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Library of Congress Cataloging-in-Publication Data

Lobontiu, Nicolae.
Mechanical design of microresonators: modeling and applications/ Nicolae Lobontiu.
p. cm.
Includes bibliographical references and index.
ISBN 0-07-145538-8
1. Microelectromechanical systems Design and construction.
2. Electric resonators Design and construction. 3. Vibrators Design and constuction. 4. Detectors Design and construction. I. Title.
TK7875.L62 2006
621.381 dc22 2005051140

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