Thickness - Film / Layer Thin Film Monitors Datasheets

Benchtop XRF Analyser -- MAXXI 6
from Hitachi High-Tech Analytical Science

Coating thickness measurement, based on X-ray fluorescence (XRF), is a widely accepted and industry-proven analytical technique, offering easy to use, fast and non-destructive analysis, requiring little to no sample preparation, capable of analysing solids or liquids over a wide element range from... [See More]

  • Measurements: FilmThickness; Elemental Analysis
  • Applications: Electroplate
  • Technology: X-ray Diffractometer
  • Features: Non-destructive
Deposition Monitor, 2 Channels
from Nor-Cal Products, Inc. - The Vacuum Experts

Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor... [See More]

  • Measurements: Deposition rate; FilmThickness
  • Technology: Quartz crystal microbalance
  • Mounting / Loading: Floor
  • Applications: CVD / PVD
Thin Film Deposition Monitor -- F30 Series
from Filmetrics, Inc.

The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]

  • Measurements: Deposition rate; Optical constants (n or k); FilmThickness
  • Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
  • Mounting / Loading: In-line
  • Applications: Wafer; CVD / PVD
In-Line Spectroscopic Ellipsometer -- UVISEL
from HORIBA Scientific

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems. The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data... [See More]

  • Measurements: FilmThickness
  • Technology: Ellipsometer; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
  • Mounting / Loading: Floor
  • Applications: Wafer; CVD / PVD
Aleris Family -- 8330
from KLA-Tencor Corporation

The Aleris Family of film metrology tools provides reliable and precise measurement of film thickness, refractive index, stress and composition for the 32nm node and beyond. Utilizing Broadband Spectroscopic Ellipsometry (BBSE) technology, the Aleris systems form a comprehensive metrology solution,... [See More]

  • Measurements: Composition (optional feature); FilmThickness; Refractive Index
  • Technology: Reflectometer
  • Mounting / Loading: Floor
  • Applications: CVD / PVD
Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Measurements: FilmThickness (optional feature); WaferThickness (optional feature)
  • Technology: Reflectometer
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer (optional feature); Memory drive disc or head (optional feature); CVD / PVD (optional feature); Flat panel display (optional feature); Optical components or lenses (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
Laser Scanning Confocal Microscope -- LSCM
from WDI Wise Device Inc.

The LSCM has the advantages of a confocal laser scanning microscope with the size and price of an IR camera. The combination of high contrast imaging, infrared capabilities, extremely small size and low cost enables many new applications. [See More]

  • Measurements: Defects, dimples or film residues; FilmThickness; Area mapping; Mask Alignment
  • Technology: Optical / Imaging
  • Mounting / Loading: In-process, in-situ or system mounted
  • Applications: Wafer; CVD / PVD; Flat panel display; Packaged IC or substrate; Optical components or lenses; Photolithography