Sensors And Microsystems: Proceedings of the 9th Italian Conference: Ferrara, Italy, 8-11 February 2004

Physical Sensors

Chapter List

Piezoresistive Efects in Thick Film Resistors 30 Years After
Automatic Capacitance Compensation (ACC) Oscillator for Tsm Quartz Sensors Under Acoustic and Dielectric Loading
Aluminum Nitride Thin Films for a Micromechanical Ultrasonic Liquid Nebulizer
Stress-Strain Behaviour of Electroplated Gold Thin Films
Development and Characterization of a Silicon-Based Three Axial Force Sensor
Heated Channel Mass Flow Sensor
Resonant Accelerometer in Micromachined Silicon
Acoustic Guided Waves Iinterdigital Transducers for non Destructive Testing of Carbon-Epoxy Composites for Spacecraft Structures
Integrated Constant Temperature Anemometer for Liquid Flow Rate Measurement
An Electrical Model for Simulating the Dynamics of a Cantilever Beam
Design and Characterization of a Family of Fluxgate Magnetic Sensors in PCB Technology
Fluid Dynamics Sensor Arrays in Printed Circuit Board Technology for Aerospace Applications

MARIA PRUDENZIATI
INFM-S 3 and Physics Dept, via G.Campi 213/A, 41100 Modena, Italy
E-mail: Prudenziati.maria@unimo.it Phone: 059.2055262; Fax: 0592055235

The most successful applications of thick film materials in the sensor area rely on piezoresistive effects exhibited by thick film resistors (TFRs). The earliest evidence of strain sensitivity in TFRs was available in 1973, but its value for thick film strain gauges was not recognised. A few years later attention was drawn on the peculiar set of properties that make TFRs valuable for the implementation of new classes of sensors for strain-related physical quantities. Since then, piezoresistive properties of TFRs have attracted a great deal of scientific and technological interest and applications have rapidly spread for many diversified areas. Advances in knowledge accumulated in recent years on the properties...

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