Products & Services
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Supplier: RobotWorx
Description: The six-axis SV3CR robot is designed for use in a Class 1 cleanroom environment and is suitable for wafer handling and interbay applications. It can also be used for wafer cassette handling, disk substrate, media handling, and flat panel display applications. The robot
- Number of Axes: 6 #
- Load Capacity: 3 kg
- Reach: 677 mm
- Robot Type: Articulated Robot
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Supplier: RobotWorx
Description: The Motoman CR3 Clean Robot is a six-axis vertically articulated robot made for cleanroom applications. The CR3 is Class 1 approved for the highest clean environmental conditions according to Federal standards. It has a wide freedom of movement for handling work.bsp; With 6 degrees of
- Number of Axes: 6 #
- Load Capacity: 3 kg
- Reach: 694 mm
- Robot Type: Articulated Robot
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Supplier: RobotWorx
Description: The Motoman CR20 is a six-axis vertically articulated robot made for cleanroom applications. The CR20 has a wide freedom of movement for handling work.bsp; With 6 degrees of freedom, this robot is able to handle workpieces in situations where 2- or 3- axis horizontal type robots
- Number of Axes: 6 #
- Load Capacity: 20 kg
- Reach: 1,658 mm
- Robot Type: Articulated Robot
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Supplier: CoorsTek
Description: End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle
- Features: Alumina / Aluminum Oxide, Carbide Materials, Silica / Silicate Materials, Specialty Ceramic
- Specialty Ceramic Type: Aluminum Nitride, Quartz, Silicon Carbide, Yttria
- Applications: Chemical / Materials Processing, Wear Parts / Tooling
- Shape / Form: Wafer Carrier / Holder
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Supplier: Rigaku Corporation
Description: system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Optional Sweeping TXRF software enables mapping of the contaminant distribution over the
- Maximum Wafer / Part Size: 150.00000000000003 to 300.00000000000006 mm
- Measurements: Area Mapping, Particle Contamination
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: PTB Sales, Inc.
Description: Ask for current price. The SLR 200 series robot allows for manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette.
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Supplier: PTB Sales, Inc.
Description: Ask for current prices. Visit Genmark Automation for more information on these Axcelis tool wafer handling robots.
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Supplier: Rigaku Corporation
Description: system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Integrated VPD capability enables automatic VPD preparation of one wafer while a TXRF
- Maximum Wafer / Part Size: 150.00000000000003 to 300.00000000000006 mm
- Measurements: Area Mapping, Particle Contamination
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: PTB Sales, Inc.
Description: Applied Materials Precision 5000 (P5000) Cryo pumps Dry pumps Power supplies Turbo pumps VAT valves Wafer robots Water chillers Call us for the system components you need.
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Supplier: 3X Ceramic Parts Company Limited
Description: Alumina Ceramic Robot Arm F Type CNC machined The ceramic robot arm provided by our company is mainly divided into clamping type, bearing type and vacuum adsorption type. The sizes are 2 ", 4", 6 ", 8", 12 ", and non-standard sizes can be customized. The F-type left and right vacuum
- Density: 3.8999975386044725 g/cc
- Compressive / Crushing Strength: 377,095.7823287122 psi
- Material Type: Alumina / Aluminum Oxide
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Supplier: JST Manufacturing, Inc.
Description: cassettes and press the receipe start button and let the process begin.Multiple automation platforms are available depending on your space constrainsts. JST offers front robots, rear robots or overhead robots with either front or side loading. Optional turntables are available
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Supplier: TSI Incorporated
Description: This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer
- Maximum Wafer / Part Size: 200 to 300.00000000000006 mm
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: Floor Mounted / Stand-alone
- Features: Other
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Supplier: TSI Incorporated
Description: This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom 300 mm and 200 mm calibration standards. Robotic wafer
- Maximum Wafer / Part Size: 200 to 300.00000000000006 mm
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: Floor Mounted / Stand-alone
- Features: Other
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Supplier: Nanotronics Imaging
Description: The Nanotronics Imaging nSpec® is an inspection device designed for high resolution microscopy and detection of wafer defects. With particular application in silicon carbide and Galium Nitride epi wafers, the nSpec® offers fast quantification and qualification of defects with detailed
- Measurements: Defects / ADC
- Mounting / Loading: Manual Loading
- Technology: Optical / Imaging System
- Applications: Semiconductor Wafers
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Supplier: Brooks Automation, Inc.
