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  • MICRO: Ultrapure Fluid/Slurry Delivery- McMillan (January 2001)
    A microprocessor-based flow controller system has shown several advantages over the traditional peristaltic pump setup in tests run on polishing tools at AMD's Fab 25. Advanced Micro Devices' Fab 25 in Austin, TX, is a high-volume, state-of-the-art microprocessor device production facility. Like
  • MICRO: Prod Tech news
    the system to combine two pumps into a single system (equivalent to a pump and blower package). Featuring low noise and vibration characteristics, the unit has acoustic pressure levels that are 65% lower than those of traditional pumps. The MDrive product line combines high-torque stepping motors
  • MICRO: Product Technology News (February 2001)
    prior to shipping. Producing proportions of <50 ppb to 5 ppm, the Series 57 arsine permeation tubes deliver verifiable, low-concentration gas standards. Each stainless-steel tube measures 6 x 1.75 in. and contains a permeation membrane. Eliminating the need for high-pressure cylinders that contain
  • MICRO: Product Technology News (April 2001)
    focus-exposure. A high-flow maglev turbopump has a small design for semiconductor processes. The ATH1600 provides reliable vacuum performance. The pump is suitable for metal etch, dielectric etch, interconnect etch, ion implantation, sputtering, and plasma-enhanced chemical vapor deposition

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