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Supplier: Utmel Electronic Limited
Description: Three Axis Accelerometer
- Operating Temperature: -40 F
- Sensor Mounting: Other
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Supplier: Utmel Electronic Limited
Description: DIGITAL THREE-AXIS ACCELEROMETER
- Operating Temperature: -40 F
- Sensor Mounting: Other
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Supplier: PCE Instruments / PCE Americas Inc.
Description: 3-Axis Accelerometer Data Logger with 2400Hz Sampling Rate This 3-axis data logger is supplied with the acceleration sensor with a sampling rate of 2400 Hz. The sensor measures the acceleration currently acting on it (3 axes), like upon shock or during vibration. The
- Sampling Frequency: 2.4 kHz
- Sensor Inputs: Accelerometer
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Supplier: Sherborne Sensors
Description: The A545 range of multi-axis accelerometers measure vector acceleration in two or three mutually perpendicular planes with high accuracy and incorporate piezo-resistive strain gauge bridge sensors incorporating air damping. Unlike fluid damped devices, the gas damping employed
- Acceleration: -100 to 100 g
- Device Type: Sensor / Transducer
- Frequency Range: 0.0 to 2400 Hz
- Number of Axes: Single Axis
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Supplier: Marposs Corp
Description: monitoring systems CTM, GENIOR MODULAR, GEMAMS or GEMVM. The piezo sensors VA-1 and VA-2 are suitable for monitoring of one axis. The piezo sensor VA-3D measures the accelerations of up to three axes. The VA-3D MEMS sensor can measure up to three axes and
- Device Type: Sensor / Transducer
- Number of Axes: Single Axis, Biaxial, Triaxial
- Sensor Technology: MEMS, Piezoelectric
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Description: THREE AXIS ACCELEROMETER
- Frequency Range: 10 Hz
- Operating Temperature: -40 to 185 F
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Description: DIGITAL THREE-AXIS ACCELEROMETER
- Frequency Range: 50 Hz
- Operating Temperature: -40 to 185 F
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Supplier: Silicon Designs, Inc.
Description: SDI's Models 2210, 2260, and 2266 Low Cost Single-Axis MEMS DC Accelerometers are rugged plug-and-play measurement devices for suitable for a wide array of demanding applications. All three models excel in zero-to-medium frequency industrial applications, particularly where
- Acceleration: 2 to 400 g
- Device Type: Sensor / Transducer
- Frequency Range: 0.0 to 4200 Hz
- Number of Axes: Single Axis
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Supplier: Kistler Group
Description: The Type 8316A... capacitive accelerometer family utilizes a silicon Micro-Electro Mechanical System (MEMS) variable capacitance sensing element. Each axis consists of a very small inertial mass and a flexure element cantilever positioned between two plates. As the mass deflects under
- Acceleration: 2 to 200 g
- Device Type: Sensor / Transducer
- Frequency Range: 0.0 to 7000 Hz
- Maximum Shock: 6000 g
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Supplier: Silicon Designs, Inc.
Description: SDI's Models 2460 and 2466 Low Cost Three-Axis MEMS DC Accelerometers are rugged plug-and-play measurement devices that provide reliable performance in most zero-to-medium frequency commercial and industrial applications, particularly where extremely low noise, and long-term stability
- Acceleration: 2 to 400 g
- Device Type: Sensor / Transducer
- Frequency Range: 0.0 to 4200 Hz
- Maximum Shock: 2000 to 5000 g
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Supplier: Richardson RFPD
Description: 820M1 SINGLE AXIS CONDITION MONITORING ACCELEROMETER The Model 820M1 is a low cost, single axis board mountableacceleromet er designed for embedded condition monitoring andpreventive maintenance applications. The piezo-electricaccele rometer is available in ranges from +/-25g
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Supplier: OMEGA Engineering, Inc.
Description: OMEGA's model ACC301 triaxial accelerometer is ideal for lightweight single-point monitoring vibration in three (X-Y-Z) planes. This accelerometer has a low noise floor and a wide frequency range of up to 10 kHz. The ACC301 accelerometer weighs only 10 grams, yet its
- Acceleration: 500 g
- Device Type: Sensor / Transducer
- Features: Corrosion Resistant, Sealed
- Frequency Range: 3 to 10000 Hz
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Supplier: Imego
Description: IQA10 is a micromachined three-axis accelerometer. It uses Imego's patented Quad Slanted Beam principle to obtain symmetric sensitivity for all three axes with near-zero cross coupling. Its compact single-chip design completely avoids any risk for axis misalignment and
- Device Type: Sensor / Transducer
- Features: Other
- Maximum Shock: 1500 g
- Number of Axes: Triaxial
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Supplier: Silicon Designs, Inc.
