Reflectometer Thin Film Monitors Datasheets

Aleris Family -- 8330
from KLA-Tencor Corporation

The Aleris Family of film metrology tools provides reliable and precise measurement of film thickness, refractive index, stress and composition for the 32nm node and beyond. Utilizing Broadband Spectroscopic Ellipsometry (BBSE) technology, the Aleris systems form a comprehensive metrology solution,... [See More]

  • Technology: Reflectometer
  • Applications: CVD / PVD
  • Mounting / Loading: Floor
  • Measurements: Composition (optional feature); FilmThickness; Refractive Index
Texture Measurement System -- Microscan
from ULVAC Technologies, Inc.

Provides a broad range of specs suitable for various R & D applications [See More]

  • Technology: Reflectometer; Optical / Imaging
  • Applications: Wafer; CVD / PVD
  • Mounting / Loading: In-process, in-situ or system mounted
  • Measurements: Defects, dimples or film residues; FilmThickness; Roughness / Waviness