Peter Van Zant

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Library of Congress Cataloging-in-Publication Data

Van Zant, Peter.
Microchip fabrication / Peter Van Zant. 5th ed.
p. cm.
Includes index.
ISBN 0-07-143241-8
1. Semiconductors Design and construction. 2. Integrated circuits Design
and construction. I. Title.
TK7871.85.V36 2004
621.3815 ?2 dc22 2004040287

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ISBN 0-07-143241-8

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