Description: cold extremes for extended periods of time where environmental conditions require a hermetic package. ?The SDI Models 2240 and 2480 contain a single or three orthogonally mounted, proprietary SDI Model 1522 accelerometer LCC chips, making them even less sensitive to temperature changes
- Acceleration: 2 to 400 g
- Device Type: Sensor / Transducer
- Features: Sealed
- Frequency Range: 0.0 to 4200 Hz
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Supplier: MonoDAQ
Description: High performance IEPE accelerometers are the basis for high quality vibration measurement with MonoDAQ 1xACC amplifiers. DJB A/123 is a miniature IEPE accelerometer available in three versions with different sensitivity. Specifications Voltage sensitivity (+-10%): 5 m
- Device Type: Sensor / Transducer
- Frequency Range: 1 to 12000 Hz
- Maximum Vibration: 1000 g
- Minimum Accuracy: 5 +/-% FS
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Supplier: Silicon Designs, Inc.
Description: SDI's Premium Models 2470 and 2476 High-Performance Three-Axis MEMS DC Accelerometers are rugged plug-and-play measurement devices that provide enhanced performance over temperature for use in zero to medium frequency applications experiencing large or rapid temperature variations or
- Acceleration: 2 to 400 g
- Device Type: Sensor / Transducer
- Frequency Range: 0.0 to 4200 Hz
- Maximum Shock: 2000 to 5000 g
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Description: MMA7360, THREE AXIS LOW-G MICRO
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Description: MICROPOWER THREE-AXIS 400G ACCEL
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Supplier: Kistler Group
Description: Type 8763B... is an IEPE (Integrated Electronics Piezoelectric) triaxial accelerometer permitting vibration measurements in three mutually perpendicular axes: x, y and z. Type 8763B... uses Kistler shear element technology, assuring high immunity to base strain. The welded titanium
- Acceleration: 50 to 2000 g
- Device Type: Sensor / Transducer
- Features: Integrated Electronics Piezo Electric (IEPE)
- Frequency Range: 0.3000 to 15000 Hz
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Supplier: Columbia Research Labs, Inc.
Description: The Model 610-TX Triaxial Piezoelectric Accelerometer performs simultaneous measurement of vibration acceleration in three, mutually perpendicular axes. It is an excellent choice for general-purpose shock and vibration measurement work where a threedimensional characterization of
- Acceleration: 1000 g
- Device Type: Sensor / Transducer
- Features: Sealed
- Frequency Range: 2 to 20000 Hz
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Supplier: Columbia Research Labs, Inc.
Description: The Models 510-TX and 512-TX Triaxial Piezoelectric Accelerometers perform simultaneous measurement of vibration acceleration in three, mutually perpendicular axes. They are designed for low to medium level shock and vibration measurement work where a three-dimensional
- Acceleration: 5000 g
- Device Type: Sensor / Transducer
- Features: Sealed
- Frequency Range: 2 to 15000 Hz
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Supplier: Kistler Group
Description: Contained within the housing of the accelerometer Type 8793A... are three individual shear sensitive quartz elements oriented such that they only respond to a vibration component occurring in the x, y and z axis. Each sensing element is internally connected to a Piezotron ®
- Acceleration: -500 to 500 g
- Device Type: Sensor / Transducer
- Frequency Range: 2.5 to 10000 Hz
- Maximum Shock: 5000 g
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Supplier: Shenzhen Rion Technology Co., Ltd
Description: AKE392B-Wireless three-axis accelerometer sensor series products is RION company imported the Switzerland patented technology to produce for using widely, suitable for vibration testing, impact testing and more fields. The product uses a digital interface output, RS232/485/TTL
- Acceleration: 1 to 40 g
- Device Type: Sensor / Transducer
- Frequency Range: 5 to 300 Hz
- Number of Axes: Triaxial
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Supplier: Shenzhen Rion Technology Co., Ltd
Description: deviation is typically less than 0.1%. Three axis measurement optional (X?Y?Z) Output signal:0-5V Voltage supply:9-36V Shock resistance:2000G Measuring range optional:±01G;±02G;± 04G;±08G;±16G;±32G;± 40G Size:L50×W50×H38mm Working temperature:-40°C to +85°C
- Acceleration: 1 to 40 g
- Device Type: Sensor / Transducer
- Number of Axes: Triaxial
- Operating Temperature: -40 to 185 F
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Supplier: Columbia Research Labs, Inc.
