Ion Implantation and Synthesis of Materials

Ion Implantation and Synthesis of Materials

Michael Nastasi,
PhD Laboratory Fellow and Team Leader

Ion-Solid Interaction and Interface Engineering Team
Los Alamos National Laboratory, MS-K771 Los Alamos, NM 87545,. USA E-mail: nasty@lanl.gov
James W. Mayer,
PhD
Center for Solid State Science

Arizona State University
Tempe, AZ, 85287-1704. USA E-mail: james.mayer@asu.edu

With 131 Figures and 10 Tables

Library of Congress Control Number: 2006930120

ISBN-10 3-540-23674-0 Springer Berlin Heidelberg New York

ISBN-13

978-3-540-23674-0 Springer Berlin Heidelberg New York

This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law.

Springer is a part of Springer Science+Business Media.

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Springer-Verlag Berlin Heidelberg 2006

The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use.

Typesetting by the Authors and SPi

Cover design: design & production GmbH, Heidelberg

Printed on acid-free paper SPIN 10864147 57/3100/SPi 5 4 3 2 1 0

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