Properties of Crystalline Silicon

Abbreviations

AAS

atomic absorption spectroscopy

AB

antibonding

AC

alternating current

AFM

atomic force microscopy

AM

Austin model

APCVD

atmospheric pressure chemical vapour deposition

APD

antiphase defect

APD

antiphase domain (boundary)

APW

augmented plane wave

ARPES

angle resolved photoemission spectroscopy

ASED

atom superposition and electron delocalisation

BC

bond centred

BCA

binary collision approximation

BDT

brittle-to-ductile transition

BESOI

bond and etchback silicon-on-insulator

BHS

Bachelet-Hamann-Schlueter

BOX

buried oxide

BP

Becke-Perdew

BPS

Burton Prim Slichter

BSD

backside damage

BSF

back surface field

BSOI

bonded silicon-on-insulator

BTE

Boltzmann transport

BZ

Brillouin zone

CB

conduction band

CCD

charge coupled device

CCM

cyclic cluster model

CI

configuration interaction

CITS

current-imaging-tunnelling spectroscopy

CMOs

complementary metal oxide semiconductor

CMP

chemical mechanical polishing

CNDO

complete neglect of differential overlap

CNDO/S

CNDO/spectroscopic

COP

crystal originated particle

COs

corona oxide semiconductor

CPAA

charged particle activation analysis

CPMD

Car-Parrinello molecular dynamics

CPU

central processing unit

C-V

capacitance-voltage

CVD

chemical vapour deposition

CW

continuous wave

CZ

Czochralski

Cz

Czochralski

CZN

cerium zinc nitrate

DAS

dimer adatom stacking fault

DC

direct current

DE-AAS

drop etching atomic absorption spectroscopy

DFT

density functional theory

DF-TB

density functional based tight binding

DHL

dislocation half-loop

DI

de-ionised

2DLFM

two-dimensional low-frequency motion

DLTS

deep level transient spectroscopy

DMC

diffusion Monte Carlo

2DNG

two-dimensional nucleation and growth

DO

differential overlap

DQMC

diffusion quantum Monte Carlo

DRAM

dynamic random access memory

DRIE

deep reactive ion etching

DSPE

double solid phase epitaxy

DZ

denuded zone

EBIC

electron-beam-induced current

ECR

electron cyclotron resonance

EELS

electron energy loss spectroscopy

ELID

electrolytic in-process dressing

ELTRAN R

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