Description: The Columbia Models SA-307TX and SA-307HPTX are force balance accelerometers capable of measuring DC and low frequency acceleration simultaneously in three axes. These sensors are self-contained and provide a high level, low impedance output. No additional signal conditioning is
- Acceleration: 100 g
- Device Type: Sensor / Transducer
- Frequency Range: 2 to 2000 Hz
- Maximum Shock: 1500 g
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Supplier: Sherborne Sensors
Description: The A545 range of multi-axis accelerometers measure vector acceleration in two or three mutually perpendicular planes with high accuracy and incorporate piezo-resistive strain gauge bridge sensors incorporating air damping. Unlike fluid damped devices, the gas damping employed
- Acceleration: -500 to 500 g
- Device Type: Sensor / Transducer
- Frequency Range: 0.0 to 2400 Hz
- Number of Axes: Biaxial, Triaxial
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Supplier: Columbia Research Labs, Inc.
Description: The Models 510-TX and 512-TX Triaxial Piezoelectric Accelerometers perform simultaneous measurement of vibration acceleration in three, mutually perpendicular axes. They are designed for low to medium level shock and vibration measurement work where a three-dimensional
- Acceleration: 500 g
- Device Type: Sensor / Transducer
- Features: Sealed
- Frequency Range: 2 to 5000 Hz
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Supplier: Instrumented Sensor Technology
Description: environments and more! Six-channel, Six-axis acceleration sensor/recorder Onboard 3-axis linear accelerometers - x,y,z Onboard 3-axis angular rate sensors - roll, pitch, yaw Eight (8) MB onboard data storage Simultaneous 6-ch digitization of 3200 sps
- Application: General Lab and Industrial, Vehicular
- Connection to Host: USB, RS232/422/485
- Sensor Inputs: Accelerometer
- User Interface: None
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Supplier: Kistler Group
Description: The IMU (inertial measurement unit) Type DTI5002A06 of the DTI technology is designed to measure linear acceleration and angular rate in all three orthogonal directions. Therefore the unit consist of 3 accelerometers, 3 angular rate sensors and 2 triaxial DiMods Type DTI307.3. All
- Acceleration: -1500 to 1500 g
- Angular Acceleration: -140 to 140 rad/sec²
- Device Type: Sensor / Transducer
- Maximum Shock: 4000 g
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Supplier: Shenzhen Rion Technology Co., Ltd
Description: deviation is typically less than 0.1%.For AKE398B, the deviation temperature coefficient typical value is 100µg / ?, the scale factor temperature coefficient is 100 ppm / ° C Three axis measurement optional (X?Y?Z) Output signal:4-20mA
- Acceleration: 1 to 40 g
- Device Type: Sensor / Transducer
- Number of Axes: Triaxial
- Operating Temperature: -40 to 185 F
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Supplier: Kionix, Inc.
Description: programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. Interrupts can be generatedfor acceleration on any axis above a threshold value (Motion Interrupt)or for acceleration on all three axes below a threshold value
- Acceleration: 2 g
- Device Type: Sensor / Transducer
- Features: Sealed, Self Test / Diagnostics / Self Calibrating
- Frequency Range: 1000 Hz
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Supplier: Kionix, Inc.
Description: programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. Interrupts can be generatedfor acceleration on any axis above a threshold value (Motion Interrupt)or for acceleration on all three axes below a threshold value
- Acceleration: 2 g
- Device Type: Sensor / Transducer
- Features: Sealed, Self Test / Diagnostics / Self Calibrating
- Frequency Range: 0.0 to 1750 Hz
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Supplier: Kionix, Inc.
Description: capacitance. An ASIC, using a standard CMOS manufacturingprocess , detects and transforms changes in capacitance into an analogoutput voltage, which is proportional to acceleration. The analogoutput is also accessed through an on-board, three-channel multiplexer.The sense element design
- Acceleration: 2 g
- Device Type: Sensor / Transducer
- Features: Sealed, Self Test / Diagnostics / Self Calibrating
- Frequency Range: 1700 to 3300 Hz
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Supplier: PCE Instruments / PCE Americas Inc.
