Thin Film Materials Technology: Sputtering of Compound Materials

Thin Film Materials Technology Sputtering of Compound Materials

by Kiyotaka Wasa
Yokohama City University
Yokohama, Japan
Makoto Kitabatake
Matsushita Electric Industrial Co., Ltd
Kyoto, Japan
Hideaki Adachi
Matsushita Electric Industrial Co., Ltd.
Kyoto, Japan

Copyright 2004 by William Andrew, Inc.

No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording or by any information storage and retrieval system, without permission in writing from the Publisher.

Cover Art 2004 by Brent Beckley / William Andrew, Inc.

Cover photo: Chamber for sputtering amorphous thin film on substrate cooled by liquid nitrogen.

Library of Congress Catalog Card Number: 2003018016

ISBN: 0-8155-1483-2

Printed in the United States

Co-published by:

William Andrew, Inc.

Springer-Verlag GmbH & Co. KG

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Norwich, NY 13815

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1-800-932-7045

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www.williamandrew.com

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ISBN: 3-540-21118-7

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NOTICE

To the best of our knowledge the information in this publication is accurate; however the Publisher does not assume any responsibility or liability for the accuracy or completeness of, or consequences arising from, such information. This book is intended for informational purposes only. Mention of trade names or commercial products does not constitute endorsement or recommendation for use by the...

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