting: Floor Mounted / Stationary (Machine Tools)
- Spindle Orientation / Options: Vertical
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Supplier: Filmetrics, Inc.
Description: Integrated Spectrometer/Light Source Unit Fiber optic cable 4", 6" and 200mm Reference Wafers TS-SiO2-4-7200 Thickness standard Vacuum Pump Spare TH-1 lamp Tweezers
- Applications: Semiconductor Wafers, CVD / PVD Films
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Mounting / Loading: In-situ / System Mounted
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Supplier: SemiProbe
Description: 150 mm system that meets their precise specifications and requirements. The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe's patented adaptive architecture. Unlike traditional probe systems, all foundation modules - bases, stages, chucks,
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 150 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: SemiProbe
Description: 300 mm system that meets their precise specifications and requirements. The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe's patented adaptive architecture. Unlike traditional probe systems, all foundation modules - bases, stages, chucks,
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 300 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: SemiProbe
Description: 200 mm system that meets their precise specifications and requirements. The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe's patented adaptive architecture. Unlike traditional probe systems, all foundation modules - bases, stages, chucks,
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 200 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: SemiProbe
Description: 100 mm system that meets their precise specifications and requirements. The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe's patented adaptive architecture. Unlike traditional probe systems, all foundation modules - bases, stages, chucks,
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 100 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: Unitron Ltd.
Description: Modular microscope system that readily adapts to instrumentation
- Applications: Semiconductor Wafers
- Form Factor: Other
- Mounting / Loading: In-situ / System Mounted
- Non-contact: Yes
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Supplier: Advanced Energy Industries, Inc.
Description: Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution Highly reliable, effective abatement with minimum utilities usage Lower cost of ownership than
- Applications: Semiconductor Wafers, Etching - Plasma / Wet, Photolithography / Patterning
- Form Factor: Controller
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: WDI Wise Device Inc.
Description: The LLC6 is a precise linear lens changer with 6 lens ports providing ultra fast, automatic lens changing without the need of re-qualifying the lens. It is the ideal tool for TFT-LCD and Photomask Inspection/Repair applications or other tasks where multiple optical magnifications are required. The
- Applications: Semiconductor Wafers, Flat Panel Displays
- Form Factor: Other
- Mounting / Loading: In-situ / System Mounted
- Non-contact: Yes
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Supplier: Asahi/America, Inc.
Description: are unlikely to clog, which makes them ideal for service lines with large debris or solids. Wafer check valves are used in applications where it is essential to ensure fluid flow passes in only one direction. Wafer check valves can be mounted in vertical or horizontal
- Material of Construction: PVC, Other
- Media Description: Powder / Solids
- Valve Size: 3 to 12 inch
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Supplier: TSI Incorporated
Description: This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer
- Applications: Semiconductor Wafers, CVD / PVD Films
- Form Factor: Other
- Maximum Wafer / Part Size: 200 to 300 mm
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: TSI Incorporated
Description: This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer
- Applications: Semiconductor Wafers, CVD / PVD Films
- Form Factor: Other
- Maximum Wafer / Part Size: 200 to 300 mm
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: StellarNet, Inc.
Description: film and/or optical measurement requirements. Thin Film Applications Solar PV Increased production of Thin-Film Photovoltaics (TFPVs) is becoming more predominant due to lower costs than their silicon-wafer-based cousins. Getting accurate thickness
- Applications: Semiconductor Wafers, CVD / PVD Films, Data Storage / Memory, Flat Panel Displays, Optical Components , Polishing / CMP, Polymers / Photoresists, Other
- Form Factor: Monitor / Instrument
- Measurement Capability: Thickness - Film / Layer, Thickness - Wafer / Disc (TTV)
- Mounting / Loading: In-situ / System Mounted
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Supplier: Plast-O-Matic Valves, Inc.
