In-line Thin Film Monitors Datasheets
Thin Film Deposition Monitor -- F30 Series
from Filmetrics, Inc.
from Filmetrics, Inc.
The Most Powerful Tool Available for Monitoring Thin-Film Deposition. Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system. Example Layers. MBE and MOCVD: Smooth and... [See More]
- Mounting / Loading: In-line
- Applications: Wafer; CVD / PVD
- Technology: Spectrometer (SIMS, XRF, FTIR, DLTS, AAS); Spectral Reflectance
- Measurements: Deposition rate; Optical constants (n or k); FilmThickness