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  • Foreline Traps
    Molecular sieve traps containing type 13X synthetic zeolite effectively prevent oil backstreaming and trap water vapors at room temperature.Type 13X zeolite will adsorb molecules with critical diameters up to 10 angstrom. The sieve charge can be reactivated by baking out in place when a base vacuum
  • MICRO:Product Technology News (March 2001)
    decreasing pump speed. Condensable effluents generated by aluminum etch processes are collected by the trap at a rapid rate. Maintaining the trap involves replacing a single disposable trapping element, rather than cleaning several feet of vacuum line. The trap's efficiency eliminates the need to run
  • MICRO: Product Technology News (February 2001)
    for other toxic gases, including phosphine, silane, germane, and boron trifluoride. A high-capacity vacuum inlet and exhaust trap

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