Description: Series GX Single-wall sight glass for liquids compatible with acrylic. 1/2? – 3? sizes, NPT or socket connections in PVC or polypro. Fluttering streamers optional. Series GY Double-wall sight glass for liquids compatible with Pyrex inner wall. 1/2? – 3? sizes, NPT or socket connections in PVC or
- Connection Type: Flanged
- Face to Face Dimensions or Overall Length: 5.62 inch
- Flange Size: 4 inch
- Flow Indicator Style: Full View
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Supplier: Rigaku Corporation
Description: XY? sample stage system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Optional Sweeping TXRF software enables mapping of the contaminant
- Applications: Semiconductor Wafers
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 200 mm
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Supplier: Xenemetrix Ltd.
Description: X-Calibur SDD Bench Top EDXRF Spectrometer versatile, high energy resolution Our X-Calibur SDD EDXRF spectrometer features similar configuration like X-Calibur but with Silicon Drift Detector. Thanks to SDD high count rates the instrument improves its response time thus minimizing down time. The SDD
- Applications: Semiconductor Wafers, CVD / PVD Films, Electroplated Films
- Form Factor: Monitor / Instrument
- Measurement Capability: Composition
- Mounting / Loading: Floor Mounted / Stand-alone, Manual Loading
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Supplier: Xenemetrix Ltd.
Description: EX-6600 SDD Secondary Target EDXRF Xenemetrix’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates to higher
- Applications: Semiconductor Wafers, CVD / PVD Films, Electroplated Films
- Form Factor: Monitor / Instrument
- Measurement Capability: Composition
- Mounting / Loading: Floor Mounted / Stand-alone, Manual Loading
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Supplier: Xenemetrix Ltd.
Description: RoHS Vision The Fast and Easy Method for Ensuring Compliance with Regulations for Hazardous Substances The Restriction of Hazardous Substances Directive (RoHS) restricts toxic metals in electrical and electronic equipment. Xenemetrix’s new RoHS Vision uses a high resolution detector, a software
- Applications: Semiconductor Wafers, CVD / PVD Films, Electroplated Films
- Form Factor: Monitor / Instrument
- Measurement Capability: Composition
- Mounting / Loading: Floor Mounted / Stand-alone, Manual Loading
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Supplier: Xenemetrix Ltd.
Description: X-PMA Precious Metals EDXRF Spectrometer fast, accurate, easy to use XRF is a non-destructive analytical technique that can rapidly and easily identify and determine the presence of various elements such as gold, platinum, silver and other precious metals present in solid, powdered and liquid
- Applications: Semiconductor Wafers, CVD / PVD Films, Electroplated Films
- Form Factor: Monitor / Instrument
- Measurement Capability: Composition
- Mounting / Loading: Floor Mounted / Stand-alone, Manual Loading
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Supplier: WDI Wise Device Inc.
Description: WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly and accurately focus all types of infinity corrected microscopes.
- Applications: Semiconductor Wafers, CVD / PVD Films, Flat Panel Displays, Photolithography / Patterning
- Form Factor: Sensor / Sensing Element
- Mounting / Loading: In-situ / System Mounted
- Non-contact: Yes
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Supplier: VAST STOCK CO., LIMITED
Description: Single Board Computers uIBX smart mounting kit for monitor and stand
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Supplier: VAST STOCK CO., LIMITED
Description: Single Board Computers VESA 75 mount kit for uIBX-210,black
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Supplier: Park Systems, Inc.
Description: roughness measurement • Critical angle measurement of sidewalls • Critical dimension measurements of vertical sidewalls High Throughput Inline Automation • Allowable sample size: 200/300mm wafers • Automatic data acquisition and analysis of trench
- Applications: Semiconductor Wafers
- Form Factor: Monitor / Instrument
- Measurement Capability: Critical Dimension / Trench Geometry, Defects / ADC, Roughness / Waviness
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: Imego
Description: MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top of
- Applications: CVD / PVD Films, Polymers / Photoresists, Other
- Form Factor: Wafer Probing System, Sensor / Sensing Element
- Measurement Capability: Deposition Rate, Endpoint Detection / Plasma Diagnostics, Thickness - Film / Layer, Other
- Mounting / Loading: In-situ / System Mounted, Floor Mounted / Stand-alone
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Supplier: WDI Wise Device Inc.
