TABLE OF CONTENTS Building upon the material presented thus far in the book, this chapter presents micromechanical resonators that are fabricated by integrating compliant parts with rigid and massive ones. Beam-type and spring-type resonators are first studied by using various modeling and design approaches which enable description of these mechanical resonators at different complexity levels. The main forms of actuation and sensing (transduction) that are currently implemented in micromechanical resonators are further analyzed, including electrostatic, electromagnetic, piezoelectric, piezomagnetic, and bimorph-based procedures. Real-life examples of microgyroscopes, tuning forks, and resonant sensors with the basic modeling apparatus and solved examples complete this chapter.
