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Calcium carbonate (CaCO ₃): (cleaning) Used as a polishing/cleaning abrasive. Insoluble in water, soluble in acids. Also called Chalk.
Calibrated leak: A leak that has a known leak-rate (Torrliters/sec) for a specific gas under specific conditions. Used to calibrate leak detectors.
Calibration: To determine by comparison to a standard the absolute value of each scale reading of a sensor device. Comparison must be done in a specified manner under specified conditions. See Standards, primary; Standards, secondary.
Calibration log: The document describing when a unit was calibrated, by what method, and the name of the person who did the calibration.
Canted spring seal: (vacuum technology) A slit tubular seal that has the restoring force provided by a canted coil spring inside the tube.
Capacitance manometer: (vacuum technology) A vacuum gauge that uses the deflection of a diaphragm, as measured by the changing capacitance (distance) between surfaces, as an indicator of the pressure differential across the diaphragm, the pressure on one side being a known value.

See also Vacuum gauge.
Capacity, pump: (vacuum technology) The amount of a specific gas that a capture pump, such as a cryopump, can contain and still pump effectively. When this value is exceeded the pump is ineffective and must be regenerated.

See also Regeneration.
Capillary action: The combination of adhesion and cohesion that causes fluids to flow or rise between closely spaced surfaces.
Capillary: waves (substrate) Periodic waviness on a polished surface.

See also Orange peel.
Capture pump: (vacuum technology) A vacuum pump...

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The Foundations of Vacuum Coating Technology

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