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  • White Paper - Advanced Reactor System for the Fine Control of Properties of Molybdenum Powder
    nucleation of product phase and product phase crystal growth via chemical vapor transport. Volatile molybdenum oxide monohydrate, MoO2(OH)2, is the gas phase re-sponsible for the chemical vapor transport of Mo. Complete reduction system was designed and engineered based on this pilot development work
  • Examining scale-up and computer simulation in tool design for 300-mm wafer processing
    , government laboratories, and commercial vendors. The virtual reactor concept is close to becoming a reality. The transition from 200- to 300-mm wafer processing tools presents a clear problem in scale-up. Chemical engineers have had years of experience in scaling up chemical reactors from laboratory to pilot
  • MICRO: Green and Clean
    Ara Philipossian and Erin Mitchell, Department of Chemical and Environmental Engineering, University of Arizona A study investigates the fluid dynamics and inherent tribological aspects of the CMP process in order to develop robust planarization processes with significantly lower slurry consumption

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