Spectroscopic System Thin Film Monitors
from Filmetrics, Inc.
Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments. The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Area mapping
from Xenemetrix Ltd.
EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
Automated Film Thickness Mapping. The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 450mm in diameter. Map patterns can be polar, rectangular, or linear, or you can create... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Area mapping
from Xenemetrix Ltd.
RoHS Vision. The Fast and Easy Method for Ensuring Compliance. with Regulations for Hazardous Substances. The Restriction of Hazardous Substances Directive (RoHS) restricts toxic metals in electrical and electronic equipment. Xenemetrix ’s new RoHS Vision uses a high resolution detector, a... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
Automated Thickess Mapping for Production Environments. The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Area mapping
from Xenemetrix Ltd.
S-Mobile SDD. Brings the power of laboratory spectrometer to the field. A small compact analyzer that can be taken to the job site. When the task calls for fast real time high quality results the S-Mobile meets the job description perfectly. This instrument features Silicon Drift Detector which... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
Turn Your Microscope into a Film Thickness Measurement Tool. The F40 product family is for applications that require a spot size as small as 1 micron. For most microscopes the F40 simply attaches to the c-mount adapter, which is the industry standard for video camera mounting. The F40 comes complete... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Optical constants (n or k)
from Xenemetrix Ltd.
S-Mobile ULS. Brings the power of laboratory spectrometer to the field. This portable analyzer is specially adapted for Ultra Low Sulfur applications. Complies with the latest and most severe international standard methods for low sulfur concentration levels analysis: ASTM D7212, D4294 and ISO... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
Boost the Capabilities and Extend the Life of Your NanoSpec ™ 180/210 System. Your NanoSpec ™ has been a workhorse for your fab, but many years of use may have caused maintenance costs to balloon. The F40-NSR converts your NanoSpec ™ 180/210 into a modern-day measurement instrument... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Optical constants (n or k)
from Xenemetrix Ltd.
X-Calibur SDD. Bench Top EDXRF Spectrometer. versatile, high energy resolution. Our X-Calibur SDD EDXRF spectrometer features similar configuration like X-Calibur but with Silicon Drift Detector. Thanks to SDD high count rates the instrument improves its response time thus minimizing down time. The... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
Measure Films as Thin as 4nm. The F40-UV can be configured to measure films as thin as 4nm on a spot size as small as 7 microns. It comes complete with its own UV microscope and integrated color video camera that allows exact monitoring of the film thickness measurement spot. Thickness and index can... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Optical constants (n or k)
from Xenemetrix Ltd.
X-Cite. Bench Top EDXRF Spectrometer. economical, accurate, easy to use. Xenemetrix ’s powerful X-Cite benchtop Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer enables system operators to identify the elemental composition of samples. The analyzer performs non-destructive qualitative... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
High-Resolution Film Thickness Maps. The Filmetrics F42 can map the thickness of films, such as OSP, at over one-million points, each with a spot size as small as 3 microns. Using an integrated CCD camera, live video makes it easy to pinpoint exact measurement locations. Once the feature is in the... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Optical constants (n or k); Area mapping
from Xenemetrix Ltd.
X-PMA. Precious Metals EDXRF Spectrometer. fast, accurate, easy to use. XRF is a non-destructive analytical technique that can rapidly and easily identify and determine the presence of various elements such as gold, platinum, silver and other precious metals present in solid, powdered and liquid... [See More]
- Mounting / Loading: Manual loading; Floor
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Measurements: Composition
from Filmetrics, Inc.
Product-Wafer Metrology Made Affordable. Process engineers want film thickness measurements fast and without a lot of hassle. Our innovative Thickness Imaging ™ technology allows Filmetrics to offer easy recipe set up and industry-leading throughput, at a mere fraction of the cost of competing... [See More]
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Area mapping