1.

A resistor body has the following dimensions as drawn: length = 95 micron, width = 12 microns. The material has a resistivity of 65 ohms-per-square. When fabricated, the above resistor width measures 0.2 microns smaller than drawn. What is its resistance value?

2.

A resistor body over-etches, when fabricated, by 0.15 micron. The window that defines its length has an under-etch of 0.2 micron. The material has a resistivity of 150 ohms-per-square. Calculate the resistor values for each of the following sets of dimensions:

3.

Tabulate the above resistors again, from their drawn dimensions only. Calculate the percentage difference between the drawn value and the fabricated value:

1.

Determine number of squares. Multiply number of squares by sheet resistivity.

Calculating as drawn,

Accounting for the 0.2 etching error,

2.

The resistor body width is a light-field mask, so over-etching results in a smaller dimension. The length is a dark-field mask, so under-etching likewise results in a smaller dimension. Subtract the deltas in both cases.