TABLE OF CONTENTS Sputtered particles from an organic polymer target will be composed of atomic species and/or monomers of the target materials. Thin films of the organic polymer may be deposited since these sputtered particles may be polymerized in the sputtering gas discharge or on the substrate during film formation.
The organic polymer film is used as the target, which is fixed onto a cooled copper target holder with silicon grease to reduce the temperature rise of the target surface. Figures 5.154 and 5.155 show the infrared transmission spectra of organic thin films sputtered from a Teflon [ ] and a polyimide target in Ar. The sputtered Teflon films exhibit the C-F absorption band corresponding to the bulk Teflon. The films are transparent and their physical properties resemble bulk Teflon; however, the sputtered polyimide films show different absorption from bulk polyimide, and thus may be significantly different from the bulk polyimide.
[ ]is a registered trademark of DuPont Chemical Co.
