Products & Services
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Supplier: EBARA Technologies, Inc.
Description: Ebara's GCR abatement systems cleanly and efficiently remove carbon monoxide and PFC gases from ashing and oxide etch semiconductor waste streams. The standard GCR model targets CO gases using a high temperature oxidation path. PFC's such as CF4 are decomposed using an
- Orientation: Vertical
- Scrubber Model: Skid / Base Plate Mounted
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Supplier: EBARA Technologies, Inc.
Description: EBARA's GDC250 point-of-use gas abatement system combines the features and benefits of a patented rolling burner and a high efficiency fan scrubber. The GDC250 is specifically designed for high decomposition abilities for both hydride and PFC (perfluorocompound) gases
- Orientation: Vertical
- Scrubber Model: Skid / Base Plate Mounted
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Supplier: Advanced Energy Industries, Inc.
Description: Lower cost of ownership than competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low
- Applications: Specialty / Other
- Substrates / Surfaces: Semiconductors / Wafers
- Technology Type: RF Plasma (ICP)
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Supplier: DAS Environmental Expert GmbH
Description: Point-of-Use Waste Gas Treatment with ESCAPE (burn/wet) Process waste gas treatment with ESCAPE The ESCAPE technology offers an optimum combination of the two operating procedures burning & scrubbing in the smallest possible space. A concept many DAS systems for waste
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Supplier: EBARA Technologies, Inc.
Description: EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems. Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing
- AC Voltage Required: 120 to 208 volts
- Length: 9 inch
- Width: 0.6250 inch
- kWatts: 0.0540 kW
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Supplier: EBARA Technologies, Inc.
Description: EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems. Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing
- AC Voltage Required: 120 to 208 volts
- Length: 3 inch
- Width: 3 inch
- kWatts: 0.0360 kW
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Supplier: Acoustical Solutions, Inc.
Description: The LSE Wall System has been a proven success in the noise abatement industry. These noise barrier walls have been used on many interstate highways, but also have industrial applications around gas compressor stations, electric transformers, cooling towers, chillers, compressors
- Mounting: Free Standing
- Product Description: Acoustic Barrier / Panel
- Thickness: 6 inch
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Supplier: Linde North America, Inc.
Description: oxides of nitrogen such as N2O5. These oxides are not only very soluble but also reactive, so they can be easily removed along with other hazardous pollutants using conventional wet or dry scrubbers. The NOx oxidation process is not affected by other contaminants such as acid gases and
- Destruction Efficiency / Capability: 95%, 90%, Other
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Supplier: DAS Environmental Expert GmbH
Description: abatement of water-soluble harmful substances from process waste gases. The gas scrubber is employed mainly in the semiconductor industry, as a Point-of-Use (POU) wet treatment system. Installed closely behind the vacuum pumps, AQUABATE optimally protects the fab’s
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Supplier: Advanced Energy Industries, Inc.
Description: Lower cost of ownership than competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low
- Applications: Semiconductor Wafers, Etching - Plasma / Wet, Photolithography / Patterning
- Form Factor: Controller
- Mounting / Loading: Floor Mounted / Stand-alone
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Supplier: Advanced Energy Industries, Inc.
