Semiconductor Wafers Thin Film Monitors Datasheets

Electroplating Bath Analyzer -- EBA
from Technic, Inc.

Technic ’s EBA (Electroplating Bath Analyzer) provides an easy to implement, accurate and trouble-free analysis of your electroplating solutions. The EBA utilizes a patented combination of processing technique, software and hardware to obtain greater consistency and accuracy in analytical... [See More]

  • Applications: Wafer; Electroplate
Automated Cassette-to-Cassette Thin Film Thickness Mapping System -- F60-c Series
from Filmetrics, Inc.

Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments. The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic... [See More]

  • Applications: Wafer; CVD / PVD
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Area mapping
In-Line Spectroscopic Ellipsometer -- UVISEL
from HORIBA Scientific

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems. The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data... [See More]

  • Applications: Wafer; CVD / PVD
  • Technology: Ellipsometer; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: Floor
  • Measurements: FilmThickness
Desktop Scanning Electron Microscope -- Phenom Pro
from Phenom-World BV

The Phenom Pro desktop SEM is one of the most advanced imaging models in the Phenom series. With its long-life high-brightness CeB6 electron source, the Phenom Pro creates state-of-the-art images with a minimum of user maintenance intervention. The backscattered-electron detector (BSED) and... [See More]

  • Applications: Wafer; CVD / PVD; Packaged IC or substrate
  • Technology: FIB
  • Mounting / Loading: Manual loading
  • Measurements: Composition; Defects, dimples or film residues; Critical dimensions or Trench geometry; Particle contamination; Roughness / Waviness; Area mapping
Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
  • Technology: Reflectometer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: FilmThickness (optional feature); WaferThickness (optional feature)
Laser Scanning Confocal Microscope -- LSCM
from WDI Wise Device Inc.

The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]

  • Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
  • Technology: Optical / Imaging
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Defects, dimples or film residues; FilmThickness; Area mapping; Mask Alignment
EDXRF Analyzer -- EX-6600 SDD
from Xenemetrix Ltd.

EX-6600 SDD. Secondary Target EDXRF. Xenemetrix ’s EX-6600 SDD Energy Dispersive X-ray Fluorescence (EDXRF) spectrometer offers the ultimate in sensitivity and selectivity. The Silicon Drift Detector (SDD) simultaneously delivers lower electronic noise and higher count rates which translates... [See More]

  • Applications: Wafer; CVD / PVD; Electroplate
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); EDXRF
  • Mounting / Loading: Manual loading; Floor
  • Measurements: Composition