Description: The PCE-VD 3 Vibration Analyser is a miniaturized universal Vibration Analyser with an included built-in three-axes acceleration sensor (X, Y, Z axis). The internal sensor of the PCE-VD 3 Vibration Analyser measures acceleration force along the X, Y, and Z axes with a measurement range
- Acceleration: -18 to 18 g
- Features: Battery Powered
- Frequency Range: 0.0 to 60 Hz
- Minimum Accuracy: 0.5000 +/-% FS
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Supplier: Analog Devices, Inc.
Description: Product Details The ADXL363 is an ultralow power, three-sensor combination consisting of a 3-axis MEMS accelerometer, a temperature sensor, and an ADC input for synchronous conversion of an external signal. The entire system consumes less than 2 µA at a 100 Hz output data rate
- Acceleration: 2 to 8 g
- Features: Wireless
- Operating Temperature: -40 to 185 F
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Supplier: TOP-electronics USA
Description: and IoT devices. It features a high-performance accelerometer, magnetometer, and gyroscope with a low-power 32-bit ARM Cortex M0+ MCU in a small package. Hillcrest’s Freespace® sensor hub software pre-integrated on the BNO080 provides exceptional 9-Axis and 6-Axis motion
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Supplier: TOP-electronics USA
Description: -integrated on the BNO085 provides exceptional 9-Axis and 6-Axis motion tracking to enable exciting sensor applications in diverse consumer and IoT products. Sensor Hub Features • Three sensors and microcontroller in a single device • Supports new sensors and features in
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Supplier: TECAT Performance Systems, LLC
Description: The WISER 4000 system is the latest release of TECAT’s low-cost, ultra-low power and extremely accurate torque sensor. The wireless system has the optional ability to measure 3-axis acceleration, barometric pressure and ambient temperature, all within the same incredibly small footprint
- Acceleration: 16 to 400 g
- Device Type: Other
- Features: Battery Powered, Wireless
- Frequency Range: 250 to 4000 Hz
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Supplier: Instrumented Sensor Technology
Description: Compact self, contained 2" x 1" x 0.5", 40 gram 3-axis accelerometer & recorder Records peak shocks, total energy, duration, date, time Ranges from 100 g to 2,000 g. Standard range +/-300g Threshold triggered 2,500 event
- Application: General Lab and Industrial, Vehicular
- Sensor Inputs: Accelerometer
- User Interface: None
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Supplier: Rochester Electronics
Description: MMA7360, THREE AXIS LOW-G MICROMACHINED ACCELEROMETER
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Supplier: Shenzhen Rion Technology Co., Ltd
Description: The AH/VG610B is a high reliable, vibration-rejecting solid state inertial measuring unit. It consists of three vibrating ring gyroscopes and three internal damping accelerometers mounted orthogonally in each axis of space. Each device is factory calibrated over the
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Supplier: RS Components, Ltd.
Description: The EVAL-ADXL363Z evaluation board from Analog Devices allows users to investigate the performance of the ADXL363 three-sensor combination IC. This low power device contains a 3-axis MEMS accelerometer, a temperature sensor, and an ADC input for synchronous conversion of an
- Category: Development Suite / Kit
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Supplier: Advantech
Description: Connector/ interface: Wireless communication Communication protocol: UART over BLE 4.2 Operating frequency: 2.4 GHz Transmission Distance: 20m (depends on environment) Physical measurement: Vibration Axial: Three-axis Sensitivity: 0.488 mg / LSB
- Network Protocol: Other
- Wireless: Yes
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Supplier: RS Components, Ltd.
Description: accelerometer. â?¢AK8975 AKM three-axis electronic compass. â?¢Sensor drivers available within Atmell AVR Studio. â?¢Compatible with Xplained microcontroller boards Classification = Development Kit Technology = 8 bit
- Bus Width: 8-Bit
- Category: Development Suite / Kit
- Supported System: Other
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Supplier: RS Components, Ltd.
Description: from +-2g up to +-8g yet is perfect to use with Arduino or another microcontroller. Also available is the much coveted LSM9DS0 by STMicroelectronics (905-4615). Inside are three sensors. One is a classic 3-axis accelerometer, which tells you which direction is down towards the
- Package Type / Mounting: Other
- Sensor Type: Acceleration Sensor
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Supplier: RS Components, Ltd.