Description: The Brooks Automation PAVS6 is a robotic arm designed for use in the semiconductor and electronics manufacturing industries. It is a 6-axis robot that provides high precision and accuracy in its motion control, making it well-suited for tasks such as material handling, assembly, and
- Number of Axes: 6 #
- Load Capacity: 7 kg
- Reach: 770 mm
- Industry / Application: Assembly, Inspection, Material Handling (e.g., Loading/Unloading, Palletizing)
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Supplier: Brooks Automation, Inc.
Description: The Brooks Automation PP100 is a high-performance robotic arm designed for use in the semiconductor and electronics manufacturing industries. The PP100 is a 6-axis robot that provides high precision and accuracy in its motion control, making it well-suited for tasks such as material handling,
- Number of Axes: 6 #
- Load Capacity: 2 kg
- Reach: 663 mm
- Industry / Application: Assembly, Inspection, Material Handling (e.g., Loading/Unloading, Palletizing)
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Supplier: Rigaku Corporation
Description: system, an in-vacuum wafer robotic transfer system, and new user-friendly windows software. All of these contribute to higher throughput, higher accuracy and precision, and easy routine operation. Optional Sweeping TXRF software enables mapping of the contaminant distribution over the
- Maximum Wafer / Part Size: 200 mm
- Measurements: Area Mapping, Particle Contamination
- Mounting / Loading: Floor Mounted / Stand-alone
- Form Factor: Monitor / Instrument
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Supplier: SemiProbe
Description: semiautomatic 150 mm system that meets their precise specifications and requirements. The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe's patented adaptive architecture. Unlike traditional probe systems, all foundation modules - bases, stages,
- Maximum Wafer / Part Size: 150.00000000000003 mm
- Measurements: Electrical Test - Parametric / In-line
- Mounting / Loading: Manual Loading
- Technology: Optical / Imaging System
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Supplier: Radwell International
Description: DISCONTINUED BY MANUFACTURER, SERVO POSITIONING CONTROLLER, WAFER HANDLING ROBOT CONTROLLER, 90-132 VAC, 47-66 HZ, 15 AMP/ 250 V. FREE 2 YEAR RADWELL WARRANTY
- Continuous Output Current: 15 amps
- Supply Voltage (AC): 132 volts
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Supplier: Renbrandt, Inc.
Description: These couplings are especially designed for precision instruments. encoder drives. robotics. aircraft equipment. radar. laser. optical/mechanical devices. computers. precision remote controls. UNEQUALED PERFORMANCE. Some of the features are: Zero backlash. Low inertia. Handles offset and angular
- Bore Diameter: 0.09 to 0.185 inch
- Coupling Diameter: 0.75 inch
- Rated Torque: 1.875 In-lbs
- Rated Speed: 5,000 rpm
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Supplier: Filmetrics, Inc.
Description: notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling. The different F60-c instruments are distinguished primarily by thickness and wavelength
- Measurements: Area Mapping
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: In-situ / System Mounted
- Form Factor: Monitor / Instrument
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Supplier: Filmetrics, Inc.
Description: baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling. The different F60-t instruments are distinguished primarily by thickness and wavelength range. Generally shorter
- Measurements: Area Mapping
- Applications: CVD / PVD Films, Semiconductor Wafers
- Mounting / Loading: In-situ / System Mounted
- Form Factor: Monitor / Instrument
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Supplier: Prior Scientific, Inc.
Description: masks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12 inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with 250 mm x 250 mm transmitted light area.
- Maximum X-Distance: 302 mm
- Maximum Y-Distance: 302 mm
- Minimum Step Size (Resolution): 0.09999999999999999 µm
- Stage Type: Motorized Stage
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Supplier: Precision Polymer Engineering Ltd.
Description: High purity, Perlast® and Kimura® materials are widely used in wafer handling applications as end-effector pads because they provide optimized friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature. PPE are experts in providing
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Supplier: SensoPart
Description: sensor detects the position and any damage to wafers and cells. It allows robots to pick up and lay down wafers accurately. Wafers and solar cells with fine breakouts can be directly rejected during this step, before they can completely break up and damage other material.
- Horizontal Resolution: 600 lines
- Features: Industrial, Machine Vision Sensor, Other, Smart Camera
- Monochrome / Color: Monochrome
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Supplier: IntelLiDrives, Inc.
