E

E-beam evaporation

(PVD technology) Evaporation in a good vacuum using a focused high-energy, lowcurrent electron beam as the means of directly heating the material to be evaporated.

E-beam melting

(metallurgy) Melting an alloy in a good vacuum using a high-voltage electron beam.

See also Electrocoating.

E-diagnostics

Remote monitoring of system or process performance.

E-inventory

Remote monitoring of inventory.

Eddy current

(thickness measurement) An AC magnetic field from a probe induces magnetic eddy currents in an electrically conductive material (film or substrate) that generates an opposing magnetic field, which alters the circuit reactance and output voltage of the probe. Technique can be used to measure non-magnetic films on ferromagnetic material and non-conductive coatings on non-ferrous materials.

Edge filter

(optics) A filter that transmits at wavelengths longer than its Cut-on wavelength or shorter than its Cut-off wavelength.

Effusion cell

A thermal vaporization source that emits vapor through an orifice from a cavity where the vapor pressure is carefully controlled by controlling the temperature. Example: Used in MBE processing. Also called a Knudsen cell.

Elastomer

Material that is elastic or rubber-like, i.e., under stress it can deform to a large extent, exert a restoring force, then return to its original shape when the deforming force is removed.

Elastomer seal

(vacuum technology) A deformation seal that is made...

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The Foundations of Vacuum Coating Technology

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