Handbook of Optics: Devices, Measurements, and Properties, Volume II, Second Edition

Chapter 26: SCATTEROMETERS

John C. Stover

TMA Technologies
Bozeman, Montana

26.1 GLOSSARY

BRDF

bidirectional reflectance distribution function

BTDF

bidirectional transmittance distribution function

BSDF

bidirectional scatter distribution function

f

focal length

FN

focal ratio

L

distance

P

power

R

length

r

radius

TIS

total integrated scatter

?

angle

? N

vignetting angle

? spec

specular angle

?

wavelength

?

rms roughness

?

solid angle

26.2 INTRODUCTION

The measurement of optical scatter has received increased attention in the last decade. In addition to being a serious source of noise, scatter reduces throughput, limits resolution, and has been the unexpected source of practical difficulties in many optical systems. On the other hand, its measurement has proved to be an extremely sensitive method of providing metrology information for components used in many diverse applications. Measured scatter is a good indicator of surface quality and can be used to characterize surface roughness as well as locate and size discrete defects. It is also used to measure the quality of optical coatings and bulk optical materials. It is emerging as a valuable noncontact measurement technique outside the optics industry as well. Point sources of scatter imaged onto position-sensitive detectors are used to measure displacement. Doppler-shifted scatter is used to measure velocity, and polarization changes in scattered light can be used to reveal reflector material properties, such as the optical constants.

The instrumentation required for many of these measurements has to be fairly sophisticated. Scatter signals are generally small compared to the specular beam and can vary by several...

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