Deposition Rate Thin Film Monitors
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor... [See More]
- Measurements: Deposition rate; FilmThickness
- Technology: Quartz crystal microbalance
- Mounting / Loading: Floor
- Applications: CVD / PVD
from Filmetrics, Inc.
The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]
- Measurements: Deposition rate; Optical constants (n or k); FilmThickness
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-line
- Applications: Wafer; CVD / PVD
from Filmetrics, Inc.
Measure film thickness in-line and in real-time at up to seven locations with the F37. Example Layers. Almost any smooth and at-least-partially transparent films may be measured. This includes virtually any semiconducting material, including those used in thin-film photovoltaics. Example Layers. MBE... [See More]
- Measurements: Deposition rate; FilmThickness
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-line
- Applications: Wafer; CVD / PVD