Properties of Crystalline Silicon

| AAS | atomic absorption spectroscopy |
| AB | antibonding |
| AC | alternating current |
| AFM | atomic force microscopy |
| AM | Austin model |
| APCVD | atmospheric pressure chemical vapour deposition |
| APD | antiphase defect |
| APD | antiphase domain (boundary) |
| APW | augmented plane wave |
| ARPES | angle resolved photoemission spectroscopy |
| ASED | atom superposition and electron delocalisation |
| BC | bond centred |
| BCA | binary collision approximation |
| BDT | brittle-to-ductile transition |
| BESOI | bond and etchback silicon-on-insulator |
| BHS | Bachelet-Hamann-Schlueter |
| BOX | buried oxide |
| BP | Becke-Perdew |
| BPS | Burton Prim Slichter |
| BSD | backside damage |
| BSF | back surface field |
| BSOI | bonded silicon-on-insulator |
| BTE | Boltzmann transport |
| BZ | Brillouin zone |
| CB | conduction band |
| CCD | charge coupled device |
| CCM | cyclic cluster model |
| CI | configuration interaction |
| CITS | current-imaging-tunnelling spectroscopy |
| CMOs | complementary metal oxide semiconductor |
| CMP | chemical mechanical polishing |
| CNDO | complete neglect of differential overlap |
| CNDO/S | CNDO/spectroscopic |
| COP | crystal originated particle |
| COs | corona oxide semiconductor |
| CPAA | charged particle activation analysis |
| CPMD | Car-Parrinello molecular dynamics |
| CPU | central processing unit |
| C-V | capacitance-voltage |
| CVD | chemical vapour deposition |
| CW | continuous wave |
| CZ | Czochralski |
| Cz | Czochralski |
| CZN | cerium zinc nitrate |
| DAS | dimer adatom stacking fault |
| DC | direct current |
| DE-AAS | drop etching atomic absorption spectroscopy |
| DFT | density functional theory |
| DF-TB | density functional based tight binding |
| DHL | dislocation half-loop |
| DI | de-ionised |
| 2DLFM | two-dimensional low-frequency motion |
| DLTS | deep level transient spectroscopy |
| DMC | diffusion Monte Carlo |
| 2DNG | two-dimensional nucleation and growth |
| DO | differential overlap |
| DQMC | diffusion quantum Monte Carlo |
| DRAM | dynamic random access memory |
| DRIE | deep reactive ion etching |
| DSPE | double solid phase epitaxy |
| DZ | denuded zone |
| EBIC | electron-beam-induced current |
| ECR | electron cyclotron resonance |
| EELS | electron energy loss spectroscopy |
| ELID | electrolytic in-process dressing |
| ELTRAN R |