Description: The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications.
- Applications: Semiconductor Wafers, CVD / PVD Films, Flat Panel Displays, Optical Components , Packaged ICs / Ceramic Substrates, Photolithography / Patterning
- Area Mapping: Yes
- Form Factor: Monitor / Instrument
- Measurement Capability: Defects / ADC, Thickness - Film / Layer, Other
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Supplier: Hiden Analytical
Description: The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia.
- Applications: Etching - Plasma / Wet, Other
- Form Factor: Controller, Wafer Probing System
- Measurement Capability: Deposition Rate
- Mounting / Loading: In-situ / System Mounted
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Success Story: Electromechanical Assembly
A major semiconductor company requested a custom motor coil winding assembly for use in their laser lithography machine. The motor assembly is used in conjunction with the magnet portion of the assembly to adjust the stage on which the wafer is mounted to position the wafer as desired. The assembly
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Failure Analysis of Die Bond Adhesion Failures Caused by Silicone Contamination
used to mount the wafer during the die sawing operation. The analytical equipment and methodology used to determine the failure mechanism are described. Auger Electron Spectroscopy and X-ray Photoelectron spectroscopy are used to identify the elements and their chemical states on the die bonding
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Avago Introduces 18 GHz and 26.5 GHz Low-Noise E-pHEMT in 0402 Compatible Packages Produced by Advanced Wafer-Scale Packaging Technology (.pdf)
the size and performance advantage of bare die assembly and the reliability of encapsulated devices, while permitting automated assembly processes and low production costs. According to the IPC/JEDEC J-STD-012 definition, a chip scale package is a single-die, surface-mountable pack¬age with an area
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Application: Instrumentation Grade Reed Relays
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From Silicone to the Smartphone: Intelligent Production Logistics for the Electronics Industry
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Measuring the Volume of Integrated Circuit Chipping After the Dicing Process Using a Digital Microscope
Integrated circuit (IC) manufacturing can be broken down into two processes-forming circuits on bare wafers and packaging. The circuit formation process begins with cylindrical pieces of semiconductor material. The cylinders are sliced into thin, circular pieces called bare wafers. The bare wafers
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Hernon Supertacker Used in UConn Application
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IN/INS shorting due to surface ESD
To continue eliminating boxes: At the Sub-process level, Equipment Correlation points out to the Wafer Mounter process.
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An Integrated Maintenance Management System for an Advanced Manufacturing Company
Mechanical problems on the wafer mounter could be avoided by periodic adjustment of mechanical parts and cleaning of dust from the speed controller so that overloading or damaging oper- ations could be eliminated.
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The application of dry photoresists in fabricating cost-effective tapered through-silicon vias and redistribution lines in a single step
A 15 μm thick dry photoresist MXA115 was laminated on the TSV wafer by an automated wafer mounter LongHill LH836 (figure 2(g2)).
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Front matter
… process (module bench mounted or tabletop and automatics equipments) for R&D and production Spare parts for Front-End equipments Handling of wafers (manual by tips or vacuum pen) Consumables for clean room Equipments for the Assembly : Wafer Mounter up to 12 inches …
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Characterization of the wafer dicing process using Taguchi methodology
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Development of high power QFN package
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Linear motor motion control using a learning feedforward controller
In 1991, he joined the Department of Mechatronics, Centre for Manufacturing Technology, Philips Electronics N.V., Eindhoven, The Netherlands, where he is currently involved in the design and implementation of control systems for motion applications, such as component mounters and wafer steppers/scanners. .
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A single dof magnetic levitation system using time delay control and reduced-order observer
As the semiconductor industry is developed rapidly, high-precision and high-speed actuators, such as chip mounters , wafer stages, and probe stations in the semiconductor-manufacturingpro- cesses, are researched in need of the higher per- formance and the larger travel range.
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