Thickness - Film / Layer Thin Film Monitors
from WDI Wise Device Inc.
The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]
- Measurements: Defects, dimples or film residues; FilmThickness; Area mapping; Mask Alignment
- Technology: Optical / Imaging
- Mounting / Loading: In-process, in-situ or system mounted
- Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography
from Nor-Cal Products, Inc. - The Vacuum Experts
Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor... [See More]
- Measurements: Deposition rate; FilmThickness
- Technology: Quartz crystal microbalance
- Mounting / Loading: Floor
- Applications: CVD / PVD
from Hitachi High-Tech America
Microspot XRF coating thickness and materials analyzers for rapid quality control and validation testing, making it easy to get the right results in seconds. Coating thickness and materials analysis based on X-ray fluorescence (XRF) is a widely accepted and industry-proven analytical technique,... [See More]
- Measurements: Composition; FilmThickness
- Technology: X-ray Diffractometer
- Mounting / Loading: Manual loading
- Applications: Wafer; Electroplate
from Filmetrics, Inc.
The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]
- Measurements: Deposition rate; Optical constants (n or k); FilmThickness
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Mounting / Loading: In-line
- Applications: Wafer; CVD / PVD