Sensors And Microsystems: Proceedings of the 9th Italian Conference: Ferrara, Italy, 8-11 February 2004

Automatic System for Work Function Measurement Employing ?? Modulation

C.FALCONI, F.LO CASTRO, L.FUSARO, M.SCOCCIA, C.DI NATALE, A.D AMICO
Department of Electronic Engineering, University of Tor Vergata, Via Politecnico 1, 00133, Roma, Italy
e-mail: falconi@eln.uniroma2.it

In this paper, first, we theoretically investigate the sensitivity of vibrating capacitors, concluding that significant improvements are possible if the mean distance is reduced; this and other issues make very attractive, for chemical sensors applications, full integration of work function gas sensors; a main obstacle to such systems is the complexity of existing electronic interfaces for Kelvin Probe systems. We propose a new electronic interface which may, in principle, be integrated; simulations and preliminary experimental results, obtained with a discrete prototype, are shown.

1. Introduction

The most convenient approach to the work function measurement is often the Kelvin method, which guarantees surface integrity and can be used for a wider range of materials, temperatures and pressures than any one of the others [1]. In Kelvin Probe systems, a voltage V X is applied across a capacitor whose plates are constituted, respectively, by a reference material, A, and by the sample material, B, whose work function is unknown. The charge Q stored in the capacitor is


where ? ? AB is the contact potential difference (corresponding to the work function difference q ? ? AB ) and C is the capacitance. In general, if the capacitance is time-dependent, C(t), the current through the capacitor may be expressed as the sum of the Kelvin current i K (t)

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