The Foundations of Vacuum Coating Technology

D

d-spacing
(crystallography) The spacing between like atomic planes in a crystal lattice.
Dalton's Law of Partial Pressures
(vacuum technology) Dalton's Law of Partial Pressures states that the sum of all the partial pressures of gases and vapors in a system equals the total pressure.

See also Partial pressure.

Damage threshold
(bombardment) The energy at which radiation or bombarding particles will introduce damage to the atomic structure of a material, thus changing its properties.
Damascene pattern
(semiconductor metallization) Inlay of one material into another to provide a patterned flat surface. Structure is obtained in semiconductor processing when a material is deposited in vias and trenches on a surface, then the high areas are polished back to the original surface.

See also Chemical-mechanical-polishing (CMP).

Dangling bonds
An unsatisfied chemical bond that is available to react with atoms or molecules. See Surface.

See also Sensitization.

Dark current
(Archaic) The current through a glow discharge tube when a portion of the discharge looks "dark."
Dark space, cathode
(plasma) The darker region of a plasma near the cathode surface where most of the potential drop in a DC diode discharge occurs. Region where electrons are being accelerated away from the cathode. Also called the Cathode sheath.
Dark space shield
(plasma) A grounded surface that is placed at less than a dark space width from the cathode in order to prevent establishing a discharge in the region between the two surfaces. Also called the Ground shield.

See also Paschen curve.

DC glow...

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