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Supplier: EBARA Technologies, Inc.
Description: Ebara's GCR abatement systems cleanly and efficiently remove carbon monoxide and PFC gases from ashing and oxide etch semiconductor waste streams. The standard GCR model targets CO gases using a high temperature oxidation path. PFC's such as CF4 are decomposed using an optional metal
- Scrubber Type: Skid / Base Plate Mounted
- Orientation: Vertical
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Supplier: EBARA Technologies, Inc.
Description: EBARA's GDC250 point-of-use gas abatement system combines the features and benefits of a patented rolling burner and a high efficiency fan scrubber. The GDC250 is specifically designed for high decomposition abilities for both hydride and PFC (perfluorocompound) gases used in
- Scrubber Type: Skid / Base Plate Mounted
- Orientation: Vertical
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: High-Efficiency Exhaust Gas Scrubber System for Semiconductor and Photovoltaic Hazardous Gas Abatement Solutions The semiconductor and photovoltaic industries rely on complex chemical processes that generate highly toxic and corrosive byproducts. To manage these risks, a
- Application: Gas
- Body Material: Stainless Steel
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Supplier: EBARA Technologies, Inc.
Description: Ebara's GCR abatement systems cleanly and efficiently remove carbon monoxide and PFC gases from ashing and oxide etch semiconductor waste streams. The standard GCR model targets CO gases using a high temperature oxidation path. PFC's such as CF4 are decomposed using an optional metal
- Type: Factory / Free Standing
- Applications: Semiconductor Manufacturing
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Supplier: DAS Environmental Expert GmbH
Description: Point-of-Use Waste Gas Treatment with ESCAPE (burn/wet) Process waste gas treatment with ESCAPE The ESCAPE technology offers an optimum combination of the two operating procedures burning & scrubbing in the smallest possible space. A concept many DAS systems for waste gas
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Supplier: Advanced Energy Industries, Inc.
Description: competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownership solutions make it a wise
- Type: RF Plasma (ICP)
- Materials / Substrates: Semiconductors / Wafers
- Features: Specialty / Other
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: downtime and long-term asset protection, investing in a 316L stainless steel exhaust gas scrubber system is a vital strategy for sustainable, safe, and cost-effective hazardous gas abatement. Technical Data Model JW-300-Scrubber Specification W800*D633*H2172 Special
- Application: Gas
- Body Material: Stainless Steel
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Supplier: EBARA Technologies, Inc.
Description: EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems. Pump lines and gas lines have unique thermal challenges due to many factors, including poor conductivity of stainless steel, differing thermal masses of plumbing
- AC Voltage Required: 120 to 208 volts
- kWatts: 0.084 kW
- Length: 4 inch
- Width: 9 inch
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Supplier: DAS Environmental Expert GmbH
Description: Waste Gas Scrubbing with AQUABATE (wet) at the Point-Of-Use AQUABATE - Point-of-Use Waste Gas Scrubber The AQUABATE product line completes DAS´waste gas treatment portfolio. The well proven solution is a pure wet scrubber technology for efficient abatement of
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Supplier: Acoustical Solutions, Inc.
Description: The LSE Wall System has been a proven success in the noise abatement industry. These noise barrier walls have been used on many interstate highways, but also have industrial applications around gas compressor stations, electric transformers, cooling towers, chillers, compressors
- Thickness: 6 inch
- Description: Acoustic Barrier / Panel
- Mounting: Free Standing
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Supplier: Advanced Energy Industries, Inc.
Description: competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownership solutions make it a wise
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Supplier: SAE International
Description: Modern diesel engines employ a multitude of strategies for oxides of nitrogen (NOx) emission abatement, with exhaust gas recirculation (EGR) being one of the most effective technique. The need for a precise control on the intake charge dilution (as a result of EGR) is paramount since
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Supplier: Linde North America, Inc.
