Wafer Carrier / Holder Silicon Carbide and Silicon Carbide Ceramics
from Xiamen Unipretec Ceramic Technology Co., Ltd.
A ceramic wafer chuck is a specialized tool employed in the semiconductor industry to hold wafers in a secure position. It functions as a stable platform that guarantees consistent contact and precise positioning of the wafer during many procedures, including lithography, etching, deposition,... [See More]
- Shape / Form: WaferCarrier
- Bond & Processing: Sintered / Fired
- Applications: Chemical or material processing; HV / Electrical
from Xiamen Unipretec Ceramic Technology Co., Ltd.
Ceramic wafer clamps are indispensible tools in semiconductor processing. They can be manufactured of high-purity alumina, zirconia, or silicon carbide, making them suited for high-temperature and corrosive environments. [See More]
- Shape / Form: WaferCarrier
- Bond & Processing: Sintered / Fired
- Applications: HV / Electrical
from CoorsTek
Precision ceramic components improve durability and handling of wafer stages and tables used during inspection and processing. CoorsTek components and tables provide precise dimensional stability, ultra-flatness and smoothness, and vacuum holding of wafers during inspection and processing. [See More]
- Shape / Form: WaferCarrier; Custom Shape
- Applications: Wear resistant parts or tooling; Lithography & Wafer Inspection
- Composition: Silicon Carbide: UltraClean™ Recrystallized & CeraSiC, UltraSiC™ Direct Sintered; High-Purity Aluminas
from Saint-Gobain Performance Ceramics & Refractories
Technical Data. Hexoloy ® SA SiC is a pressureless, sintered form of alpha silicon carbide, with a density greater than 98 percent theoretical. It has a very fine grain structure (4 - 10 microns) for excellent wear resistance and contains no free silicon, which makes it highly chemically... [See More]
- Shape / Form: KilnFurniture; Spout; WaferCarrier; Custom Shape
- Thermal Conductivity: 126
- Max Use Temperature: 1900
- CTE: 4.02
from CoorsTek
Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components. CoorsTek is your partner for... [See More]
- Shape / Form: WaferCarrier
- Applications: Chemical or material processing; Wear resistant parts or tooling