Description: Lower cost of ownership than competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low
- Oxidizer Type: Other
- Temperature Range: 41 to 104 F
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Supplier: DAS Environmental Expert GmbH
Description: Point-of-Use Waste Gas Treatment with ESCAPE (burn/wet) Process waste gas treatment with ESCAPE The ESCAPE technology offers an optimum combination of the two operating procedures burning & scrubbing in the smallest possible space. A concept many DAS systems for waste
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Supplier: DAS Environmental Expert GmbH
Description: Waste Gas Treatment with STYRAX (burn/wet) at the Point of Use Process Waste Gas Treatment with STYRAX - Qualified for 450mm STYRAX, a DAS tool family for process waste gas abatement using burn/wet technology, is one of the latest developments within our waste gas
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Supplier: SAE International
Description: Modern diesel engines employ a multitude of strategies for oxides of nitrogen (NOx) emission abatement, with exhaust gas recirculation (EGR) being one of the most effective technique. The need for a precise control on the intake charge dilution (as a result of EGR) is paramount since
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Supplier: Eaton
Description: Lab & Pilot Plant Services Eaton's filtration lab technicians can analyze customer-submitted samples and identify the suspended solids and particle size distribution in their process liquids. This capability allows us to take the guesswork out of which filtration technology will work best in the
- Clean in Place: Yes
- Components: Pressure Vessels, Other
- Industry Served: Alcohols / Organics, Chemicals, Cosmetics, Fine Chemicals, Foods / Beverages, Gas Recovery, Liquid Recycling, Oil Refining, Offshore / Marine, Pharmaceuticals, Plastics, Pulp and Paper, Research and Development, Semiconductor Manufacturing, Solvent Recovery, Waste Water Treatment, VOC
- Location: Midwest US Only, Europe Only
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Supplier: IPI Fabrication
Description: systems--the DESIGN BUILD SOLUTION. From design to fabrication to field installations, we are certain to provide the most economic and time saving approach to any industrial project. Our goal has always been to develop long-term relationships with our clients by providing consistently high
- Components: Columns, Heat Exchangers, Heaters, Mixers, Piping, Pressure Vessels, Pumps, Separators, Tanks, Valves
- Industry Served: Alcohols / Organics, Chemicals, Cosmetics, Cryogenic Service, Fine Chemicals, Foods / Beverages, Gas Recovery, Liquid Recycling, Mineral Oils, Oil Refining, Pharmaceuticals, Plastics, Pulp and Paper, Solvent Recovery, Waste Water Treatment, VOC Recovery / Abatement
- Location: North America, United States Only, Southern US Only
- Operation / Mounting: Floor / Field, Pilot Plants, Production Plants, Skidded
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Supplier: SAE International
Description: BSFC at part load operations thanks to the intake line de-throttling. In these conditions, due to a less effective attenuation of the pressure waves that travel along the intake system, VVA engines produce higher gas-dynamic noise levels. The worsening of the engine gas-dynamic
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Supplier: The Advanced Team, Inc.
Description: No Description Provided
- Components: Mixers, Pumps
- Industry Served: Alcohols / Organics, Chemicals, Cosmetics, Cryogenic Service, Fine Chemicals, Foods / Beverages, Gas Recovery, Liquid Recycling, Mineral Oils, Oil Refining, Offshore / Marine, Pharmaceuticals, Plastics, Pulp and Paper, Research and Development, Semiconductor Manufacturing, Solvent Recovery,
- Location: North America, United States Only, Southern US Only, Midwest US Only
- Operation / Mounting: Floor / Field, Laboratory / Bench, Pilot Plants, Production Plants, Skidded
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Supplier: Harper International Corporation
Description: constantly innovating to serve the evolving Carbon Fiber market’s needs, as demonstrated by our design of gas-fired Slot Furnaces, as well sizing Oxidation Ovens, dryers and air pollution abatement systems, to take advantage of natural gas benefits. Current energy markets
- Atmosphere: Other
- Heat Source / Transfer: Combustion, Natural Gas
- Process Temperature: 3000 C
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Supplier: Harper International Corporation
Description: constantly innovating to serve the evolving Carbon Fiber market’s needs, as demonstrated by our design of gas-fired Slot Furnaces, as well sizing Oxidation Ovens, dryers and air pollution abatement systems, to take advantage of natural gas benefits. Current energy markets
- Atmosphere: Other
- Heat Source / Transfer: Combustion, Natural Gas
- Process Temperature: 1200 C
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Supplier: Harper International Corporation
Description: is supporting the advancement of the Carbon Fiber market through designs for gas-fired production scale ovens, as well sizing dryers and air pollution abatement systems, to take advantage of natural gas benefits. Current energy markets and environmental regulations have
- Atmosphere: Air / Oxidizing
- Features: Cooling System
- Heat Source / Transfer: Combustion
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Supplier: CSA Group
Description: the design and execution of environmental and effluent monitoring programs, refer to CSA N288.4 and CSA N288.5, respectively. 1.6.2 Testing of process off-gas treatment systems This Standard does not apply to nuclear air-cleaning systems that are designed to abate noble
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Supplier: Spooner Industries Ltd.