Description: efficiency No need to interfere with / modify existing combustion equipment or to reheat the flue gas to high temperatures No need to store hazardous chemicals required for traditional abatement processes Valuable by-products such as nitric acid, calcium nitrate and mixed nitrates
- Destruction Efficiency / Capability: 90%, 95%
- Features: Other
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Supplier: SAE International
Description: at part load operations thanks to the intake line de-throttling. In these conditions, due to a less effective attenuation of the pressure waves that travel along the intake system, VVA engines produce higher gas-dynamic noise levels. The worsening of the engine gas-dynamic
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Supplier: CSA Group
Description: nuclear air-cleaning systems that remove radioactive particulate matter and iodine species from airborne effluent streams. 1.3 Operating conditions This Standard provides guidance for the design and execution of a testing program for nuclear air cleaning systems used for a) normal
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Supplier: Harper International Corporation
Description: market’s needs, as demonstrated by our design of gas-fired Slot Furnaces, as well sizing Oxidation Ovens, dryers and air pollution abatement systems, to take advantage of natural gas benefits. Current energy markets and environmental regulations have produced significant
- Process Temperature: 3,000 C
- Heat Source: Combustion, Natural Gas
- Features: Other
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Supplier: Harper International Corporation
Description: times and increasing production rates. We also offer the unique ability to accommodate a variety of process atmospheres that others cannot. Our excellent seal designs and focus on atmosphere control includes system integration of atmosphere recycle systems, off-gas
- Process Temperature: 3,000 C
- Width / Tube O.D.: 76.19995885202222 to 1,523.9991770404445 mm
- Atmosphere: Air / Oxidizing
- Heat Source: Combustion, Electric / Resistance, RF / Microwave / Dielectric
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Supplier: Harper International Corporation
Description: dryers and air pollution abatement systems, to take advantage of natural gas benefits. Current energy markets and environmental regulations have produced significant advantages to thermal processing equipment that use natural gas for fuel, and Harper has unparalleled
- Atmosphere: Air / Oxidizing
- Heat Source: Combustion
- Features: Cooling System
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Supplier: Spooner Industries Ltd.
Description: Spooner is the European licensee of Anguil Environmental Systems, an industrial pollution control and energy solution provider, for the provision of VOC Abatement Systems in Europe. Over the past 30 years, Anguil has developed a breadth of technologies that control harmful and
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Supplier: Eaton
Description: field and can aid in filter media selection and system sizing.
- Industry Served: Alcohols / Organics, Chemicals, Cosmetics, Fine Chemicals, Foods / Beverages, Gas Recovery, Liquid Recycling, Offshore / Marine, Oil Refining, Pharmaceuticals, Plastics, Pulp and Paper, Research and Development, Semiconductor Manufacturing, Solvent Recovery, VOC Recovery / Abatement, Waste Water
- Operation / Mounting: Clean in Place, Floor / Field, Laboratory / Bench, Production Plants, Skidded
- Services: Complete Machine / Turnkey System, Component / Sub-system Upgrades, Design Assistance, Inspection / Optimization, Installation / B.O.T. / Commissioning, Preventative Maintenance Plans, Repair / Overhaul Services, Training / Consulting
- Features: Europe Only, Midwest US Only, Other
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Supplier: IPI Fabrication
Description: For over 63 years, Industrial Piping, Inc. (IPI) has provided mechanical construction, fabrication, and fire protection services to industrial manufacturing facilities. Today, as a specialty EPC contractor, we offer our customers the best solutions for their industrial process systems--the
- Industry Served: Alcohols / Organics, Chemicals, Cosmetics, Cryogenic Service, Fine Chemicals, Foods / Beverages, Gas Recovery, Liquid Recycling, Mineral Oils, Oil Refining, Pharmaceuticals, Plastics, Pulp and Paper, Solvent Recovery, VOC Recovery / Abatement, Waste Water Treatment
- Process: Blending / Mixing, Combustion / Burning, Condensation / Cooling, Distillation, Drying, Evaporation, Filtration / Extraction, Milling, Reactor / Fermentation
- Components: Columns, Heat Exchangers, Heaters, Mixers, Piping, Pressure Vessels, Pumps, Separators, Tanks, Valves
- Services: Complete Machine / Turnkey System, Component / Sub-system Upgrades, Design Assistance, Installation / B.O.T. / Commissioning
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Supplier: Munters DH
Description: zeolite into a regeneration zone where heater air is used to desorb the VOCs forming a highly concentrated airstream. The system is designed to require only 5-10% of the original process volume for rotor regeneration. The system is designed to be integrated with an oxidizer for VOC
- Oxidation Technology: Catalytic, Direct Flame, Regenerative Thermal, Rotor Concentrator
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Supplier: Alfa Laval Inc.
