CAM Design Handbook
Emphasizing computer-aided design and manufacturing techniques, as well as sophisticated numerical control methods, this book allows engineers and technicians to utilize cutting edge design tools.
TABLE OF CONTENTS CAM Design Handbook
Chapter 15: CAMS IN MICROELECTROMECHANICAL SYSTEMS
G. K. Ananthasuresh, Ph.D.
Assistant Professor of
Mechanical Engineering and Applied Mechanics
University of Pennsylvania, Philadelphia, Pa.
15.1 SCOPE OF THE CHAPTER
Even though the word mechanical is prominently featured in the acronym MEMS (micro-electromechanical systems), truly mechanical applications of MEMS are still in their infancy. While it is true that moving solids and fluids, as opposed to moving electrons, distinguish MEMS from microelectronics, the research activities and applications of MEMS until now have been mostly focused on microtransducers that include microsensors and actuators. Surface contact between moving structural members is avoided or minimized in microtransducers. In this chapter, the focus is on MEMS devices with mechanical transmissions where such a contact is necessary. To make the chapter self-contained, some background on MEMS and the materials and microfabrication processes used to make them are included. A general discussion of mechanical manipulation at the micro scale is presented to describe the basic elements such as joints and also to identify the needs and challenges. There has not yet been widespread use of cams in MEMS. Since cams and gears are similar in action and to broaden the notion of cams, gear transmissions are included in this chapter in addition to devices based on the usual cam action. Micro-actuators and tribological issues, which are relevant for future application of cams in MEMS, are also discussed.
15.2 BACKGROUND ON MEMS
The field of microelectromechanical systems (MEMS), as it is called in the United States, or microsystems technology (MST), as it is called...
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