TABLE OF CONTENTS Thin films are fabricated by the deposition of individual atoms on a substrate. A thin film is defined as a low-dimensional material created by condensing, one-by-one, atomic/molecular/ionic species of matter. The thickness is typically less than several microns. Thin films differ from thick films. A thick film is defined as a low-dimensional material created by thinning a three-dimensional material or assembling large clusters/aggregates/grains of atomic/molecular/ionic species.
Historically, thin films have been used for more than a half century in making electronic devices, optical coatings, instrument hard coatings, and decorative parts. The thin film is a traditional well-established material technology. However, thin film technology is still being developed on a daily basis since it is a key in the twenty-first century development of new materials such as nanometer materials and/or a man-made superlattices.
Thin film materials and devices are also available for minimization of toxic materials since the quantity used is limited only to the surface and/or thin film layer. Thin film processing also saves on energy consumption in production and is considered an environmentally benign material technology for the next century.[1]
Thin film technology is both an old and a current key material technology.Thin film materials and deposition processes have been reviewed in several publications.[2] Among the earlier publications, the Handbook of Thin Film Technology (Maissel and Glang) is still notable even though thirty years have passed since the book was published and many new and exciting developments occurred in the intervening years.
