Semiconductor Wafers Thin Film Monitors
from Filmetrics, Inc.
Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments. The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic... [See More]
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-process, in-situ or system mounted
- Measurements: Area mapping
from Hitachi High-Tech America
Microspot XRF coating thickness and materials analyzers for rapid quality control and validation testing, making it easy to get the right results in seconds. Coating thickness and materials analysis based on X-ray fluorescence (XRF) is a widely accepted and industry-proven analytical technique,... [See More]
- Applications: Wafer; Electroplate
- Technology: X-ray Diffractometer
- Mounting / Loading: Manual loading
- Measurements: Composition; FilmThickness
from Xenemetrix Ltd.
EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Mounting / Loading: Manual loading; Floor
- Measurements: Composition
from Phenom-World BV
The Phenom Pro desktop SEM is one of the most advanced imaging models in the Phenom series. With its long-life high-brightness CeB6 electron source, the Phenom Pro creates state-of-the-art images with a minimum of user maintenance intervention. The backscattered-electron detector (BSED) and... [See More]
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
- Technology: FIB
- Mounting / Loading: Manual loading
- Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Roughness / Waviness; Area mapping
from WDI Wise Device Inc.
The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]
- Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
- Technology: Optical / Imaging
- Mounting / Loading: In-process, in-situ or system mounted
- Measurements: Defects, dimples or film residues; FilmThickness; Area mapping; Mask Alignment
from Technic, Inc.
Technic ’s EBA (Electroplating Bath Analyzer) provides an easy to implement, accurate and trouble-free analysis of your electroplating solutions. The EBA utilizes a patented combination of processing technique, software and hardware to obtain greater consistency and accuracy in analytical... [See More]
- Applications: Wafer; Electroplate
from Filmetrics, Inc.
Automated Film Thickness Mapping. The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples up to 450mm in diameter. Map patterns can be polar, rectangular, or linear, or you can create... [See More]
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-process, in-situ or system mounted
- Measurements: Area mapping
from Xenemetrix Ltd.
RoHS Vision. The Fast and Easy Method for Ensuring Compliance. with Regulations for Hazardous Substances. The Restriction of Hazardous Substances Directive (RoHS) restricts toxic metals in electrical and electronic equipment. Xenemetrix ’s new RoHS Vision uses a high resolution detector, a... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Mounting / Loading: Manual loading; Floor
- Measurements: Composition
from Phenom-World BV
The Phenom ProX desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system. With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Viewing three-dimensional images of microscopic structures... [See More]
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
- Technology: FIB
- Mounting / Loading: Manual loading
- Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Roughness / Waviness; Area mapping
from Technic, Inc.
The RTA is an automated, on-line, real-time, and in-tank system for monitoring and controlling the levels of chemical constituents of plating baths. The RTA technology is a unique modern approach to metrology combining the advanced, purpose-selected electroanalytical techniques with state-of-the-art... [See More]
- Applications: Wafer; Electroplate
from Filmetrics, Inc.
Automated Thickess Mapping for Production Environments. The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board... [See More]
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-process, in-situ or system mounted
- Measurements: Area mapping
from Xenemetrix Ltd.
X-Calibur SDD. Bench Top EDXRF Spectrometer. versatile, high energy resolution. Our X-Calibur SDD EDXRF spectrometer features similar configuration like X-Calibur but with Silicon Drift Detector. Thanks to SDD high count rates the instrument improves its response time thus minimizing down time. The... [See More]
- Applications: Wafer; CVD / PVD; Electroplate
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
- Mounting / Loading: Manual loading; Floor
- Measurements: Composition
from Phenom-World BV
The Phenom Pure desktop SEM (scanning electron microscope) is an ideal tool for making the transition from working with a light microscope to operating an electron microscope. The Phenom Pure is equipped with the basic fundamentals for meeting imaging needs. The Phenom Pure provides high-quality... [See More]
- Applications: Wafer; CVD / PVD; Packaged IC or substrate
- Technology: FIB
- Mounting / Loading: Manual loading
- Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Roughness / Waviness; Area mapping