Description: NaOH dosing pumps Scrubber water collecting tank and buffer tanks Control cabinet Benefits Compared to other NOx emissions reduction systems, the EGR system offers these advantages: Compact footprint and simple installation The EGR system including Alfa Laval’s PureNOx WTS is
- Features: All Centrifugal Separators
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Supplier: The Advanced Team, Inc.
Description: No Description Provided
- Industry Served: Alcohols / Organics, Chemicals, Cosmetics, Cryogenic Service, Fine Chemicals, Foods / Beverages, Gas Recovery, Liquid Recycling, Mineral Oils, Offshore / Marine, Oil Refining, Pharmaceuticals, Plastics, Pulp and Paper, Research and Development, Semiconductor Manufacturing, Solvent Recovery, VOC
- Process: Blending / Mixing, Combustion / Burning, Condensation / Cooling, Crystallization, Distillation, Drying, Evaporation, Filtration / Extraction, Injection / Metering, Melting, Milling, Reactor / Fermentation
- Services: Design Assistance, Inspection / Optimization, Preventative Maintenance Plans, Repair / Overhaul Services, Training / Consulting
- Operation / Mounting: Floor / Field, Laboratory / Bench, Pilot Plants, Production Plants, Skidded
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Supplier: Pollution Systems
Description: somewhere else in your facility. Pollution Systems’ designs are able to incorporate many energy saving options including the use of preheated combustion air, a secondary heat exchanger and sophisticated burner controls. Pollution System Solutions will work closely with you to
- Destruction Efficiency / Capability: 99%
- Oxidation Technology: Recuperative Thermal
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Supplier: Mechanical Research & Design, Inc.
Description: verification of pressure/leak integrity in conveyance systems of potable water, chemicals, or waste. To aid our customers, we design and manufacture Isolation and Pressure Barriers such as Bulkheads, Pipe Plugs, Annular Sealing Tools, Joint Testers, Gates, Hatches, By-passes, and Doors, which
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Supplier: Mechanical Research & Design, Inc.
Description: verification of pressure/leak integrity in conveyance systems of potable water, chemicals, or waste. To aid our customers, we design and manufacture Isolation and Pressure Barriers such as Bulkheads, Pipe Plugs, Annular Sealing Tools, Joint Testers, Gates, Hatches, By-passes, and Doors, which
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Supplier: ASTM International
Description: systems provide radon reductions of up to 50 %. When the radon test results for a building with an operating passive system are not acceptable, that system should be converted to fan-powered operation. Radon systems with pipe routes installed for passive operation can be
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designed for CVD application. Integrated system of catalyst and wet treatment abates flammable gasses and water-soluble gasses simultaneously. The GABA AFC 050 A offers high gas removal efficiency without fuel and easy operation and maintenance through its modular system. (read more)
Browse High Vacuum Pumps Datasheets for Busch Vacuum Solutions -
The Thermon EnviroDyne™ MDU is a safe, highly efficient, and easy to install methane abatement solution for use in the reduction of fugitive gas emissions. The reduction of methane emissions is crucial and has become a global concern. Methane is the main component of (read more)
Browse Circulation Heaters Datasheets for Thermon, Inc -
Many chemical processes routinely release hazardous gases and vapors into an exhaust or waste gas system. To protect personnel, property, and the environment from unexpected dangers, these streams often need to be monitored continuously and kept well within safe levels. In the (read more)
Browse Gas Instruments Datasheets for Control Instruments Corp. -
. Common locations for gas detection include – (1) ambient air, (2) gas cabinets, (3) valve manifold boxes, (4) gas storage. Alternate locations include tool-specific valve boxes, hydrogen distribution boxes, vacuum pump enclosures, and abatement systems. Toxic gases (read more)
Browse Gas Instruments Datasheets for DOD Technologies Inc. -
revenue of close to 2 billion Euro. By compiling the expertise of Busch Vacuum Solutions in rough and medium vacuum applications, Pfeiffer Vacuum’s best-in-class high vacuum technology and leak detection plus the sustainable gas abatement systems from centrotherm clean solutions, the (read more)
Browse Vacuum Pumps and Vacuum Generators Datasheets for Busch Vacuum Solutions -
with design enhancements that maximize reuse of energy available from waste gas abatement, instrumentation and control advances that allow for a high degree of process optimization, and end-seals that maximize of effective heated volume and drastically reduce of ingress of room air and the chimney (read more)
