Wafer Carrier / Holder Aluminum Oxide and Alumina Ceramics

Ceramic Components For Wafer Stages and Tables
from CoorsTek

Precision ceramic components improve durability and handling of wafer stages and tables used during inspection and processing. CoorsTek components and tables provide precise dimensional stability, ultra-flatness and smoothness, and vacuum holding of wafers during inspection and processing. [See More]

  • Shape / Form: Custom Shape; WaferCarrier
  • Composition: Silicon Carbide: UltraClean™ Recrystallized & CeraSiC, UltraSiC™ Direct Sintered; High-Purity Aluminas
  • Alumina / Aluminate Type: Alumina
  • Applications: Wear resistant parts or tooling; Lithography & Wafer Inspection
Sapphire Wafer
from Monocrystal, Inc.

Due to its dielectric and crystallographic properties, sapphire is an outstanding material for producing various wafers for electronic applications. Sapphire is the basic material in LED production, as its crystal lattice allows the growth of an epitaxial layer of gallium nitride (GaN) with fine... [See More]

  • Shape / Form: WaferCarrier
  • Width / OD: 2 to 10
  • Alumina / Aluminate Type: Sapphire
  • Thickness: 0.0059 to 0.0394
Ceramic Lift Pins
from CoorsTek

Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components. CoorsTek is your partner for... [See More]

  • Shape / Form: WaferCarrier
  • Applications: Wear resistant parts or tooling; Chemical or material processing
  • Alumina / Aluminate Type: Alumina