Thin Film Materials Technology: Sputtering of Compound Materials



Copyright 2004 by William Andrew, Inc.
No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording or by any information storage and retrieval system, without permission in writing from the Publisher.
Cover Art 2004 by Brent Beckley / William Andrew, Inc.
Cover photo: Chamber for sputtering amorphous thin film on substrate cooled by liquid nitrogen.
Library of Congress Catalog Card Number: 2003018016
ISBN: 0-8155-1483-2
Printed in the United States
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