TABLE OF CONTENTS The variation of inductance with frequency in high performance power distribution grids is discussed in this chapter. As discussed in Chapter 5, the on-chip inductance affects the integrity of the power supply in high speed circuits. The frequency of the currents flowing through the power distribution networks in high speed ICs varies from quasi-DC low frequencies to tens of gigahertz. Thus, understanding the variation of the power grid inductance with frequency is important in order to built a robust and efficient power delivery system.
The chapter is organized as follows. A procedure for analyzing the inductance as a function of frequency is described in Section 10.1. The variation of the power grid inductance with frequency is discussed in Section 10.2. The chapter concludes with a summary.
The variation of the grid inductance with frequency is investigated for the three types of power/ground grids: non-interdigitated, interdigitated, and paired. These types of grid structures are described in Section 9.3. The grid structures are depicted in Fig. 10.1.
The analysis is analogous to the procedure described in Section 9.3. The inductance extraction program FastHenry [67] is used to explore the inductive properties of these interconnect structures. A conductivity of 58S/ ?
