Ion Implantation and Synthesis of Materials

| element | atomic number ( Z) | isotopic mass (amu) | relative abundance | atomic weight (amu) | atomic density (atoms cm -3) | mass density (g cm -3) |
|---|---|---|---|---|---|---|
| H | 1 | 1.0078 | 99.985 | 1.00794 | ||
| 2.0141 | 0.015 | |||||
| He | 2 | 3.0160 | 0.0001 | 4.002602 | ||
| 4.0026 | 99.9999 | |||||
| Li | 3 | 6.0151 | 7.5 | 6.941 | 4.60 10 22 | 0.53 |
| 7.0160 | 92.5 | |||||
| Be | 4 | 9.0122 | 100 | 9.01282 | 1.24 10 23 | 1.85 |
| B | 5 | 10.0129 | 19.9 | 10.811 | 1.30 10 23 | 2.34 |
| 11.0093 | 80.1 | |||||
| C | 6 | 12.0000 | 98.9 | 12.011 | 1.31 10 23 | 2.62 |
| 13.0034 | 1.1 | |||||
| N | 7 | 14.0031 | 99.63 | 14.00674 | 5.38 10 22 | 1.251 |
| 15.0001 | 0.37 | |||||
| O | 8 | 15.9949 | 99.762 | 15.9994 | 5.38 10 22 | 1.429 |
| 16.9991 | 0.038 | |||||
| 17.9992 | 0.2 | |||||
| F | 9 | 18.9984 | 100 | 18.9984032 | 5.38 10 22 | 1.696 |
| Ne | 10 | 19.9924 | 90.51 | 20.1797 | 2.69 10 22 | 0.901 |
| 20.9938 | 0.27 | |||||
| 21.9914 | 9.22 | |||||
| Na | 11 | 22.9898 | 100 | 22.989768 | 2.54 10 22 | 0.97 |
| Mg | 12 | 23.9850 | 78.99 | 24.305 | 4.31 10 22 | 1.74 |
| 24.9858 | 10. | |||||
| 25.9826 | 11.01 | |||||
| Al | 13 | 26.9815 | 100 | 26.981539 | 6.03 10 22 | 2.70 |
| Si | 14 | 27.9769 | 92.23 | 28.0855 | 5.00 10 22 | 2.33 |
| 28.9765 | 4.67 |