Description: Spooner is the European licensee of Anguil Environmental Systems, an industrial pollution control and energy solution provider, for the provision of VOC Abatement Systems in Europe. Over the past 30 years, Anguil has developed a breadth of technologies that control harmful and
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Supplier: Harper International Corporation
Description: , reducing processing times and increasing production rates. We also offer the unique ability to accommodate a variety of process atmospheres that others cannot. Our excellent seal designs and focus on atmosphere control includes system integration of atmosphere recycle systems,
- Application: Drying, Other
- Atmosphere: Air / Oxidizing, Other
- Heat Source / Transfer: Combustion, Electric / Resistance, RF / Microwave / Dielectric
- Process Temperature: 3000 C
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Supplier: Munters DH
Description: desorption heater upstream of an existing oxidizer which will provide additional abatement capacity, and provide lower operating cost as the flow to the oxidizer will be reduced. The system is fully assembled and tested to temperature in our ISO 9001 facility prior to shipment. This
- Oxidizer Type: Catalytic, Direct Flame, Regenerative Thermal, Rotor Concentrator
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Supplier: Munters DH
Description: desorption heater upstream of an existing oxidizer which will provide additional abatement capacity, and provide lower operating cost as the flow to the oxidizer will be reduced. The system is fully assembled and tested to temperature in our ISO 9001 facility prior to shipment. This
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Supplier: Pollution Systems
Description: Recuperative Thermal Oxidizers VOC abatement using Recuperative Thermal Oxidizers is appropriate in many process applications including processes where particulate may be present, with higher Volatile Organic Compounds (VOC’s) concentrations or even where a large amount of
- Destruction Efficiency / Capability: 99%
- Oxidizer Type: Recuperative Thermal
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Supplier: Alfa Laval Inc.
Description: PureNOx is a complete water treatment system using a centrifugal separator to clean the wash water in the wet scrubber PureNOx cleans the scrubber water in an Exhaust Gas Recirculation (EGR) process. EGR is one of the solutions under development for compliance with Tier III NOx
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Supplier: Mechanical Research & Design, Inc.
Description: & Gas, General Municipal Construction, Underwater Construction, Nuclear Power Generation and Abatement, Industrial Manufacturing and Automation, and Defense Industries, to name a few. We are trusted by our clients — they come to us again and again with their standard and highly
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Supplier: Mechanical Research & Design, Inc.
Description: & Gas, General Municipal Construction, Underwater Construction, Nuclear Power Generation and Abatement, Industrial Manufacturing and Automation, and Defense Industries, to name a few. We are trusted by our clients — they come to us again and again with their standard and highly
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Supplier: SAE International
Description: -specific emissions can be effectively reduced. EIVC strategies can also be combined with reductions of the scavenging period (valve overlap) to increase the amount of exhaust gases in the combustion chamber. However, the remarkably high boost pressure levels needed for such extreme Miller
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Supplier: ASTM International
Description: -powered or passive. One of these pipe routes should be installed during a residential buildings initial construction. Specifications for the critical gas-permeable layer, the radon systems piping, and radon entry pathway reduction are comprehensive and common to both pipe routes.
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Supplier: ASTM International
Description: -powered or passive. One of these pipe routes should be installed during a residential buildings initial construction. Specifications for the critical gas-permeable layer, the radon systems piping, and radon entry pathway reduction are comprehensive and common to both pipe routes.
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Supplier: ASTM International
Description: -powered or passive. One of these pipe routes should be installed during a residential buildings initial construction. Specifications for the critical gas-permeable layer, the radon systems piping, and radon entry pathway reduction are comprehensive and common to both pipe routes.
