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  • MICRO: Wet Surface tech
    potential enabling processes for next-generation devices. This article discusses a single-wafer wet-etch technology for selective etching There are two conventional ways to etch Si films. Wet etching is accomplished by immersing wafers in a mixture of H O heated to 150 -180 C. Water in solution
  • MICRO: Wet Surface Technologies
    of such processing for foundries and pilot lines, for example, include increased product mix flexibility and faster time to first silicon. To date, few facilities have adopted single-wafer tools for wet cleaning and etch steps, primarily owing to their lack of a demonstrated advantage over batch-processing systems
  • Automation comes to wet-processing stations
    highperformance servo and stepper control, as well as room for up to 50 I/O. It has a built-in 10/100 Base T Ethernet port to query via a secure XML interface. Flexible processors helped Amerimade Technology Inc. automate wet-processing stations for etching, cleaning, stripping, and plating
  • Effects of Ohmic Metal on Electrochemical Etching of GaAs in pHEMT Manufacturing
    in the compound semiconductor industry. It is. believed that electrochemical etching, which has been studied. extensively by researchers, is responsible for the phenomenon. Solutions usually focus around the chemistries in the various. wet processing steps. In our recent experiments, we have found
    on a vibration-isolated floor. The cleanroom features eight bays individually dedicated to a specific process function. In addition to an Eaton NV-1002 high-energy ion implanter, the facility's equipment list features tools for optical lithography, wet etching, plasma dry etching, thermal processing, ECR chemical
  • Evaluating the performance of dual PTFE filter assemblies in hot-acid etch baths
    Recirculating hot-acid baths are widely used in the semiconductor industry for wet-etching, stripping, and cleaning silicon wafers. To meet the stringent cleanliness requirements of the industry, particulate contamination generated during processing is removed from the baths by recirculating
  • Fabrication of GaAs Devices
    Fabrication of GaAs Devices. Focusing on all aspects of GaAs processing that deal with GaAs free surfaces and interfaces between GaAs and metal contacts or dielectrics, this detailed text offers pragmatic advice on cleaning and passivation, wet and dry etching and photolithography.
  • MICRO: Surface Conditioning/Chemistries - Song (January 2001)
    in photoresist removal after dry etching or ion implantation. Most photoresist removal procedures consist of a combination of plasma-induced dry ashing and wet chemical treatments. Problems associated with the dry ashing process include incomplete resist removal and undesired by-products caused

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  • MEMS Materials and Processes Handbook
    Complementing the coverage of dry etching, wet etching processes for MEMS micromachining are covered in Chapter 8 with a comprehensive recipe and reference list included in this chapter to aid in finding etch rates and etch selectivities for a wide range of...
  • Introduction to Microfabrication 2nd Edition
    of Optical Lithography, Non-Optical Extension of Optical Lithography, Lithography Simulation, Lithography Triangles, Exercises References and Related Reading 11 Etching 127 Etch Mechanisms, Etching Profiles, Anisotropic Wet Etching , Wet Etching, Plasma Etching (RIE), Isotropic Dry Etching, Etch Masks, Non-Masked Etching, Multistep...
  • Fabrication of GaAs Devices
    ...3 Passivation for improved semiconductor regrowth 3.3.4 Passivation for improved contact metallisation 3.3.5 Special oxide passivations 3.3.6 Dielectric passivations: PECVD and ECR SiNx and SiOx Ny 3.4 Conclusion References Wet etching and photolithography of GaAs...
  • Encyclopedia of Microfluidics and Nanofluidics
    Different etchants used in anisotropic wet etching have specific etch rates for each crystal- lographic plane in the material being removed.
  • Bonding in Microsystem Technology
    Fast wet etching ..........................................................
    Wet etching processes can be made selective by doping the silicon heavily with boron creating what is called a p+ etch stop.
  • Handbook of Porous Silicon
    Micromachining and wet etching Etching (wet .
  • Handbook of Visual Display Technology
    Wet Etching ...................................................................