Description: from +-2g up to +-8g yet is perfect to use with Arduino or another microcontroller. Also available is the much coveted LSM9DS0 by STMicroelectronics (905-4615). Inside are three sensors. One is a classic 3-axis accelerometer, which tells you which direction is down towards the
- Package Type / Mounting: Other
- Sensor Type: Acceleration Sensor
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Supplier: Cole-Parmer
Description: time period, the largest acceleration value measured during the time period is recorded to the non-volatile memory (349,525 readings per axis). The UltraShock is designed to be the complete solution for environmental monitoring. The device measures and records temperature, humidity, pressure
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Supplier: Cole-Parmer
Description: time period, the largest acceleration value measured during the time period is recorded to the non-volatile memory (349,525 readings per axis). The UltraShock is designed to be the complete solution for environmental monitoring. The device measures and records temperature, humidity, pressure
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Supplier: Cole-Parmer
Description: time period, the largest acceleration value measured during the time period is recorded to the non-volatile memory (349,525 readings per axis). The UltraShock is designed to be the complete solution for environmental monitoring. The device measures and records temperature, humidity, pressure
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Supplier: Cole-Parmer
Description: time period, the largest acceleration value measured during the time period is recorded to the non-volatile memory (349,525 readings per axis). The UltraShock is designed to be the complete solution for environmental monitoring. The device measures and records temperature, humidity, pressure
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Supplier: Airmar Technology Corporation
Description: Only recreational heading sensor that uses a three-axis rate gyro for rate-of-turn data Three-axis accelerometer provides best-in-class pitch and roll information Compass calibration can be easily done on any display or PC Outputs NMEA 0183 and NMEA 2000 data simultaneously
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Supplier: Airmar Technology Corporation
Description: Only recreational heading sensor that uses a three-axis rate gyro for rate-of-turn data Three-axis accelerometer provides best-in-class pitch and roll information Compass calibration can be easily done on any display or PC Outputs NMEA 0183 and NMEA 2000 data simultaneously
- Operating Temperature: -13 to 131 F
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Supplier: Airmar Technology Corporation
Description: , solid-state compass with dynamic stabilization Three-axis rate gyro supplies rate-of–turn data Three-axis accelerometer for best-in-class pitch and roll information Housing rated IPX6 for water-ingress protection Data output via a single cable (various
- Device Classification: Sensor System
- Interface Options: Serial Interface
- Measures Barometric Pressure: Yes
- Measures Temperature: Yes
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Supplier: Airmar Technology Corporation
Description: GPS position, speed over ground, and course over ground Three-axis, solid-state compass with dynamic stabilization Three-axis rate gyro supplies rate-of–turn data Three-axis accelerometer for best-in-class pitch and roll information Housing IPX6 rated
- Device Classification: Sensor System
- Interface Options: Serial Interface
- Measures Barometric Pressure: Yes
- Measures Temperature: Yes
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Supplier: IHS ESDU
Description: within the airframe. Three accelerometers, one aligned along each of three axes, measure components of the total linear time-varying acceleration and three rate gyros measure components of the aeroplane angular velocities about each of those same axes. A review is given
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as well as medical and handheld portable products. For example, a highly accurate altitude measurement in a handheld navigation device such as a smartphone that has three-axis accelerometers, gyroscope and magnetometers adds a tenth degree of freedom. Pressure sensing allows the navigation device to (read more)
Browse Pressure Sensors Datasheets for All Sensors Corp. -
accelerometer for best-in-class pitch and roll Three-axis rate gyro for rate-of-turn data Housing IPX6 or IPX7 waterproof rating (IPX4 rating with RH Option) Output Options: NMEA 0183 (RS422) and NMEA (read more)
Browse Weather Instruments Datasheets for Airmar Technology Corporation -
Qorvo’s 5 GHz Wi-Fi front-end module TDK-InvenSense’s six-axis MEMS gyroscope and accelerometer AKM’s three-axis electronic compass (read more)
Browse Product Development Services Datasheets for TechInsights Inc. -
components of motion at the same physical point. The sensor will provide the end-user with X, Y, Z acceleration (g's) as well as rotational information (roll, pitch, yaw expressed in degrees/sec) around those three orthogonal axes. Models contain three VC MEMS-based single-axis accelerometers as well as (read more)
Browse Accelerometers Datasheets for Dytran by HBK -
touchpad controller Bosch Sensortec’s three-axis MEMS accelerometer Maxim’s analog to digital converter and 1.252 V comparator (Learn more about MEMS on Globalspec.com) (read more)
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: Texas Instruments’ heart rate monitor and bio-sensor TI’s load switch, LDO regulator, haptic driver and 600 mA step-down converter Zinitix’s DC-DC controller ST Microelectronics’ 300 mA LDO regulator, three-axis MEMS accelerometer (read more)
Browse Engineering Consulting Services Datasheets for TechInsights Inc. -
Skyworks’ 2.4 GHz front-end module Nordic Semiconductor’s Bluetooth 5.3 LE/Thread/Zigbee SoC Bosch Sensortec’s three-axis MEMS accelerometer Synaptics’ capacitive touchscreen controller (read more)
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sides of the board are two Qualcomm 5G Envelope power trackers and an Arm 32-bit Cortex-M0 microcontroller from ST Microelectronics. Other electronic components include: Six-axis MEMS accelerometer and gyroscope from ST Microelectronics Ambient light sensor from Sensortek (read more)
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microelectromechanical systems (MEMS) and sensors used in the operation of the Pico 4 headset. This includes the AKM Semiconductor three-axis electronic compass and the six-axis MEMS gyroscope and accelerometer from (read more)
Browse Product Development Services Datasheets for TechInsights Inc. -
Qorvo Six-axis MEMS accelerometer and gyroscope from Bosch Sensortec USB Type-C port controller from Infineon Wideband envelope power tracker from Qualcomm (read more)
Browse Product Development Services Datasheets for TechInsights Inc.