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Featured Products Top
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designed for CVD application. Integrated system of catalyst and wet treatment abates flammable gasses and water-soluble gasses simultaneously. The GABA AFC 050 A offers high gas removal efficiency without fuel and easy operation and maintenance through its modular system. (read more)
Browse High Vacuum Pumps Datasheets for Busch Vacuum Solutions -
The Thermon EnviroDyne™ MDU is a safe, highly efficient, and easy to install methane abatement solution for use in the reduction of fugitive gas emissions. The reduction of methane emissions is crucial and has become a global concern. Methane is the main component of (read more)
Browse Circulation Heaters Datasheets for Thermon, Inc -
Many chemical processes routinely release hazardous gases and vapors into an exhaust or waste gas system. To protect personnel, property, and the environment from unexpected dangers, these streams often need to be monitored continuously and kept well within safe levels. In the (read more)
Browse Gas Instruments Datasheets for Control Instruments Corp. -
. Common locations for gas detection include – (1) ambient air, (2) gas cabinets, (3) valve manifold boxes, (4) gas storage. Alternate locations include tool-specific valve boxes, hydrogen distribution boxes, vacuum pump enclosures, and abatement systems. Toxic gases (read more)
Browse Gas Instruments Datasheets for DOD Technologies Inc. -
revenue of close to 2 billion Euro. By compiling the expertise of Busch Vacuum Solutions in rough and medium vacuum applications, Pfeiffer Vacuum’s best-in-class high vacuum technology and leak detection plus the sustainable gas abatement systems from centrotherm clean solutions, the (read more)
Browse Vacuum Pumps and Vacuum Generators Datasheets for Busch Vacuum Solutions -
with design enhancements that maximize reuse of energy available from waste gas abatement, instrumentation and control advances that allow for a high degree of process optimization, and end-seals that maximize of effective heated volume and drastically reduce of ingress of room air and the chimney (read more)
Browse Furnaces (industrial) Datasheets for Harper International Corporation
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Landfill Waste Gas Abatement
For nearly 45 years Catalytic Products International has designed and manufactured specialized oxidation systems for use in controlling process-related VOC emissions. The QUADRANT-NRV Series Thermal Oxidation System is designed for use with the low-volume/high-BTU waste gas stream emitted from many
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EtO Sterilizer Abatement
Product sterilization companies are generally required to utilize a pollution control device for treatment of exhaust gases from their aeration room and sterilization chambers. In the United States, they need to be in compliance with NESHAP (National Emission Standards for Hazardous Air Pollutants
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Central Air Abatement System (CAAS) Scrubbing in Semiconductor Manufacturing (.pdf)
A number of sources in the semiconductor manufacturing process produce diluted levels of acid gases, silanes, ammonia and some organics. The most common gases are hydrochloric acid (HCl), hydrofluoric acid (HF), hydrobromic acid (HBr), phosphoric acid (H3PO4), nitric acid (HNO3) and ammonia (NH3).
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Ionizing Wet Scrubber (IWS) Removes Both Acid Gas and Submicron Particulate (.pdf)
A major company in the chemical process industry recently upgraded their liquid waste incinerator to a higher capacity. After reviewing current technologies, they chose Verantis' IWS TM pollution abatement system based on their previous successful experiences with this product. The same customer
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Moving Beyond the Batch
from diazomethane, a highly toxic, reactive and explosive gas. The diazomethane production unit is part of an intecontinuous grated multi-stage process that produces 200 metric tons of intermediates for the manufacture of HIV drugs and other pharmaceutical applications per year. The process
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Chemistry in Microelectronics
Gas abatement systems ...
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Puna Geothermal Venture Project Environmental Impact Statement
NOISE Use a noncondensable gas abatement system which reinfects H2S into .
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Comparative analysis of alternative means for removing noncondensable gases from flashed-steam geothermal power plants
It might also become economically feasible in high-temperature power plant systems if adopting the reboiler allows offsetting costs to be captured, for example, by eliminating the need for gas abatement systems or by allowing the substitution of lower-cost direct-contact…
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Handbook of Clean Energy Systems, 6 Volume Set
The flue gas abatement systems need great amount of energy: this can reduce the plant efficiency by about 2 – 3%.
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Geochemical engineering reference manual
operation o f o f f gas abatement systems .
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Life‐cycle greenhouse gas emissions and energy payback time of current and prospective silicon heterojunction solar cell designs
Data from a survey on point-of-use gas abatement systems [44] was used to calculate the energy and material require- ment of gas abatement, during production as well as during cleaning of the reactors.
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Gas monitoring in the process industry using diode laser spectroscopy
Industrial processes are often large- scale point sources with gas abatement systems which can be optimised to reduce the emissions.
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Rethinking the approach to higher 450mm process gas flows: A case study
…to lower manufacturing costs, so we need to explore how to best minimize the downstream impact of higher gas flow rates on capital and operating expenditure of tool-support equipment such as vacuum pumps and gas abatement systems , as well as increased…
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Green mode: Equipment interface to reduce semiconductor sub-fab utility consumption
Abstract— Traditionally, process tool sub-fab systems, for example vacuum pumps and gas abatement systems , are designed to reliably serve the most challenging semiconductor production manufacturing applications 24 hours a day and seven days a week.
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Economical and ecological aspects of plasma processing for industrial solar cell fabrication
perfluorocompound etching gases necessitates waste gas abatement systems with high destruction and removal efficiencies.