Description: yields the lowest total cost of ownership. APPLICATIONS: Semiconductor assembly Electronics assembly Precision machine tools Robotic handlers Wafer processing Automation
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Supplier: Fuji America Corporation
Description: These machines support placing small LEDs and bare dies at high-speed as well as performing hybrid production including flip chips. Hybrid placement of wafers and SMDs Wafer and reel part placement in a single unit. Supports tray part and reel part placement as well as direct pickup
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Supplier: JST Manufacturing, Inc.
Description: JST offers affordable semi-automated systems in both rotary and linear transfer designs. Rotary Transfer stations can accomodate single or dual rotary arms. JST's robot uses DC servo motors for efficient transfers with high reliability. This servomotor technology provides precise position
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Supplier: IntelLiDrives, Inc.
Description: has large clear center aperture that can be used for air or wire line feed-through or beam delivery. Semiconductor assembly Electronics assembly Precision machine tools Robotic handlers Wafer processing Automation
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Supplier: Smartmore Corporation Limited
Description: Application Scenarios: It is widely used in step height measurement, thickness measurement, wafer surface testing, flatness measurement, center pointing, positioning of the needle of the dispenser, CNC tool positioning, and the positioning of the industrial robot. ● The laser
- Applications: Alignment / Guidance, Assembly Quality, Bar / Matrix Code, Biotechnology or Medical, Color Mark / Color Recognition, Container or Product Counting, Edge Detection, Electronics Rework, Electronics or Semiconductor Inspection, Flaw Detection, Food & Beverage, Gauging, Scanning & Dimensioning, ID
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Supplier: Broadcom Inc.
Description: servo and stepper motor feedback systems, robotic arms and wafer-handling machines. Avago also offers a wide range of accessories to complement its encoder products. These accessories include cables, connectors, code wheels and alignment tools. The company offers the industry encoder products
- Operating Temperature: -40 to 185 F
- Features: Digital, Incremental, Optical, Signal Quadrature
- Sensor Technology: Linear Encoder
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Supplier: EQYO
Description: Hydraulic Systems Swivels and Booms Downhole Applications Aerospace Manifold Gaskets Landing Gear Systems Braking Systems Flight Controls Electronics / Semiconductor Robotic Equipment CVD / DVD Chamber Precision Pumps Seals for Wet and Dry Wafer Fabrication Life Science Advanced Analytic
- O-ring Hardness (Durometer): 50 durometer
- Synthetic Rubbers: Fluoroelastomer (FKM)
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Supplier: IntelLiDrives, Inc.
Description: applications requiring frequent directional changes. Semiconductor assembly Electronics assembly Precision machine tools Robotic handlers Wafer processing Automation
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Supplier: IntelLiDrives, Inc.
Description: assembly Electronics assembly Precision machine tools Robotic handlers Wafer processing Automation
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Supplier: Infineon Technologies AG
Description: schemes, including FMCW and Doppler. Integrated digital blocks controlling the chip are implemented to support radar system design. The device is manufactured in Infineon’s B11HFC BiCMOS technology, offering a cutoff frequency higher than 300GHz. It is housed in Infineon's plastic embedded
- Input (Supply) Voltage: 1.5 volts
- Operating Temperature: -40 to 85 C
- Standards and Certifications: RoHS Compliant
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Featured Products Top
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INSACO Offers Wafer Carriers With or Without Multiple Holes INSACO, Inc has become recognized as a worldwide leader in custom machined ceramic and sapphire parts for the semiconductor industry. Through this experience (read more)
Browse Glass Fabrication Services Datasheets for Insaco, Inc. -
Watch>> - Sapphire for GaAs, Indium Phosphide, & Other Semiconductors Sapphire Wafer Carriers (read more)
Browse Wafer Cassettes Datasheets for Insaco, Inc. -
PPE are experts in providing low contact force solutions for your wafer handling requirements. The PPE range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force. High purity elastomer materials, such as PPE (read more)
Browse Rubber and Elastomer Molding Services Datasheets for Precision Polymer Engineering Ltd. -
Watch>> - Sapphire for GaAs, Indium Phosphide, & Other Semiconductors Sapphire Wafer Carriers (read more)
Browse Wafer Cassettes Datasheets for Insaco, Inc. -
Product Overview Used in semiconductor wafer transfer robots, sorters, and load ports for picking, placing, and transferring wafers between process modules and FOUPs. Fountyl ceramic end effectors are manufactured from high-purity alumina (Al2O3 99 (read more)
