Wafer Carrier / Holder Silicon Carbide and Silicon Carbide Ceramics
from Saint-Gobain Performance Ceramics & Refractories
Technical Data. Hexoloy ® SA SiC is a pressureless, sintered form of alpha silicon carbide, with a density greater than 98 percent theoretical. It has a very fine grain structure (4 - 10 microns) for excellent wear resistance and contains no free silicon, which makes it highly chemically... [See More]
- Shape / Form: KilnFurniture; Spout; WaferCarrier; Custom Shape
- Thermal Conductivity: 126
- Max Use Temperature: 1900
- CTE: 4.02
from CoorsTek
Precision ceramic components improve durability and handling of wafer stages and tables used during inspection and processing. CoorsTek components and tables provide precise dimensional stability, ultra-flatness and smoothness, and vacuum holding of wafers during inspection and processing. [See More]
- Shape / Form: WaferCarrier; Custom Shape
- Applications: Wear resistant parts or tooling; Lithography & Wafer Inspection
- Composition: Silicon Carbide: UltraClean™ Recrystallized & CeraSiC, UltraSiC™ Direct Sintered; High-Purity Aluminas
from CoorsTek
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components. CoorsTek is your partner for... [See More]
- Shape / Form: WaferCarrier
- Applications: Chemical or material processing; Wear resistant parts or tooling
from CoorsTek
Susceptors hold and heat semiconductor wafers during thermal processing. A susceptor is made of a material which absorbs energy by induction, conduction, and/or radiation and heats the wafer. Its thermal shock resistance, thermal conductivity, and purity are critical to rapid thermal processing... [See More]
- Shape / Form: WaferCarrier; Custom Shape
- Applications: Wear resistant parts or tooling
- Composition: Silicon Carbide: UltraClean™ Recrystallized & PureSiC® CVD; PlasmaPure™ UC Ultra-Pure Alumina, Clear Carbon™ SiC coated graphite