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AKF392B MEMS Digital Accelerometer
AKE392B-Wireless three-axis accelerometer sensor series products is RION company imported the Switzerland patented technology to produce for using widely, suitable for vibration testing, impact testing and more fields. The product uses a digital interface output, RS232/485/TTL optional, can be set
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Pressure Point 1: MEMS Pressure Sensors - Pressure Measurement Types
as medical and handheld portable products. For example, a highly accurate altitude measurement in a handheld navigation device such as a smartphone that has three-axis accelerometers, gyroscope and magnetometers adds a tenth degree of freedom. Pressure sensing allows the navigation device to locate
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
1-GHz processor, OmniVision's 1.3-megapixel sensor Among the hottest products at www.eeProductCenter.com are a new processor line that offers 1-GHz performance, a family of three-axis accelerometers and a camera chip sensor that enables thinner camera phones. Home net group embraces copy protection
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
1-GHz processor, OmniVision's 1.3-megapixel sensor Among the hottest products at www.eeProductCenter.com are a new processor line that offers 1-GHz performance, a family of three-axis accelerometers and a camera chip sensor that enables thinner camera phones. DiBcom wins socket in Tata Elxsi mobile
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EETimes.com | Electronics Industry News for EEs & Engineering Managers
performance, a family of three-axis accelerometers and a camera chip sensor that enables thinner camera phones. DiBcom wins socket in Tata Elxsi mobile TV French fabless chip company DiBcom SA has formed a partnership with Tata Elxsi Ltd., the embedded product design arm of the Tata Group (Bangalore, India
More Information Top
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A CMOS integrated three-axis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining
and -axis outputs becomes the maximum cross-axis sensitivity of the three axis accelerometer .
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A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane
Each two-axis accelerometer consists of two such beam and mass systems and a full three axis accelerometer requires two such, rotated 90° with respect to each other.
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Bulk micromachining of SOI wafers using double-sided lithography and anisotropic wet etching
three axis accelerometer .
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Monolithic integration of capacitive sensors using a double-side CMOS MEMS post process
This study has successfully demonstrated the following three applications of sensor integration using the present double- side process: (1) pressure sensor arrays of different sensing ranges and sensitivities, (2) three axes accelerometers and (3) integration of a pressure sensor and accelerometer.
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Fabrication of a sandwich type three axis capacitive MEMS accelerometer
Figure 1 shows general design of the proposed three axis accelerometers , where individual lateral and vertical accelerometers are implemented in the same die.
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Wirelessly Powered Sensor Networks and Computational RFID
Figure 12 shows a demonstration of the WISP plus three axis accelerometer being used as a wirelessly powered, battery-free input device which was first demonstrated in [1].
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Monolithic Tri-Axes Nickel-Based Accelerometer Design Verified Through Finite Element Analysis
The vibration mode for three axes accelerometer is evalu- ated individually using FEM in CoventorWare.
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Mobile Lightweight Wireless Systems
Keywords: gesture recognition, three axis accelerometer sensor, user authenti- cation.
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Assembly and packaging of a three-axis micro accelerometer used for detection of heart infarction
The size of the assembled prototype sensor was limited by the given size of the three axis accelerometer .
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Comparative Study on System Model and Finite Element Analysis of a Monolithic 3DOF MEMS Capacitive Accelerometer
A three axis accelerometer can be used to monitor the arrhythmias and fibrillation during heart surgery [7].