Browse Industrial Ceramic Materials Datasheets for Fountyl Technologies Pte. Ltd. -
Beyond semiconductor wafer handling, these high-performance end effectors are ideal for precision machining, medical robotics demanding biocompatibility, and chemical processing equipment operating in (read more)
Browse Aluminum Oxide and Alumina Ceramics Datasheets for Fountyl Technologies Pte. Ltd. -
High-Precision Alumina Ceramic End Effector Tailored for Semiconductor Wafer Handling This end effector is made from premium alumina ceramic, combining exceptional wear and (read more)
Browse Aluminum Oxide and Alumina Ceramics Datasheets for Fountyl Technologies Pte. Ltd. -
of Capacities and Sizes Available in 2-axis, 3-axis, and 6-axis versions, the sensors cover capacities from 5 kg up to 5000 kg, with compact heights and versatile dimensions to suit various installation requirements. This flexibility makes them suitable for integration in robotic arms (read more)
Browse Six-axis Force and Torque Sensors Datasheets for XJCSENSOR Technology Co., Ltd. -
Torque motors have a large diameter due to the hollow shaft. This makes it possible to run the z-axis rod of a SCARA robot, with the (read more)
Browse AC Motors Datasheets for Tecnotion -
Product Overview Used in semiconductor wafer transfer robots, sorters, and inspection equipment for handling wafers in cleanroom and vacuum environments. Fountyl ceramic end effectors are manufactured from high-purity alumina (Al2O3 99.5%) and silicon carbide (SiC 99 (read more)
Browse Industrial Ceramic Materials Datasheets for Fountyl Technologies Pte. Ltd.
Conduct Research Top
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
Ultratech downgraded amid slow LTP adoption Japanese wafer maker cuts jobs Wacker shutters two 200-mm wafer plants in Germany Motorola's semi separation stings Singapore center ASIC vendors mull cost issues at FSA Expo FSA panel studies time-to-market issues More readers rename Motorola SPS
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Impact of Thermal Limits on Motor Performance
For semiconductor equipment, motors are essential components, and are used in various systems such as indexing (theta) tables and wafer-handling robots. Motor torque is extremely important, but to get higher torque, you need to apply higher current. As current increases, motor winding temperature
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
Suit settlement will impact Micro Linear's 3Q results Robotic Vision lands $1 million order in Thailand ASM subsidiary books assembly line orders over $20 million Infineon to offer smart card platform with Microsoft operating system NEW ORDERS & DESIGN WINS Samsung stops Rambus chip production
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
wafer demand In its electronic materials business, Japan's Shin-Etsu Chemical Ltd. (SEH) posted an operating income of 15.3 billion yen ($136.4 million) on sales of 80.3 billion yen ($715.7 million) in its first fiscal quarter ended June 30. ITRS roadmap committee wants to drop term 'technology node
More Information Top
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Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing
From the WIP area, the cassette robot moves the cassettes sequentially to the wafer robot , which places the wafers one by one in a vertical boat.
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Predicting and managing system interactions at early phase of the product development process
wafer robot arm and its motion path .
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Verification studies of thermophoretic protection for EUV masks
A test bed was assembled that included a vacuum wafer robot , thermophoretic test chamber, showerhead assembly, calibrated particle source, and a KLA/Tencor 6420 surface scanner (see Fig. 3).
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LabX.com New and Used Laboratory Equipment and Scientific Instruments
Wafer Robot .
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LabX.com New and Used Laboratory Equipment and Scientific Instruments
Wafer Robot Handler Assembly From DNS 60A Coater?
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LabX.com New and Used Laboratory Equipment and Scientific Instruments
Wafer Robot .
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Productive application of voltage contrast for detection of optically undetectable defects
Two wafer robots are used.
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Automated solar cell assembly team process research. Annual subcontract report, 1 January 1993--31 December 1993
R-8-z wafer robots , common in the semiconductor industry, were found to be too slow to meet our 4 s/cell requirement.
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Robot
Abstract:This paper surveys robotic wafer handling system for integrate circuit manufacturing,and reviews the operating principle and research results of the main components of the system,i.e., wafer robot and prealigner.
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Micro-ball wafer bumping for flip chip interconnection
Wafers are loaded from a case using wafer robot .
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