In addition to the process chemicals, it takes a host of other materials and supplies to process the wafers. Each of these must meet cleanliness requirements. Logs, forms, and notebooks used will be either of nonshedding coated paper or of a polymer plastic. Pencils are not allowed, and pens are the nonretracting type.

Wafer storage boxes are made of specific non-particle-generating materials as are carts and tubing materials. Cart wheels and tools are used without greases or lubricants. In many areas, mechanics' tools and tool boxes are cleaned and left inside the cleanroom.