The Foundations of Vacuum Coating Technology

Glossary of Terms for Vacuum Coating

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Abnormal glow discharge
(plasma) The DC glow discharge where the cathode spot covers the whole cathode and an increase in the voltage increases the cathode current density. This is the type of glow discharge used in most plasma processing.

See also Normal glow discharge.

Abrasion test
(characterization) Testing film adhesion and abrasion resistance by rubbing, impacting, or sliding in contact with another surface or surfaces. Examples : Tumble test; Tabor test; Eraser test.
Abrasive
(cleaning) A material, such as a particle or a rough solid, that is capable of removing material from a surface when there is pressure and movement between the material and the surface.
Abrasive cleaning
The removal of surface material (gross cleaning), including contamination, by an abrasive action.
Abrasive compound
A material used to remove material from a surface by abrasion. Surface smoothness after abrasion is a secondary consideration. Examples: Silicon carbide; Emery; Silica; Alumina.

See also Polishing compound.

Abrasive flow machining
(vacuum technology) A means of smoothing a surface using a slurry of abrasive particles in a fluid that is passed over the surface. Also called Slurry polishing.
Abrasive transfer, contamination by
(cleaning) Transfer of material to a clean surface by contact or friction with a material to which it adheres such as a polymer on a high surface energy surface or chromium on a clean oxide surface.
Abrupt-type interface
(film formation) The interface that is formed between two materials (A and B) when there is no diffusion or chemical compound formation in...

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