Browse Furnaces (industrial) Datasheets for Harper International Corporation
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Landfill Waste Gas Abatement
For nearly 45 years Catalytic Products International has designed and manufactured specialized oxidation systems for use in controlling process-related VOC emissions. The QUADRANT-NRV Series Thermal Oxidation System is designed for use with the low-volume/high-BTU waste gas stream emitted from many
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EtO Sterilizer Abatement
Product sterilization companies are generally required to utilize a pollution control device for treatment of exhaust gases from their aeration room and sterilization chambers. In the United States, they need to be in compliance with NESHAP (National Emission Standards for Hazardous Air Pollutants
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Central Air Abatement System (CAAS) Scrubbing in Semiconductor Manufacturing (.pdf)
A number of sources in the semiconductor manufacturing process produce diluted levels of acid gases, silanes, ammonia and some organics. The most common gases are hydrochloric acid (HCl), hydrofluoric acid (HF), hydrobromic acid (HBr), phosphoric acid (H3PO4), nitric acid (HNO3) and ammonia (NH3).
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Ionizing Wet Scrubber (IWS) Removes Both Acid Gas and Submicron Particulate (.pdf)
A major company in the chemical process industry recently upgraded their liquid waste incinerator to a higher capacity. After reviewing current technologies, they chose Verantis' IWS TM pollution abatement system based on their previous successful experiences with this product. The same customer
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Moving Beyond the Batch
from diazomethane, a highly toxic, reactive and explosive gas. The diazomethane production unit is part of an intecontinuous grated multi-stage process that produces 200 metric tons of intermediates for the manufacture of HIV drugs and other pharmaceutical applications per year. The process
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Chemistry in Microelectronics
Gas abatement systems ...
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Puna Geothermal Venture Project Environmental Impact Statement
NOISE Use a noncondensable gas abatement system which reinfects H2S into .
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Comparative analysis of alternative means for removing noncondensable gases from flashed-steam geothermal power plants
It might also become economically feasible in high-temperature power plant systems if adopting the reboiler allows offsetting costs to be captured, for example, by eliminating the need for gas abatement systems or by allowing the substitution of lower-cost direct-contact…
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Handbook of Clean Energy Systems, 6 Volume Set
The flue gas abatement systems need great amount of energy: this can reduce the plant efficiency by about 2 – 3%.
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Geochemical engineering reference manual
operation o f o f f gas abatement systems .
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Life‐cycle greenhouse gas emissions and energy payback time of current and prospective silicon heterojunction solar cell designs
Data from a survey on point-of-use gas abatement systems [44] was used to calculate the energy and material require- ment of gas abatement, during production as well as during cleaning of the reactors.
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Gas monitoring in the process industry using diode laser spectroscopy
Industrial processes are often large- scale point sources with gas abatement systems which can be optimised to reduce the emissions.
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Rethinking the approach to higher 450mm process gas flows: A case study
…to lower manufacturing costs, so we need to explore how to best minimize the downstream impact of higher gas flow rates on capital and operating expenditure of tool-support equipment such as vacuum pumps and gas abatement systems , as well as increased…
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Green mode: Equipment interface to reduce semiconductor sub-fab utility consumption
Abstract— Traditionally, process tool sub-fab systems, for example vacuum pumps and gas abatement systems , are designed to reliably serve the most challenging semiconductor production manufacturing applications 24 hours a day and seven days a week.
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Economical and ecological aspects of plasma processing for industrial solar cell fabrication
perfluorocompound etching gases necessitates waste gas abatement systems with high destruction and removal efficiencies.
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