The Foundations of Vacuum Coating Technology
By D. M. Mattox

K

Karat
A unit for defining the purity of gold, with 24 karat being pure gold.
Kaufman ion source
(plasma) An ion source that uses a grid system to extract ions from a confined plasma established using a thermoelectron-emitting filament in a magnetic field.
Kelrez
(vacuum technology) An elastomer that is more chemically stable than Viton . Used in plasma etching systems.
Kelvin (K) temperature scale
A temperature scale defined as zero degrees Kelvin, being the temperature at which there is no molecular motion and the heat content of the material is zero. The Kelvin degree has the same magnitude as the Centigrade degree. The triple point of water is then 273.16 K. Zero degrees K = ?273.16 C and ?459.67 F.
Keyholing
(metallization, semiconductor) When the opening of a high-aspect-ratio hole or trench closes during film deposition before the bottom of the hole or trench is filled.

See also Mouse hole.

KF flange
(vacuum technology) An O-ring sealing flange with a specific clamping configuration.

See also MF flange.

KiloGray (kGy)
The amount of nuclear radiation that will raise the temperature of the object 0.43 F.
Kinetic energy
Energy due to motion.

See also Potential.

See also Energy.

Kirkendall porosity
(film formation, adhesion) Porosity that develops in the interfacial region between two materials when the first material diffuses faster into the second than the second diffuses into the first, thus producing a loss of mass and formation of voids in the interfacial region. Also called Kirkendall voids.
Knife-edge
(vacuum technology)...
Copyright Noyes Publications/William Andrew Publishing 2003 under license agreement with Books24x7
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